Abstract: A torsional hinged mirror assembly having a hinge plate having a central portion and a pair of torsional hinges extending outwardly in opposite directions from the central portion along a first axis and a first pair of support spines extending from the central portion in a second direction substantially perpendicular to the first axis. A mirror plate is attached to the hinge plate and has a reflecting side and a back side, a second pair of support spines located along a perimeter of the back side and extending generally in the second direction, wherein the first pair of support spines on the hinge plate and the second pair of support pines on the mirror plate are aligned and the back side of the mirror plate being attached to the hinge plate.

Abstract: A combination pivoting mirror and support bracket has a bracket for supporting a pivoting mirror assembly and for attaching the combination to a using device. The bracket has first and second edges. A first portion of the bracket defines a mounting area for fixedly securing the first portion to the using device, and a second portion of the bracket is for mounting the pivoting mirror. An isolation slot is formed in the bracket and located between the first portion of the bracket and the second portion of the bracket. A plurality of piezoelectric devices are mounted to the second portion of the bracket and extend substantially orthogonal to a surface of the bracket. A pivoting mirror has a pair of torsional hinges for pivotally supporting a reflective surface. Each hinge of the pair extends away from the reflecting surface and along a selected axis to an anchor portion.

Abstract: A method of adjusting the resonant frequency of a torsional hinged device such as a resonant mirror is disclosed. A material such as printer ink, epoxy, or solder balls is applied to the tips of the torsional hinged device to lower the frequency into a selected frequency range.

Abstract: An oscillating torsional hinged device, such as a mirror, having the advantages of an oscillating device with permanent magnets mounted on the hinges, but without excessive size is disclosed. The permanent magnets are mounted in the areas of the anchor members rather than directly on the hinges.

Abstract: A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Abstract: A torsional hinged mirror structure having back-to-back reflective surfaces and suitable for use in a laser printer imaging system is disclosed. There is also disclosed an optical layer and a support structure that does not interfere with either of the two incident light beams as the two reflected beam sweeps.

Abstract: A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost.

Abstract: A low inertia two axis torsional hinged device formed from a single piece of silicon. The two axis torsional hinged device uses a pair of diametrally charged permanent drive magnets to pivot a gimbals member of the assembly about first and second torsional hinges aligned along a first axis. A single drive magnet mounted at the center of the backside of an optical surface of the assembly pivots the optical surface about another pair of torsional hinges aligned along a second axis that is orthogonal to the first axis. The drive magnets mounted on the gimbals member are located on the first axis and the single drive magnet on the back side of the optical surface is mounted at the intersection of the first and second axis such that all three magnets are aligned along the first axis.

Abstract: A method of adjusting the resonant frequency of a torsional hinged device such as a resonant mirror is disclosed. Material is removed from selected portions (such as for example the tips) of the torsional hinged device to raise the frequency of said device into a selected frequency range.

Abstract: Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

Abstract: A torsional hinge structure for supporting a functional surface such as a mirror is disclosed. The structure includes at least one torsional hinge extending between a functional surface such as for example, a mirror and an anchor pad such that the torsional or the functional surface can pivot around the torsional hinge. The device may comprise two torsional hinges or a single torsional hinge. However, the single torsional hinge or one of the dual torsional hinges will be elongated and include a permanent magnet mounting area to which is bonded a permanent magnet. The structure defines a bobbin area or portion underneath the enlarged area for mounting the drive magnet. A conductor is wound around the drive bobbin for forming an electromagnet, which generates magnetic forces that interact with the permanent magnet mounted on the torsional hinge to cause pivoting motion of the mirror or other functional device.

Abstract: The present invention provides a single torsional hinge device, such as a mirror, adapted for use as a pivoting mirror and preferably a pivoting mirror oscillating at a resonant frequency about the single hinge. The single torsional hinge mirror reduces or substantially eliminates stresses on the torsional hinge mirrors caused by mismatched mounting levels of the support structure and/or differences of the coefficient and thermal expansion of materials in the mirror and support structures. The mirror may include a single layer of silicon having a reflective surface or may be a multilayered mirror wherein silicon is used for the torsional hinges and support and silicon or other materials may be used as the reflecting surface.

Abstract: The present invention provide an inexpensive combination package of a pivoting mirror support structure and drive mechanism suitable for use for devices requiring a scanning light beam such as laser printers and other display devices. By using a single axis torsional mirror, and a unitary plastic support structure for supporting the mirror and the electrical windings, a very simple and inexpensive mirror package can be manufactured.

Abstract: A robust torsional hinged device and a method of fabricating the device are disclosed. Unlike the prior art torsional hinged devices, the width “W” of the hinge is selected to be greater than the thickness “T” of the silicon wafer from which the torsional hinged device is etched. Therefore, since the top and bottom surfaces of the silicon wafer are polished, the larger dimension of the rectangular cross-sectional hinge lies along a polished surface rather than the rougher etched surface. Since the roughness or striations act as stress concentration and since the greater stress levels of a torsional hinge lie along the largest dimension, a more robust hinge is obtained.

Abstract: The present invention provides methods and apparatus for combining a pivoting mirror and support bracket such that the support bracket transmits little or no stresses to the torsional hinges of the mirror. The bracket includes an isolation slot extending from one edge toward a second edge and then preferably around the mounting areas of the hinge such that stresses applied to the mounting bracket will not be transmitted to each side of the mirror and thereby stress the mirror.

Abstract: A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or reduce flexing of the tips of the optical surface, the device may also include perimeter ridges to further reduce or prevent flexing as well as reduce warping of the edges of the optical surface. To allow balancing of the device so that the center of mass of the assembly is on the pivoting axis, a recess is formed in the back portion to receive a permanent drive/sense magnet.

Abstract: A multilayered torsional hinged device such as a scanning mirror including a hinge layer with an attaching member pivotally supported by torsional hinges. A front layer is bonded to the front side of the attaching member and a back layer is bonded to the back side of the attaching member. The front layer and the back layer have equal mass moments to balance the moment of inertia and stresses on the torsional hinges. Further, the attaching member and a back portion of the front layer define a spine structure that extends to the tips of the mirror. The spine structure allows reduction of weight and mass of the mirror while maintaining mirror stiffness. The back layer may be a permanent magnet if the mirror oscillating drive is a magnetic drive. Alternately, the back layer may be another silicon slice.

Abstract: A torsional hinged mirror design with reduced flexing. In addition to a central spine to prevent or reduce flexing of the tips, the mirror layer also includes perimeter ridges to reduce or prevent flexing or warping of the mirror edges. To provide an even stiffer mirror with minimum weight, either or both of the hinge plate and balancing plate may also include perimeter ridges that align with the perimeter ridges of the mirror layer.

Abstract: A multilayered torsional hinged mirror assembly that includes a drive/sensing permanent magnet. To allow for permanent magnets having increased thicknesses, a hinge plate of the mirror defines a recess for receiving the permanent magnet. The recess may be etched completely through the hinge plate such that the permanent magnet is bonded to the back side of the mirror layer, or alternately may extend part way through the hinge plate to allow the permanent magnet to be mounted to the bottom of the recess. In both embodiments, the center of mass of the mirror assembly can be adjusted to lie on the pivoting axis of the mirror assembly by selection of the depth of the recess and the shape and mass of the permanent magnet.

Abstract: A functional surface, such as a reflective surface, is supported by a pair of torsional hinges for pivoting about a first axis which in turn is supported by a pair of anchors, according to one embodiment. The reflective surface may be driven into resonant oscillations about the first axis by inertially coupling energy to the device. According to a dual axis embodiment, the reflective surface is attached by torsional hinges to a gimbals portion which in turn is attached to the support members by a second pair of torsional hinges which are orthogonal with the first pair of hinges so as to provide for pivoting of the surface about both pairs of torsional hinges. Thus, a light source may be reflected from a reflective surface to produce a beam sweep and moved orthogonally by the gimbals portion. The devices may be etched from silicon.