Abstract: A valve assembly is configured to regulate the flow of an isolated fluid therethrough and includes a first valve stage configured to control the flow of a first fluid through a first fluid circuit, and a second valve stage configured to control the flow of a second fluid through a second fluid circuit. The first valve stage is connected to the second valve stage such that the first fluid acts on the second valve stage to move the second valve stage between open and closed positions. The second fluid flowing through the second valve stage is also isolated from the first fluid flowing through the first valve stage.

Abstract: A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.

Abstract: A plate is adapted for use in a microvalve and includes a displaceable member configured for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. The displaceable member includes an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. The actuator ribs have a first portion and a second portion, the first portion having a first end and a second end, the second end of the first portion connected to the central spine, the second portion having a first end and a second end, the second end of the second portion connected to the central spine. A channel is formed in the plate. A plurality of elongated openings are formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches.

Abstract: A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealing structure extends about the normally closed fluid port. A second plate defines a non-movable portion and a movable portion. A surface of the non-movable portion abuts the inner surface of the first plate, the non-movable portion having an opening formed therethrough. The movable portion is formed within the opening, has an axis, and defines a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening.

Abstract: A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion, a surface of the non-movable portion abutting the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The movable portion is formed within the first opening and has an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening.

Abstract: A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.

Abstract: A microvalve includes a base plate including a surface, a recessed area provided within the surface, a first fluid port provided within the recessed area, and a first sealing structure extending about the first fluid port. The microvalve also includes a cover plate including a surface, a recessed area provided within the surface, a second fluid port provided within the recessed area, and a second sealing structure extending about the second fluid port. An intermediate plate is disposed between the base plate and the cover plate and includes a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structures to prevent fluid communication between the fluid ports, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structures to prevent fluid communication between the fluid ports.