Abstract: Process for observing at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via a first scanner along at least one scanning axis essentially perpendicular to the illumination axis wherein several illuminated sample points lie on a line and are detected simultaneously with a spatially resolving detector. At an angle to the plane of the relative movement, a second scanner is moved and an image acquisition takes place by coupling the movement of the first and second scanners and a three-dimensional sampling movement being done by the illumination of the sample. The second scanner is coupled to the movement of the first scanner such that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanner as well as along the scanning direction of the second scanner.

Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

Abstract: A calibration device for managing a variety of performance tests and/or calibration tasks in a laser scanning microscope. The calibration device, which has focusing optics and a test structure arranged in the focal plane of the focusing optics, with structural elements detectable in reflected and/or transmitted light aligned to each other in a common mounting, can be switched into the microscope beam path in a laser scanning microscope, so that the pupil of the focusing optics coincides with the objective pupil of the laser scanning microscope or lies in a plane conjugated to it.

Abstract: In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a specimen region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the specimen while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated specimen region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the specimen f while scanning and that the confocal aperture is designed as a slit aperture (26) or as a slit-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.

Abstract: Laser Scanning Microscope with an illumination beam path for illumination of a sample and a detection beam path for wavelength-dependent recording of the light from the sample, whereby filters for selection of the detection wavelengths are provided, characterized in that at least one graduated filter spatially variable in regard to the threshold wavelength between the transmission and reflection is provided in several partial beam paths for the selection of the wavelengths.

Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

Abstract: Method for correcting a control of an optical scanner (14) in a device for mapping of a sample (2; 2?) by scanning, said device guiding at least one beam path section (4?, 18?) of an illumination beam path of the device over the sample (2; 2?) from an illumination device (10) to the sample (2; 2?) and/or a mapping beam path of the device from the sample (2; 2?) to a determination device (10) of the device in order to obtain an image of the sample (2; 2?), generating control signals corresponding to a predetermined setpoint movement using parameters and/or a transfer function of the scanner (14) that are used for control and/or regulation and moving the at least one beam path section (4?, 18?) in response to the control signals, whereby in the method an image of a reference sample (2; 2?) having predetermined structures (36) mappable by the device is obtained by generating control signals corresponding to a predetermined setpoint test movement and moving the at least one beam path section (4?, 18?) in response

Abstract: Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via a first scanner along at least one scanning axis essentially perpendicular to the illumination axis wherein at an angle to the plane of the relative movement, preferably perpendicular thereto a second scanner is moved and an image acquisition takes place by the movement of the first and second scanners being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scanner is coupled to the movement of the first scanner in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanner as well as along the scanning direction of the second scanner.

Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

Abstract: Laser Scanning Microscope with an illumination beam path for illumination of a sample and a detection beam path for wavelength-dependent recording of the light from the sample, whereby filters for selection of the detection wavelengths are provided, characterized in that at least one graduated filter spatially variable in regard to the threshold wavelength between the transmission and reflection is provided in several partial beam paths for the selection of the wavelengths.

Abstract: A correction device for an imaging optical arrangement exhibiting a light path (1), in particular for a microscope, that exhibits at least one plane-parallel transparent plate (9), which is held in a mounting plate in the image beam path (1) and is propelable around at least one axle in a tipping and/or a swiveling motion, in order in adjust a definite parallel misalignment of the beams in the image beam path (1) by a change in the tipping situation of the plate (9). A confocal microscope with such a correction device exhibits a confocal screen (4), which illustrates a specimen mark (10), whereby the plane-parallel plate (9) is placed in front of the detector unit (2) in the light path (1), in order to center the illustration of the aperture diaphragm on the detector unit.

Abstract: A correction device for an imaging optical arrangement exhibiting a light path (1), in particular for a microscope, that exhibits at least one plane-parallel transparent plate (9), which is held in a mounting plate in the image beam path (1) and is propelable around at least one axle in a tipping and/or a swiveling motion, in order in adjust a definite parallel misalignment of the beams in the image beam path (1) by a change in the tipping situation of the plate (9). A confocal microscope with such a correction device exhibits a confocal screen (4), which illustrates a specimen mark (10), whereby the plane-parallel plate (9) is placed in front of the detector unit (2) in the light path (1), in order to center the illustration of the aperture diaphragm on the detector unit.

Abstract: A spectral analytical unit for acting on a parallel light bundle having different wavelengths.

Abstract: Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via first scanning means along at least one scanning axis essentially perpendicular to the illumination axis wherein the illumination light illuminates the sample in parallel at several points or regions and several points or regions are detected simultaneously wherein at an angle to the plane of the relative movement, preferably perpendicular thereto, second scanning means are moved and an image acquisition takes place by the movement of the first and second scanning means being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scanning means are coupled to the movement of the first scanning means in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanning means as well as along

Abstract: Method for scanner control in at least one scan axis in a laser scanning microscope, the scan field being divided into partial area, a first image of at least one partial area produced by a forward scan being compared with a second image of the partial area produced by a back scan and a correction value for the scanner control determined from the deviation between the first and second image.

Abstract: Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via first scanning means along at least one scanning axis essentially perpendicular to the illumination axis wherein at an angle to the plane of the relative movement, preferably perpendicular thereto, second scanning means are moved and an image acquisition takes place by the movement of the first and second scanning means being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scamming means are coupled to the movement of the first scanning means in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanning means as well as along the scanning direction of the second scanning means.

Abstract: In a method for correcting a control of an optical scanner (14) which has a beam deflecting element (31) for deflecting a beam of optical radiation and a drive unit (30, 30?) for moving the beam deflecting element (31), said drive unit deflecting a beam of optical radiation directed at the beam deflecting element (31) according to a predetermined setpoint movement using at least one parameter and/or a transfer function, preferably optical, said parameter or transfer function being used to control or regulate the system. In a determination step at least one instantaneous value of a drive unit transfer function that reproduces the response of the drive unit (30, 30?) to a predetermined setpoint movement or a change in a setpoint movement is ascertained for at least one frequency, and in a correction step at least one parameter and/or the transfer function is corrected as a function of the instantaneous value of the drive unit transfer function.

Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

Abstract: A Laser Scanning Microscope with an illumination radiation distribution, which is guided over a sample for scanning and in which an image of the sample is taken from the sample radiation generated and detected during the scanning, wherein the sample is sampled with an imaging rate of x images per second, wherein in a mode for the adjustment of the device parameters, the imaging rate is reduced with uniform sampling speed. preferably for sparing the sample the exposure, to a fraction X/Y of X, Y>1.

Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) with point plotting light source distribution is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.