Abstract: Methods of forming semiconductor fins include forming first spacers on a first sidewall of each of multiple mandrels using an angled deposition process. A second sidewall of one or more of the mandrels is masked in a finless region. Second spacers are formed on a second sidewall of all unmasked mandrels. Semiconductor fins are formed from a substrate using the first and second spacers as a pattern mask.

Abstract: Transistors and methods of forming the same include forming a semiconductor fin from a first material on dielectric layer. Material is etched away from the dielectric layer directly underneath a channel region of the semiconductor fin, with the semiconductor fin still being supported by the dielectric layer in a source and drain region. A gate stack is formed around the channel region of the semiconductor fin, with a portion of the gate stack underneath the semiconductor fin being larger than a portion of the gate stack above the semiconductor fin.

Abstract: A method and structures are used to fabricate a nanosheet semiconductor device. Nanosheet fins including nanosheet stacks including alternating silicon (Si) layers and silicon germanium (SiGe) layers are formed on a substrate and etched to define a first end and a second end along a first axis between which each nanosheet fin extends parallel to every other nanosheet fin. The SiGe layers are undercut in the nanosheet stacks at the first end and the second end to form divots, and a dielectric is deposited in the divots. The SiGe layers between the Si layers are removed before forming source and drain regions of the nanosheet semiconductor device such that there are gaps between the Si layers of each nanosheet stack, and the dielectric anchors the Si layers. The gaps are filled with an oxide that is removed after removing the dummy gate and prior to forming the replacement gate.

Abstract: Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.

Abstract: Embodiments are directed to methods and resulting structures for a vertical field effect transistor (VFET) having a super long channel. A pair of semiconductor fins is formed on a substrate. A semiconductor pillar is formed between the semiconductor fins on the substrate. A region that extends under all of the semiconductor fins and under part of the semiconductor pillar is doped. A conductive gate is formed over a channel region of the semiconductor fins and the semiconductor pillar. A surface of the semiconductor pillar serves as an extended channel region when the gate is active.

Abstract: A method for manufacturing a semiconductor device includes forming a first semiconductor layer on a substrate having a {100} crystallographic surface orientation, forming a second semiconductor layer on the substrate, patterning the first semiconductor layer and the second semiconductor layer into a first plurality of fins and a second plurality of fins, respectively, wherein the first and second plurality of fins extend vertically with respect to the substrate, covering the first plurality of fins and a portion of the substrate corresponding to the first plurality of fins, and epitaxially growing semiconductor layers on exposed portions of the second plurality of fins and on exposed portions of the substrate, wherein the epitaxially grown semiconductor layers on the exposed portions of the second plurality of fins increase a critical dimension of each of the second plurality of fins.

Abstract: A nano-sheet semiconductor structure and a method for fabricating the same. The nano-sheet structure includes a substrate and at least one alternating stack of semiconductor material layers and metal gate material layers. The nano-sheet semiconductor structure further comprises a source region and a drain region. A first plurality of epitaxially grown interconnects contacts the source region and the semiconductor layers in the alternating stack. A second plurality of epitaxially grown interconnects contacts the drain region and the semiconductor layers in the alternating stack. The method includes removing a portion of alternating semiconductor layers and metal gate material layers. A first plurality of interconnects is epitaxially grown between and in contact with the semiconductor layers and the source region. A second plurality of interconnects is epitaxially grown between and in contact with the semiconductor layers and the drain region.

Abstract: A semiconductor device comprises a nanowire arranged over a substrate, a gate stack arranged around the nanowire, a spacer arranged along a sidewall of the gate stack, a cavity defined by a distal end of the nanowire and the spacer, and a source/drain region partially disposed in the cavity and in contact with the distal end of the nanowire.

Abstract: Semiconductor devices include a first dielectric layer formed over a source and drain region. A second dielectric layer is formed over the first dielectric layer, the second dielectric layer having a flat, non-recessed top surface. A gate stack passes vertically through the first and second dielectric layers to contact the source and drain regions and an underlying substrate.

Abstract: Methods of forming semiconductor devices include forming a lower dielectric layer to a height below a height of a dummy gate hardmask disposed across multiple device regions. The dummy gate structure includes a dummy gate and a dummy gate hardmask. A protective layer is formed on the dielectric layer to the height of the dummy gate hardmask. The dummy gate hardmask is etched back to expose the dummy gate.

Abstract: Transistors and methods of forming the same include forming a semiconductor fin from a first material on dielectric layer. Material is etched away from the dielectric layer directly underneath a channel region of the semiconductor fin, with the semiconductor fin still being supported by the dielectric layer in a source and drain region. A gate stack is formed around the channel region of the semiconductor fin, with a portion of the gate stack underneath the semiconductor fin being larger than a portion of the gate stack above the semiconductor fin.

