Patents by Inventor Johannes Seiwert
Johannes Seiwert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11826713Abstract: Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture including the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.Type: GrantFiled: August 28, 2020Date of Patent: November 28, 2023Assignee: MKS Instruments, Inc.Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Patent number: 11691111Abstract: Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas. The system includes an ultrapure water source and a gas mixture source in fluid communication with a contactor. The gas mixture includes ammonia gas and a carrier gas. The system includes a control unit configured to adjust a flow rate of the ultrapure water source such that an operational pressure of the contactor remains below a pressure threshold. The system includes a compressor configured to remove a residual transfer gas out of the contactor. The contactor generates a rinsing liquid having ultrapure water and a concentration of the ammonia gas dissolved therein. The system includes a pump in fluid communication between the contactor and an outlet. The pump is configured to deliver the rinsing liquid having a gaseous partial pressure below the pressure threshold at the outlet.Type: GrantFiled: April 7, 2020Date of Patent: July 4, 2023Assignee: MKS Instruments, Inc.Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Publication number: 20230098744Abstract: The present application discloses an apparatus for measuring the concentration of ozone within a fluid and includes a conduit defining at least one passage therein, the conduit has at least one reflective coating selective applied thereto and defining one or more transmission regions on the conduit, a multi-wavelength light source system having at least one light source configured to direct at least one optical signal having a first wavelength through an ozonated fluid within the conduit and at least one UV light source configured to direct at least one UV optical signal having a second wavelength band through the ozonated fluid wherein the optical signal and the UV optical signal traverse through the conduit along different optical paths via at least one reflection from the reflective coating applied to the conduit, and at least one detector positioned proximate to the transmission regions formed on the conduit and configured to detect the optical signal and the UV signal thereby permitting measurement of thType: ApplicationFiled: September 27, 2021Publication date: March 30, 2023Applicant: MKS Instruments, Inc.Inventors: Heinrich Johannes Seiwert, Felix Groitl, Christiane Le Tiec, Ulrich Alfred Brammer
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Patent number: 11518696Abstract: The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.Type: GrantFiled: August 27, 2019Date of Patent: December 6, 2022Assignee: MKS InstrumentsInventors: Heinrich Johannes Seiwert, Christiane Le Tiec, Ulrich Alfred Brammer
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Publication number: 20200391163Abstract: Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture comprising the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.Type: ApplicationFiled: August 28, 2020Publication date: December 17, 2020Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Publication number: 20200316536Abstract: Systems and methods are described for supplying a rinsing liquid including ultrapure water and an ammonia gas. The system includes an ultrapure water source and a gas mixture source in fluid communication with a contactor. The gas mixture includes ammonia gas and a carrier gas. The system includes a control unit configured to adjust a flow rate of the ultrapure water source such that an operational pressure of the contactor remains below a pressure threshold. The system includes a compressor configured to remove a residual transfer gas out of the contactor. The contactor generates a rinsing liquid having ultrapure water and a concentration of the ammonia gas dissolved therein. The system includes a pump in fluid communication between the contactor and an outlet. The pump is configured to deliver the rinsing liquid having a gaseous partial pressure below the pressure threshold at the outlet.Type: ApplicationFiled: April 7, 2020Publication date: October 8, 2020Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Patent number: 10773221Abstract: Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture comprising the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.Type: GrantFiled: November 9, 2017Date of Patent: September 15, 2020Assignee: MKS Instruments, Inc.Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Publication number: 20200071208Abstract: The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.Type: ApplicationFiled: August 27, 2019Publication date: March 5, 2020Applicant: MKS Instruments, Inc.Inventors: Heinrich Johannes Seiwert, Christiane Le Tiec, Ulrich Alfred Brammer
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Publication number: 20180133665Abstract: Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture comprising the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.Type: ApplicationFiled: November 9, 2017Publication date: May 17, 2018Inventors: Ulrich Alfred Brammer, Johannes Seiwert, Christiane Le Tiec
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Publication number: 20160115025Abstract: A system and method for facilitating a chemical reaction is provided. The system can have an electrically conductive member. The electrically conductive member is capable of holding a chemical mixture. The electrically conductive member is directly coupled to a power source and is heated when the power source is on. When a chemical mixture is within the electrically conductive member and the power source is on, the chemical mixture is heated such that a chemical reaction can occur.Type: ApplicationFiled: January 7, 2016Publication date: April 28, 2016Inventors: Johannes Seiwert, Christiane Gottschalk, Joachim Lohr, Martin Blacha
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Publication number: 20150232333Abstract: A system and method for facilitating a chemical reaction is provided. The system can have an electrically conductive member. The electrically conductive member is capable of holding a chemical mixture. The electrically conductive member is directly coupled to a power source and is heated when the power source is on. When a chemical mixture is within the electrically conductive member and the power source is on, the chemical mixture is heated such that a chemical reaction can occur.Type: ApplicationFiled: February 25, 2014Publication date: August 20, 2015Applicant: MKS Instruments, Inc.Inventors: Johannes Seiwert, Christiane Gottschalk, Joachim Lohr, Martin Blacha
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Patent number: 8882885Abstract: A system to purge dissolved gases selectively from liquids can include a first contactor having two first contactor inlets and two first contactor outlets. The first contactor can receive liquid from a liquid source at a first inlet of the first contactor and an inert gas source at a second inlet of the first contactor, the inert gas can purge a first portion of gas from the liquid source. The first portion of purged gas exits the first contactor at a first outlet of the first contactor. The second contactor can receive input from the second outlet of the first contactor and the inert gas, the inert gas purges a second portion of the gas from the liquid source. The second portion of purged gas can exit the second contactor at a first outlet of the second contactor.Type: GrantFiled: March 15, 2012Date of Patent: November 11, 2014Assignee: MKS Instruments, Inc.Inventors: Ulrich Brammer, Johannes Seiwert, Christiane Gottschalk
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Patent number: 8448925Abstract: Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.Type: GrantFiled: June 2, 2010Date of Patent: May 28, 2013Assignee: MKS Instruments, Inc.Inventors: Johannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
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Patent number: 8339607Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: GrantFiled: May 27, 2011Date of Patent: December 25, 2012Assignee: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20120279396Abstract: A system to purge dissolved gases selectively from liquids can include a first contactor having two first contactor inlets and two first contactor outlets. The first contactor can receive liquid from a liquid source at a first inlet of the first contactor and an inert gas source at a second inlet of the first contactor, the inert gas can purge a first portion of gas from the liquid source. The first portion of purged gas exits the first contactor at a first outlet of the first contactor. The second contactor can receive input from the second outlet of the first contactor and the inert gas, the inert gas purges a second portion of the gas from the liquid source. The second portion of purged gas can exit the second contactor at a first outlet of the second contactor.Type: ApplicationFiled: March 15, 2012Publication date: November 8, 2012Applicant: MKS Instruments, Inc.Inventors: Ulrich Brammer, Johannes Seiwert, Christiane Gottschalk
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Patent number: 8085401Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: GrantFiled: March 3, 2009Date of Patent: December 27, 2011Assignee: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20110228274Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: ApplicationFiled: May 27, 2011Publication date: September 22, 2011Applicant: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20110134716Abstract: Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.Type: ApplicationFiled: June 2, 2010Publication date: June 9, 2011Applicant: MKS Instruments, Inc.Inventors: Johannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
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Patent number: 7731161Abstract: Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.Type: GrantFiled: October 17, 2007Date of Patent: June 8, 2010Assignee: MKS Instruments, Inc.Inventors: Johannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
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Publication number: 20100027017Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: ApplicationFiled: March 3, 2009Publication date: February 4, 2010Applicant: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau