Abstract: A method of fabricating a printhead integrated circuit configured for backside electrical connections. The method comprises the steps of: (a) providing a wafer comprising a plurality of partially-fabricated nozzle assemblies on a frontside of the wafer and through-silicon connectors extending from the frontside towards a backside of the wafer; (b) depositing a conductive layer on the frontside of said wafer and etching to form an actuator for each nozzle assembly and a frontside contact pad over a head of each through-silicon connector; (c) performing further MEMS processing steps to complete formation of nozzle assemblies ink supply channels through-silicon connectors; and (d) dividing the wafer into individual printhead integrated circuits. Each printhead integrated circuit thus formed is configured for backside-connection to the drive circuitry via the through-silicon connectors the contact pads.

Abstract: The invention provides for a printhead assembly for a pagewidth printer. The assembly includes a substrate channel, an ink hose, a support plate, an extrusion and a cover plate. The substrate channel operatively positions a plurality of printhead modules to form a pagewidth printhead module assembly. The ink hose is positioned within the substrate channel to supply the printhead modules with ink, and the support plate encloses the ink hose within the substrate channel. The extrusion houses bus bars operatively providing electrical power to the printhead modules, and the cover plate secures a flex printed circuit board (PCB) in the assembly, the PCB forming a data bus to the printhead modules.

Abstract: A method of forming an electrical connection between an electrode and an actuator in an inkjet nozzle assembly is provided. The method comprises the steps of: (a) providing a substrate having a layer of drive circuitry, the drive circuitry including the electrode for connection to the actuator; (b) forming a wall of insulating material over the electrode; (c) defining a via in the wall, the via revealing the electrode; (d) filling the via with a conductive material using electroless plating to provide a connector post; (e) forming at least part of the actuator over the connector post, thereby providing electrical connection between the actuator and the electrode.

Abstract: A printhead assembly includes a printhead, in turn, including a plurality of ink ejection nozzles. A nozzle guard is formed from hydrophobic photoresist and is mounted to the printhead. The nozzle guard defines a plurality of channels located in register with respective nozzles so that droplets of ink from the nozzles can be bounced off internal walls of the channels during printing.

Abstract: A printhead is provided having an ejection surface having a plurality of nozzles for ejecting droplets and a nozzle guard positioned over the ejection surface and having a plurality of channels therethrough aligned with the nozzles. The channels have hydrophobic sidewalls and are radially flared with respect to the ink ejection surface such that droplets which are ejected from the nozzles with misdirection rebound off the channel sidewalls to pass through the channels.

Abstract: A method of fabricating an inkjet nozzle assembly having a seal member bridging between a moving portion and a stationary portion. The method includes the steps of: (a) providing a partially-fabricated printhead comprising a nozzle chamber sealed with a roof, (b) etching a via through the roof to define the moving portion on a first side of the via and the stationary portion on a second side of the via; (c) plugging the via with a plug of sacrificial material; (d) depositing a layer of flexible material over the plug; and (e) removing the plug to provide the inkjet nozzle assembly. The resultant seal member is comprised of the flexible material.

Abstract: Provided is a micro-electromechanical nozzle arrangement for an inkjet printhead. The arrangement includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel through the substrate, said substrate having a layer of CMOS drive circuitry. The arrangements also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber in addition to ink flow guide rails to minimize wicking along the nozzle rim according to surface tension effects of ink in the chamber. Also included is a plurality of actuators displaceable with respect to, and radially spaced about, the nozzle rim, and in between, the guide rails.

Abstract: An inkjet printhead is provided having nozzles, bubble forming chambers containing ejectable ink, generally planar heater elements each bonded on one side to an associated chamber so that the other side faces into the chamber, a MEMS fluid sensor having a MEMS sensing element for detecting the presence or otherwise of the ejectable ink in the chamber, and control circuitry for measuring the current passing through the sensing element during its heating. The heater elements receive heating pulses to form gas bubbles in the ejectable ink on the side facing into the chamber which cause ink ejection from the nozzle. Each chamber has a dielectric layer proximate the side of the heater element which has a thermal product less than 1495 Jm?2K?1s?1/2, the thermal product being (?Ck)1/2, where ? is the density of the layer, C is specific heat of the layer and k is thermal conductivity of the layer.

Abstract: An inkjet printer configured for ejecting ink droplets having a volume in the range of 1 to 2.5 pL, the printer comprising: a printhead having a plurality of nozzles assemblies, each nozzle assembly comprising: a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet, the nozzle opening having a maximum dimension in the range of 4 to 12 microns; and a bend actuator for ejecting ink droplets from the nozzle opening by generating a positive pressure pulse in the ink during bending of the actuator; and an ink supply system configured for supplying ink to the printhead at a positive hydrostatic pressure in the range of 1 to 300 mm H2O.

Abstract: An inkjet nozzle assembly includes a nozzle chamber comprising a floor and a roof. The roof has a nozzle opening defined therein, and a moving portion moveable towards the floor. The assembly further comprises a thermal bend actuator, defining at least part of the moving portion of the roof, for ejecting ink through the nozzle opening. The thermal bend actuator comprises an upper first beam for connection to drive circuitry and a lower second beam mechanically cooperating with the first beam, such that when a current is passed through the first beam, the first beam expands relative to the second beam resulting in bending of the moving portion towards the floor of the nozzle chamber.

Abstract: An inkjet nozzle assembly comprising a nozzle chamber for containing ink, the chamber having a nozzle opening and an ink inlet; a pair of electrical contacts positioned at one end of the assembly and connected to drive circuitry; and a thermal bend actuator for ejecting ink through the nozzle opening, the actuator comprising: an active beam connected to the electrical contacts and extending longitudinally away from the contacts, the active beam defining a bent current flow path between the contacts; and a passive beam fused to the active beam, such that when a current is passed through the active beam, the active beam heats and expands relative to the passive beam resulting in bending of the actuator, wherein the actuator has a working face for generating a positive pressure pulse in the ink during the bending of the actuator, the working face having an area of less than 800 square microns.

Abstract: A heater assembly for a printhead is provided having a heating element including a heating layer and a non-heating layer, and a heat conduction means positioned in the middle of the non-heating layer so as to be spaced from the heating layer to conduct heat generated by the heating element away from the actuator assembly.

Abstract: A microfluidic system.

Abstract: A printhead comprising a plurality of inkjet nozzle assemblies is provided. Each nozzle assembly comprises a nozzle chamber formed on a substrate. The nozzle chamber comprises a roof spaced apart from the substrate and sidewalls extending between the roof and the substrate. The nozzle chamber has an ink ejection opening defined in the roof, a first ink inlet defined in one of the sidewalls, and a second ink inlet defined in a floor of the nozzle chamber. Each ink inlet is in fluid communication with a common ink reservoir. The nozzle assembly further comprises an actuator for ejection of ink through the ink ejection opening.

Abstract: A micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide struc

Abstract: A unit cell, a plurality of which make up a printhead, includes a substrate including an ink inlet passage; a chamber defined by chamber sidewalls and a nozzle plate defining an aperture for ejection of ink from the chamber, the chamber being in fluid communication with the inlet passage; and a nozzle enclosure comprising enclosure sidewalls and a roof defining an opening for ejection of ink, the nozzle enclosure surrounding the aperture such that ink ejected from the aperture is directed to the opening of the nozzle enclosure, thereby isolating the aperture from an adjacent aperture of an adjacent unit cell. The opening has a greater diameter than the aperture.

Abstract: An inkjet printhead that has a first layer with an opening, a second layer with a hole and a flexible element supported by the second layer. The flexible element has an orifice through which ink is ejected. An actuator deflects the flexible element to force the ink through the orifice. The hole and the opening are in fluid communication to supply ink to the flexible element.

Abstract: A printhead integrated circuit is provided. The printhead integrated circuit comprises a silicon substrate having a plurality of inkjet nozzles assemblies formed on a surface of the substrate. The substrate has drive circuitry for supplying power to the nozzle assemblies. Each nozzle assembly comprises: a nozzle chamber for containing ink, the nozzle chamber having a nozzle opening defined therein; an actuator for ejecting ink through the nozzle opening; a pair of electrodes positioned at the surface of the substrate, the electrodes being electrically connected to the drive circuitry; and a pair of connector posts, each connector post electrically connecting a respective electrode to the actuator. Each connector post extends linearly from a respective electrode to the actuator.

Abstract: A printhead assembly includes an elongate extrusion defining a plurality of longitudinally extending ink channels. The extrusion also defines a plurality of first groups of holes with the holes in each group extending from respective ink channels. An elongate support defines a longitudinally extending extrusion channel in which the extrusion is received. The elongate support also defines a plurality of second groups of holes aligned with the first groups. Printhead modules are engaged along the support in fluid communication with respective second groups and are configured to eject ink supplied from the channels via respective first and second groups.

Abstract: An inkjet nozzle assembly comprises: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator comprises: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.