Abstract: A displacement device with a first and second part which are displaceable relative to one another, the first part being provided with a system of magnets, the second part being provided with a set of coil block units including: at least three first coil block units having current conductors oriented parallel to a second direction, at least two second coil block units having current conductors oriented parallel to a first direction, wherein the displacement device includes a controller configured to control the position of the second part relative to the first part, and wherein when the second part mainly moves in the second direction the controller is configured to levitate the second part from the first part in the third direction by using first coil block units only.

Abstract: A device suitable for placing a component on a substrate is provided with a component feeding device, a component pick-and-place device comprising a nozzle, a substrate carrier, means for moving the component pick-and-place device from the component feeding device to the substrate carrier and vice versa, as well as a global measuring system for determining the position of the component pick-and-place device during movement of the component pick-and-place device from the component feeding device to the substrate carrier and vice versa. The device is further provided with a local measuring system, remote from the global measuring system, for almost continually determining, in the proximity of a desired position of the component on the substrate, the position of the component pick-and-place device with respect to the substrate, which local measuring system is located closer to the substrate carrier than the global measuring system.

Abstract: A lithographic apparatus includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate on a central area; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate in a first direction. The apparatus further includes a positioning device to position the substrate table, wherein the positioning device includes a plurality of actuators arranged to, in use, exert forces to position the substrate table, the forces substantially being directed in a plane substantially perpendicular to the first direction and wherein the plurality of actuators are arranged outside a central volume of the substrate table, the central volume being obtained by projecting the central area along the first direction.

Abstract: A displacement device is provided with a linear motor which comprises a first part comprising magnetic strips and a second part comprising a coil block. The parts are connected via a linear guide. The second part is movable with respect to the first part in a conveying direction extending parallel to the guide. The displacement device further comprises an connected to said second part, which is located on a side of the first part remote from the second part. The displacement device can be used is a component placement device.

Abstract: In an apparatus for forming an image in a radiation sensitive layer (6) and comprising an array (16) of light valves (18-22) and a corresponding array (40) of converging elements (46) the positions of radiation spots (204) formed by these arrays (16,40) are monitored and their positions determined by means of a sensing module, which is arranged below the plane of the spots. The module is provided with a slit plate (182) showing pair of slits (186,188) and with position encoders (190,192,194,196) and the plate carrying the converging elements is provided with tracking configurations (171,173,175,177) and alignment marks (198).

Abstract: An optical image is formed in a resist layer (5) by a number of subilluminations, in each of which an array of light valves (21 25) and a corresponding array (40) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer (5) is displaced relative to the arrays (21 25, 40) The scale of the optical image in the resist layer (5) is measured and this scale is compared with the scale of the image required to be written If there is a difference, the spacing between the light converging elements (43) is physically altered to adjust the substrate scale.

Abstract: A medical examination device (1) comprising an examination space (3), a combination of a frame (5) and a patient table (4), and rack (8) which can be driven by a drive (9, 10) to displace a patient on the patient table into and out of the examination space. The rack comprises an elongated push-pull member (8) which is connected to the patient table and which has a length that exceeds the length of the patient table. As a result, the patient table can be displaced from the frame into the examination space over a distance that is larger than the length of the patient table.

Abstract: A medical examination device (1) comprising an examination space (3), a combination of a frame (5) and a patient table (4), and displacing means (8) which can be driven by driving means (9, 10) to displace a patient on the patient table into and out of the examination space. The displacement means comprise an elongated push-pull member (8) which is connected to the patient table and which has a length that exceeds the length of the patient table. As a result, the patient table can be displaced from the frame into the examination space over a distance that is larger than the length of the patient table.

Abstract: In a component placement machine, a placement head (4) is driven by a linear motor (5). The stationary part (7) of the motor is attached to the machine frame (1) on which a PCB (8) is attached. The movable part (6) of the motor is connected to a slide (2) on which the placement head (4) is attached. During driving the placement bead, reactive forces of the motor generate vibrations in the stationary part (7) of the motor and thus in the machine frame (20). This causes inaccuracies during the placement of components (9) on the PCB (8). To diminish this problem, the reactive forces are intercepted in a separate force frame (10) which is dynamically disconnected from the machine frame (1).

Abstract: The invention relates to a device for mounting components on a carrier comprising a frame (25) in which a shaft (8) is accommodated, the shaft is provided with a longitudinal bore (16), and means for displacing said hollow shaft (8) in vertical direction through said frame (25), wherein said shaft (8) at one end (8a) facing away from the carrier can be coupled to means (17) for generating an under pressure or vacuum within said bore (16) and wherein the other end (8b) of the shaft facing towards the carrier is provided with means for picking up and mounting a component. According to the invention, the device is characterized in that said shaft (8) is coupled to a yoke (12) which forms part of said displacement means, which coupling can be temporarily disengaged the moment the shaft makes contact with a component or a carrier.

Abstract: The invention relates to an apparatus (1) for and a method of applying a substance (16), such as a solution containing an electroluminescent (EL) material or a suspension containing silver particles, to a substrate (7). The apparatus comprises a substrate carrier (5), a nozzle head (12) comprising at least one nozzle (12A) for ejecting the substance (16), and means (2,3,4) for moving the substrate carrier (5) and the nozzle head (12) with respect to each other. It further comprises a first imaging device (13) fixed relative to the nozzle head (12), a second imaging device (9), and one or more references (8) fixed relative to and positioned within the image field of the second imaging device (9). The mechanical link between the substrate (7) and the nozzle head (12) is thus substantially circumvented and inaccuracies originating from this link are avoided.

Abstract: The invention relates to a device for mounting components on a carrier, for example a printed circuit board, comprising a frame (25) in which a shaft (8) is accommodated, which shaft is provided with a longitudinal bore (16), and means for displacing said hollow shaft (8) in vertical direction through said frame (25), wherein said shaft (8) at one end (8a) facing away from the carrier can be coupled to means (17) for generating an underpressure or vacuum within said bore (16) and wherein the other end (8b) of the shaft facing towards the carrier is provided with means for picking up and mounting a component.

Abstract: In a component placement machine, a placement head (4) is driven by a linear motor (5). The stationary part (7) of the motor is attached to the machine frame (1) on which a PCB (8) is attached. The movable part (6) of the motor is connected to a slide (2) on which the placement head (4) is attached. During driving the placement head, reactive forces of the motor generate vibrations in the stationary part (7) of the motor and thus in the machine frame (20). This causes inaccuracies during the placement of components (9) on the PCB (8). To diminish this problem, the reactive forces are intercepted in a separate force frame (10) which is dynamically disconnected from the machine frame (1).

Abstract: In a component placement machine, a placement head (4) is driven by a linear motor (5). The stationary part (7) of the motor is attached to the machine frame (1) on which a PCB (8) is attached. The movable part (6) of the motor is connected to a slide (2) on which the placement head (4) is attached. During driving the placement head, reactive forces of the motor generate vibrations in the stationary part (7) of the motor and thus in the machine frame (20). This causes inaccuracies during the placement of components (9) on the PCB (8). To diminish this problem, the reactive forces are intercepted in a separate force frame (10) which is dynamically disconnected from the machine frame (1).