Patents by Inventor Jody Fronheiser

Jody Fronheiser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140264488
    Abstract: One illustrative device disclosed herein includes a substrate fin formed in a substrate comprised of a first semiconductor material, wherein at least a sidewall of the substrate fin is positioned substantially in a <100> crystallographic direction of the crystalline structure of the substrate, a replacement fin structure positioned above the substrate fin, wherein the replacement fin structure is comprised of a semiconductor material that is different from the first semiconductor material, and a gate structure positioned around at least a portion of the replacement fin structure.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Inventors: Jody Fronheiser, Ajey P. Jacob, Witold P. Maszara, Kerem Akarvardar
  • Patent number: 8815685
    Abstract: Methods are provided for fabricating integrated circuits. In accordance with one embodiment, the method includes forming a portion of a semiconductor substrate at least partially bounded by a confinement isolation material. A liner dielectric is formed overlying the confinement isolation material and is treated to passivate a surface thereof. An epitaxial layer of semiconductor material is then grown overlying the portion of semiconductor substrate.
    Type: Grant
    Filed: January 31, 2013
    Date of Patent: August 26, 2014
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Nicholas LiCausi, Jody Fronheiser, Errol Todd Ryan
  • Publication number: 20140213037
    Abstract: Methods are provided for fabricating integrated circuits. In accordance with one embodiment, the method includes forming a portion of a semiconductor substrate at least partially bounded by a confinement isolation material. A liner dielectric is formed overlying the confinement isolation material and is treated to passivate a surface thereof An epitaxial layer of semiconductor material is then grown overlying the portion of semiconductor substrate.
    Type: Application
    Filed: January 31, 2013
    Publication date: July 31, 2014
    Applicant: GLOBALFOUNDRIES, INC.
    Inventors: Nicholas LiCausi, Jody Fronheiser, Errol Todd Ryan
  • Patent number: 8728885
    Abstract: One method herein includes forming a plurality of spaced-apart trenches that extend at least partially into a semiconducting substrate, wherein the trenches define a fin structure comprised of first and second layers of semiconducting material, wherein the first layer of semiconducting material is selectively etchable relative to the substrate and the second layer of semiconducting material, forming a sacrificial gate structure above the fin, wherein the gate structure includes a gate insulation layer and a gate electrode, forming a sidewall spacer adjacent the gate structure, performing an etching process to remove the sacrificial gate structure, thereby defining a gate cavity, performing at least one selective etching process to selectively remove the first layer of semiconducting material relative to the second layer of semiconducting material within the gate cavity, thereby defining a space between the second semiconducting material and the substrate, and forming a final gate structure in the gate cavity.
    Type: Grant
    Filed: December 27, 2012
    Date of Patent: May 20, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Daniel T. Pham, Jody Fronheiser, William J. Taylor, Jr.
  • Patent number: 8673718
    Abstract: One method involves providing a substrate comprised of first and second semiconductor materials, performing an etching process through a hard mask layer to define a plurality of trenches that define first and second portions of a fin for a FinFET device, wherein the first portion is the first material and the second portion is the second material, forming a layer of insulating material in the trenches, performing a planarization process on the insulating material, performing etching processes to remove the hard mask layer and reduce a thickness of the second portion, thereby defining a cavity, performing a deposition process to form a third portion of the fin on the second portion, wherein the third portion is a third semiconducting material that is different from the second material, and performing a process such that a post-etch upper surface of the insulating material is below an upper surface of the third portion.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: March 18, 2014
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Publication number: 20140011341
    Abstract: One method involves providing a substrate comprised of first and second semiconductor materials, performing an etching process through a hard mask layer to define a plurality of trenches that define first and second portions of a fin for a FinFET device, wherein the first portion is the first material and the second portion is the second material, forming a layer of insulating material in the trenches, performing a planarization process on the insulating material, performing etching processes to remove the hard mask layer and reduce a thickness of the second portion, thereby defining a cavity, performing a deposition process to form a third portion of the fin on the second portion, wherein the third portion is a third semiconducting material that is different from the second material, and performing a process such that a post-etch upper surface of the insulating material is below an upper surface of the third portion.
