Abstract: A MEMS integrated circuit includes a silicon substrate having a frontside with a drive circuitry layer and a backside. A MEMS layer is disposed on the drive circuitry layer. The MEMS layer includes a plurality of MEMS devices electrically connected to the drive circuitry layer. Connector posts extends from the drive circuitry layer to a contact pad positioned in a roof of the MEMS layer and through-silicon connectors extending linearly from the contact pad, through the drive circuitry layer and the silicon substrate, towards the backside of the silicon substrate. Each through-silicon connector terminates at a backside integrated circuit contact, such that each integrated circuit contact is electrically connected to the drive circuitry layer via the contact pad positioned in the roof of the MEMS layer.

Abstract: An inkjet printhead assembly includes: an ink supply manifold; printhead integrated circuits attached to the ink supply manifold, each printhead integrated circuit having a frontside including drive circuitry and a plurality of inkjet nozzle assemblies disposed on the drive circuitry; and a connector film for supplying power to the drive circuitry. An integrated circuit contact positioned in a backside recessed portion of each printhead integrated circuit is connected to the connector film. The integrated circuit contact is electrically connected to the drive circuitry via a connector rod extending through the printhead integrated circuit.

Abstract: A MEMS integrated circuit includes a silicon substrate having a frontside with a drive circuitry layer and a backside. A MEMS layer is disposed on the drive circuitry layer. The MEMS layer includes a plurality of MEMS devices electrically connected to the drive circuitry layer. Integrated circuit contacts are positioned at a backside of the substrate. The integrated circuit contacts are electrically connected to the drive circuitry layer via respective connector rods extending through the substrate.

Abstract: A method of configuring a printhead to eject ink droplets of a predetermined volume. The method includes the steps of: (i) providing a printhead having a plurality of bend-actuated nozzles assemblies; (ii) varying a bulk hydrostatic pressure of ink supplied to the printhead so as to vary a volume of ejected ink droplets; (iii) determining an optimal bulk hydrostatic ink pressure corresponding to the predetermined volume; and (iv) configuring an ink supply system to supply ink to the printhead at the optimal bulk hydrostatic ink pressure.

Abstract: An inkjet printhead includes row of nozzle chambers. Each nozzle chambers has a roof spaced apart from a floor and sidewalls extending between the roof and the floor. Each nozzle chambers has an ink ejection opening defined in the roof, a first ink inlet defined in one of the sidewalls, and a second ink inlet defined in the floor. Each of the first and second ink inlets is in fluid communication an ink supply channel defined in the printhead for supplying ink to the row of nozzle chambers.

Abstract: A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve.

Abstract: A subject (1) is illuminated by a light source (2) and observed by a pair of cameras (3). The outputs of the cameras (3) are input to an image processor (4), operated under the control of a controller (5), which also controls operation of the light source (2). The light source (2) transmits radiation in a frequency range that is limited substantially to a region of increased opacity in the atmospheric transmission spectrum. This may enable the illumination to be quite clearly discriminated, even at relatively great distances and in bright daylight.

Abstract: The invention relates to a method of fabricating an ink jet nozzle. The method includes the steps of depositing and etching a passivation layer on a silicon substrate having drive circuitry and an interlayer dielectric interconnect to form a first sacrificial scaffold. Also included are the steps of depositing heater material over the first sacrificial scaffold and etching said heater material to define a heater element, and depositing and developing a layer of photoresist to define a second sacrificial scaffold defining sidewalls for a nozzle chamber. The method also includes the steps of depositing silicon nitride onto the second sacrificial scaffold to form a roof over the nozzle chamber, and etching a nozzle aperture through the roof down to the second sacrificial scaffold.

Abstract: A nozzle assembly for an inkjet printhead. The nozzle assembly includes a nozzle chamber with a roof having a nozzle opening defined therein. The roof includes a moving portion moveable relative to a stationary portion, such that movement of the moving portion relative to the stationary portion causes ejection of ink through the nozzle opening. The nozzle assembly also includes an actuator for moving the moving portion and a seal member. The seal member is configured as a bridge spanning between the moving portion and the stationary portion.

Abstract: A MEMS integrated circuit comprises: a silicon substrate having a passivated CMOS layer, a MEMS layer disposed on the passivated CMOS layer, and a polymer layer disposed on the MEMS layer. The CMOS layer comprises drive circuitry for actuating actuator devices in the MEMS layer and the polymer layer comprises a polymerized siloxane.

Abstract: A printhead integrated circuit includes a substrate having a plurality of inkjet nozzles assemblies formed on a surface of the substrate. The substrate contains drive circuitry for supplying power to the nozzle assemblies. Each nozzle assembly includes a nozzle chamber for containing ink, the nozzle chamber having a roof and sidewalls extending from the roof to the surface of said substrate, the roof having a nozzle opening defined therein; an actuator for ejecting ink through the nozzle opening; a pair of electrodes positioned at the surface of the substrate; and a pair of connector posts encapsulated within the sidewalls, each connector post electrically connecting a respective electrode to the actuator. Each connector post extends linearly from a respective electrode to the actuator.

Abstract: A printhead assembly for a pagewidth printer includes a substrate channel; a plurality of printhead modules positioned in the channel to form a pagewidth printhead module assembly; an ink hose positioned within the substrate channel to supply the printhead modules with ink; an extrusion for housing bus bars providing electrical power to the printhead modules; a cover plate securing a flex printed circuit board (PCB) in the assembly, the PCB forming a data bus to the printhead modules; and compressible conductive strips provided between the busbars abutting contacts on an upper side of parts of the flex PCB. The substrate channel defines a series of groups of holes through which the printhead modules are supplied with differently colored inks. The hose defines parallel channels extending a length of the hose, the channels connected to ink containers at one end and sealed with a channel extrusion cap at the other end.

Abstract: An inkjet printhead includes a ceramic nozzle plate having a plurality of movable portions defined therein and a polymeric material covering the nozzle plate and the plurality of movable portions.

Abstract: An inkjet printer is provided. The printer comprises an inkjet printhead having a plurality of nozzles; at least one ink reservoir; and an ink supply system for supplying ink from the reservoir to the plurality of nozzles, the ink supply system comprising at least one pressure-dampening structure for dampening pressure fluctuations experienced by the nozzles. A distance between the pressure-dampening structures and at least one of the nozzles is less than 100 microns.

Abstract: A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) depositing a hydrophobic polymeric layer onto the nozzle surface; (c) depositing a protective metal film onto at least the polymeric layer; (d) depositing a sacrificial material onto the polymeric layer; (e) patterning the sacrificial material to define a plurality of nozzle opening regions; (f) defining a plurality of nozzle openings through the metal film, the polymeric layer and the nozzle plate; (g) subjecting the printhead to an oxidizing plasma; and (h) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face.

Abstract: A thermal bend actuator including: a pair of electrical contacts positioned at one end of the actuator; an active beam connected to the electrical contacts and extending longitudinally away from the contacts, the active beam defining a bent current flow path between the contacts; and a passive beam fused to the active beam. When a current is passed through the active beam, the active beam heats and expands relative to the passive beam, resulting in bending of the actuator. The active beam includes a resistive heating bar having a relatively smaller cross-sectional area than any other part of the current flow path. Heating of the active beam is concentrated in the heating bar.

Abstract: An inkjet printhead includes: a substrate; a row of nozzle chambers disposed on the substrate; an ink conduit extending longitudinally adjacent the row of nozzle chambers; and a nozzle plate spanning over the ink conduit and the row of nozzle chambers. Each nozzle chamber has a respective ink ejection opening defined in the nozzle plate; a first ink inlet defined in a sidewall of the nozzle chamber for receiving ink from the ink conduit; and a second ink inlet defined in a floor of the nozzle chamber. Each of the first and second ink inlets is in fluid communication with a common ink reservoir.

Abstract: A printhead nozzle arrangement is provided having a wafer defining a chamber for holding ejection fluid, an ejection port supported by a plurality of bridge members which extend from the ejection port to sides of the chamber, and a plurality of heater elements interleaved between the bridge members for causing ejection of fluid held in the chamber through the ejection port.

Abstract: An inkjet printer including: a printhead having a plurality of nozzles assemblies, each nozzle assembly having: a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet; and a bend actuator for ejecting ink droplets from the nozzle opening by generating a positive pressure pulse in the ink during bending of the actuator. An ink supply system supplies ink to the printhead so that a hydrostatic pressure of ink can be varied. Increasing the hydrostatic ink pressure increases a volume of the ejected ink droplets, and decreasing the hydrostatic ink pressure decreases a volume of the ejected ink droplets.

Abstract: A thermal bend actuator, having a plurality of elements, is provided. The actuator comprises a first active element for connection to drive circuitry a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. The first element is comprised of an aluminium alloy.