Patents by Inventor Johannes Seiwert

Johannes Seiwert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ozonated water flow and concentration control apparatus and method
    Patent number: 7622037
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: November 24, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozone concentration sensor
    Patent number: 7502114
    Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.
    Type: Grant
    Filed: March 12, 2004
    Date of Patent: March 10, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
  • Devices, Systems, and Methods for Carbonation of Deionized Water
    Publication number: 20080257738
    Abstract: Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.
    Type: Application
    Filed: October 17, 2007
    Publication date: October 23, 2008
    Applicant: MKS Instruments, Inc.
    Inventors: Johannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
  • Ozonated Water Flow and Concentration Control Apparatus and Method
    Publication number: 20080002518
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Application
    Filed: August 7, 2007
    Publication date: January 3, 2008
    Applicant: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozonated water flow and concentration control apparatus and method
    Patent number: 7264006
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: September 4, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozonated water flow and concentration control apparatus and method
    Publication number: 20060107969
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Application
    Filed: August 19, 2005
    Publication date: May 25, 2006
    Applicant: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozonated water flow and concentration control method
    Patent number: 6948504
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: September 27, 2005
    Assignee: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozone concentration sensor
    Publication number: 20050200848
    Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.
    Type: Application
    Filed: March 12, 2004
    Publication date: September 15, 2005
    Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
  • Ozonated water flow and concentration control apparatus and method
    Publication number: 20050029202
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Application
    Filed: September 10, 2004
    Publication date: February 10, 2005
    Applicant: Applied Science and Technology, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozonated water flow and concentration control apparatus
    Patent number: 6805791
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: October 19, 2004
    Assignee: Applied Science and Technology, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Ozonated water flow and concentration control apparatus and method
    Publication number: 20030164338
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Application
    Filed: April 26, 2002
    Publication date: September 4, 2003
    Applicant: Applied Science & Technology, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk