Patents by Inventor John Breuer

John Breuer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
    Patent number: 9697983
    Abstract: An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: July 4, 2017
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Stefan Lanio, Aleksandra Kramer, John Breuer
  • Beam separator device, charged particle beam device and methods of operating thereof
    Patent number: 9472373
    Abstract: A beam separator device (200) is described.
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: October 18, 2016
    Assignee: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
    Inventors: Stefan Lanio, John Breuer, Jürgen Frosien, Matthias Firnkes, Johannes Hopster
  • Charged particle beam device, beam deflector device and methods of operating thereof
    Patent number: 9349566
    Abstract: A charged particle beam device (100) is described. The charged particle beam device includes a beam source (150) for generating a charged particle beam (101); a lens device (160); and a beam deflector device (110) for deflecting the charged particle beam with respect to a direction of incidence (A).
    Type: Grant
    Filed: August 17, 2015
    Date of Patent: May 24, 2016
    Assignee: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
    Inventor: John Breuer