    Type: Application
    Filed: July 9, 2012
    Publication date: January 9, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. Licausi, Jody A. Fronheiser, Kerem Akarvardar
  • Publication number: 20130309847
    Abstract: One illustrative method disclosed herein involves performing a first etching process through a patterned hard mask layer to define a plurality of spaced-apart trenches in a substrate that defines a first portion of a fin for the device, forming a layer of insulating material in the trenches and performing a planarization process on the layer of insulating material to expose the patterned hard, performing a second etching process to remove the hard mask layer and to define a cavity within the layer of insulating material, forming a second portion of the fin within the cavity, wherein the second portion of the fin is comprised of a semiconducting material that is different than the substrate, and performing a third etching process on the layer of insulating material such that an upper surface of the insulating material is below an upper surface of the second portion of the fin.
    Type: Application
    Filed: May 21, 2012
    Publication date: November 21, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Patent number: 8580642
    Abstract: One illustrative method disclosed herein involves performing a first etching process through a patterned hard mask layer to define a plurality of spaced-apart trenches in a substrate that defines a first portion of a fin for the device, forming a layer of insulating material in the trenches and performing a planarization process on the layer of insulating material to expose the patterned hard, performing a second etching process to remove the hard mask layer and to define a cavity within the layer of insulating material, forming a second portion of the fin within the cavity, wherein the second portion of the fin is comprised of a semiconducting material that is different than the substrate, and performing a third etching process on the layer of insulating material such that an upper surface of the insulating material is below an upper surface of the second portion of the fin.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: November 12, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Witold P. Maszara, Ajey P. Jacob, Nicholas V. LiCausi, Jody A. Fronheiser, Kerem Akarvardar
  • Patent number: 7850941
    Abstract: A method for forming an array of elongated nanostructures, includes in one embodiment, providing a substrate, providing a template having a plurality of pores on the substrate, and removing portions of the substrate under the plurality of pores of the template to form a plurality of cavities. A catalyst is provided in the plurality of cavities in the substrate, and the pores of the template are widened to expose the substrate around the catalyst so that the catalyst is spaced from the sides of the plurality of pores of the template. A plurality of elongated nanostructures is grown from the catalyst spaced from the sides of the pores of the template.
    Type: Grant
    Filed: October 20, 2006
    Date of Patent: December 14, 2010
    Assignee: General Electric Company
    Inventors: Loucas Tsakalakos, Bastiaan A. Korevaar, Joleyn E. Balch, Jody A. Fronheiser, Reed R. Corderman, Fred Sharifi, Vidya Ramaswamy
  • Publication number: 20100108132
    Abstract: Disclosed herein is a nanodevice. Disclosed herein too is a method of manufacturing a nanodevice. In one embodiment the nanodevice includes a first substrate; a second substrate; a nanowire; the nanowire contacting the first substrate and the second substrate; the nanowire comprising a metal, a semi-conductor or a combination thereof.
    Type: Application
    Filed: October 30, 2008
    Publication date: May 6, 2010
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Loucas Tsakalakos, Bastiaan Arie Korevaar, Joleyn Eileen Balch, Jody Fronheiser, Bo Li, Anis Zribi
  • Publication number: 20080093698
    Abstract: A method for forming an array of elongated nanostructures, includes in one embodiment, providing a substrate, providing a template having a plurality of pores on the substrate, and removing portions of the substrate under the plurality of pores of the template to form a plurality of cavities. A catalyst is provided in the plurality of cavities in the substrate, and the pores of the template are widened to expose the substrate around the catalyst so that the catalyst is spaced from the sides of the plurality of pores of the template. A plurality of elongated nanostructures is grown from the catalyst spaced from the sides of the pores of the template.
    Type: Application
    Filed: October 20, 2006
    Publication date: April 24, 2008
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Loucas TSAKALAKOS, Bastiaan A. KOREVAAR, Joleyn E. BALCH, Jody A. FRONHEISER, Reed R. CORDERMAN, Fred SHARIFI, Vidya RAMASWAMY
  • Publication number: 20060267021
    Abstract: A power device includes at least one n-type semiconductor layer and at least one p-type silicon carbide epitaxial layer comprising gallium acceptors. Another power device includes at least one epitaxial silicon carbide layer and at least one p-type region formed epitaxially in the epitaxial silicon carbide layer. The p-type region comprises gallium acceptors. A method for forming a semiconductor device includes forming a first conductivity type semiconductor layer on a substrate, forming a second conductivity type semiconductor layer on the first conductivity type semiconductor layer. At least one of the semiconductor layers comprises silicon carbide, and one of the forming steps comprises epitaxially doping the respective silicon carbide layer with gallium acceptors.
    Type: Application
    Filed: May 27, 2005
    Publication date: November 30, 2006
    Inventors: Larry Rowland, Jody Fronheiser