Abstract: A two-stage proportional control valve configured for use in a fluid system includes a valve body having a longitudinally extending valve body bore formed therethrough. A first stage microvalve is mounted within the valve body bore, and a second stage spool assembly is mounted within the valve body bore downstream of the microvalve. The second stage spool assembly includes a sleeve and a spool slidably mounted within the sleeve.

Abstract: A two-stage fluid control valve includes a first stage mechanical control valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage mechanical control valve is in the open position.

Abstract: A method of attaching a MEMS die to a mounting surface includes coating an inside surface of a pressure port of a fluid inlet member with a layer of solder mask, the fluid inlet member having a first axial end, a second axial end, and a port opening of the pressure port formed in the second axial end of the fluid inlet member. A solder preform is disposed on the mounting surface of the fluid inlet member and a MEMS die is disposed on the solder preform. The solder preform is heated in a re-flow operation to attach the MEMS die to the mounting surface, wherein the solder mask within the pressure port prevents molten solder from entering the pressure port during the re-flow operation.

Abstract: A microvalve includes a first plate having a surface, a recessed area provided within the surface, a fluid port provided within the recessed area, and a sealing structure extending about the fluid port, the sealing structure having at least one divot formed therein. A second plate has a surface adjacent the surface of the first plate and including a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an open position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.

Abstract: An improved aerosol dispensing apparatus includes an aerosol container, a discharge piece, an actuator, a flow control canister valve assembly attached to the aerosol container, a battery, and an electronically controlled flow control valve electronically connected to the battery and in fluid communication with the flow control canister valve assembly. The aerosol container and the attached flow control canister valve assembly are further attached to the actuator and the actuator is mounted for slidable movement within the discharge piece. The flow control canister valve assembly is movable between an open position wherein a volume of an aerosol formulation is directed from the aerosol container through the flow control canister valve assembly to the electronically controlled flow control valve, and a closed position wherein the aerosol formulation is not permitted to flow through the flow control canister valve assembly to the electronically controlled flow control valve.

Abstract: A two-stage control microvalve includes a generally cylindrical housing configured for insertion into a bore in a body of a hydro-mechanical valve system, a pilot microvalve mounted within the housing, and a piloted microvalve mounted within the housing and in fluid communication with the pilot microvalve.

Abstract: A valve assembly is configured to regulate the flow of an isolated fluid therethrough and includes a first valve stage configured to control the flow of a first fluid through a first fluid circuit, and a second valve stage configured to control the flow of a second fluid through a second fluid circuit. The first valve stage is connected to the second valve stage such that the first fluid acts on the second valve stage to move the second valve stage between open and closed positions. The second fluid flowing through the second valve stage is also isolated from the first fluid flowing through the first valve stage.

Abstract: A method of attaching a MEMS die to a surface includes centering and rotationally aligning a solder perform on a solder surface of a body, centering and rotationally aligning a MEMS die on the solder preform, and heating the solder perform in a reflow process until the solder is molten and surface tension of the molten solder moves the MEMS die to a position where the surface tensions balance, and the MEMS die is centered on, and rotationally aligned with, the solder surface of the body.

Abstract: The electronically switchable MEMS valve includes a housing formed from soft magnetic material and defining a fluid flow path therethrough. A magnetic field generating member is mounted within the housing and connected to a source of electrical power. A MEMS valve portion is mounted within the magnetic field generating member, has a valve closing member movably mounted therein, and defines a portion of the fluid flow path therethrough. The valve closing element is movable between a closed position wherein the fluid flow path is blocked, and an open position wherein the fluid flow path is not blocked. When an electric current is removed from the magnetic field generating member, the valve closing element is configured to move to and remain in the one of the closed position and the open position to which the valve closing element is the closest when the electric current is removed.

Abstract: A microchannel heat exchanger is configured for use as an evaporator in a fluid cooling system and includes an inlet header, an outlet header, and a plurality of microchannel tubes extending between and in fluid communication with the inlet header and the outlet header. A microvalve actuated hybrid spool valve is attached to and in fluid communication with the inlet header.

Abstract: A two-stage proportional control valve configured for use in a fluid system includes a valve body having a longitudinally extending valve body bore formed therethrough. A first stage microvalve is mounted within the valve body bore, and a second stage spool assembly is mounted within the valve body bore downstream of the microvalve. The second stage spool assembly includes a sleeve and a spool slidably mounted within the sleeve.

Abstract: A two-stage fluid control valve includes a first stage mechanical control valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage mechanical control valve is in the open position.

Abstract: A microvalve includes a first plate having a surface defining an actuator cavity. A second plate has a surface that abuts the surface of the first plate and includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. An actuator is connected to the displaceable member and has only one or two pairs of actuator ribs.

Abstract: A method of calibrating a plurality of superheat controllers includes attaching a plurality of superheat controllers to a manifold assembly, enclosing the manifold assembly within an environmental chamber, and simultaneously calibrating a pressure sensor within each of the plurality of superheat controllers.

Abstract: A microvalve includes a first plate having a surface, a recessed area provided within the surface, a fluid port provided within the recessed area, and a sealing structure extending about the fluid port, the sealing structure having at least one divot formed therein. A second plate has a surface adjacent the surface of the first plate and including a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an open position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.

Abstract: A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealing structure extends about the normally closed fluid port. A second plate defines a non-movable portion and a movable portion. A surface of the non-movable portion abuts the inner surface of the first plate, the non-movable portion having an opening formed therethrough. The movable portion is formed within the opening, has an axis, and defines a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening.

Abstract: A microvalve includes a displaceable member having an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. Each of the actuator ribs has a first portion and a second portion, the first portions each having an end connected to the central spine, the second portions each having an end connected to the central spine. A channel is formed in the plate. A plurality of elongated openings is formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges. One of the elongated openings separates each rib in the second portion of ribs from an adjacent rib or the plate. The channel and a longitudinally extending side edge of one of the elongated openings separate the second portion of the actuator ribs from the plate and define an electrical isolation region.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion, a surface of the non-movable portion abutting the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The movable portion is formed within the first opening and has an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches.

Abstract: A microvalve includes a first plate having a surface defining an actuator cavity. A second plate has a surface that abuts the surface of the first plate and includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. An actuator is connected to the displaceable member and has only one or two pairs of actuator ribs.