Abstract: A method of forming a semiconductor device that includes forming a trench adjacent to a gate structure to expose a contact surface of one of a source region and a drain region. A sacrificial spacer may be formed on a sidewall of the trench and on a sidewall of the gate structure. A metal contact may then be formed in the trench to at least one of the source region and the drain region. The metal contact has a base width that is less than an upper surface width of the metal contact. The sacrificial spacer may be removed, and a substantially conformal dielectric material layer can be formed on sidewalls of the metal contact and the gate structure. Portions of the conformally dielectric material layer contact one another at a pinch off region to form an air gap between the metal contact and the gate structure.

Abstract: Methods of forming the MRAM generally include forming an array of MTJ having sub-lithographic dimensions. The array can be formed by providing a substrate including a MTJ material stack including a reference ferromagnetic layer, a tunnel barrier layer, and a free ferromagnetic layer on an opposite side of the tunnel barrier layer. A hardmask layer is deposited onto the MTJ material stack. A first sidewall spacer is formed on the hardmask layer in a first direction. A second sidewall spacer is formed over the first sidewall in a second direction, wherein the first direction is orthogonal to the second direction. The second sidewall spacer intersects the first sidewall spacer. The first sidewall spacer is processed using the second sidewall spacer as mask to form a pattern of oxide pillars having sub-lithographic dimensions. The pattern of oxide pillars are transferred into the MTJ stack to form the array.

Abstract: A method for semiconductor processing includes removing, from a first region of a semiconductor device, a top layer of a trilayer photoresist structure formed in the first region and a second region of the semiconductor device to expose a middle layer of the trilayer photoresist structure in the first region. The middle layer is disposed between the top layer and a bottom layer of the trilayer photoresist structure. The middle layer and the bottom layer in the first region are removed to expose at least one first structure, the top layer in the second region being removed during the removal of the bottom layer in the first region. The first region is filled to protect the at least one first structure. The middle layer in the second region is removed while the at least one first structure remains protected.

Abstract: A first layer of a first material is deposited on a first structure and a second structure, a surface of the first structure being disposed substantially parallelly to a surface of the second structure in at least one direction. A selectively removable material is deposited over the first layer and removed up to a height of a first step. The first material is removed from a portion of the first layer that is exposed from removing the selectively removable material up to the height of the first step. A remainder of the selectively removable material is removed to expose a second portion of the first layer, the second portion of the first layer forming the first step. A second layer of a second material is deposited on the first structure, the second structure, and the second portion of the first layer, causing a formation of a stepped structure.

Abstract: Semiconductor devices and methods of forming the same include forming a dummy gate structure across multiple device regions that includes a dummy gate and a dummy gate hardmask. A lower dielectric layer is formed to a height below a height of the dummy gate hardmask. A protective layer is formed on the dielectric layer to the height of the dummy gate hardmask. The dummy gate hardmask is etched back to expose the dummy gate. The protective layer is converted to an upper dielectric layer. The dummy gate is removed in one or more barrier regions. A dielectric barrier is formed in the one or more barrier regions.

Abstract: A semiconductor device comprises a nanowire arranged over a substrate, a gate stack arranged around the nanowire, a spacer arranged along a sidewall of the gate stack, a cavity defined by a distal end of the nanowire and the spacer, and a source/drain region partially disposed in the cavity and in contact with the distal end of the nanowire.

Abstract: A method for semiconductor processing includes forming a trilayer resist structure having a middle layer disposed between a top layer and a bottom layer. The top layer is removed from a first region to expose the middle layer in the first region, and the middle layer and the bottom layer are removed in the first region to expose a structure to be processed. The top layer in a second region is also removed with the bottom layer in the first region. The first region is filled to protect the structure in the first region. The middle layer is removed in the second region while the first region remains protected. The structures in the first region and structures in the second region are exposed.

Abstract: A method for semiconductor processing includes forming a trilayer resist structure having a middle layer disposed between a top layer and a bottom layer. The top layer is removed from a first region to expose the middle layer in the first region, and the middle layer and the bottom layer are removed in the first region to expose a structure to be processed. The top layer in a second region is also removed with the bottom layer in the first region. The first region is filled to protect the structure in the first region. The middle layer is removed in the second region while the first region remains protected. The structures in the first region and structures in the second region are exposed.

Abstract: A method for fabricating a semiconductor structure. The method includes forming a plurality of mandrel structures. A plurality of first spacers is formed on sidewalls of the mandrel structures. A plurality of second spacers is formed on sidewalls of the first spacers. The plurality of first spacers is removed selective to the plurality of second spacers and mandrel structures. A cut mask is formed over a first set of second spacers of the plurality of second spacers and a first set of mandrel structures of the plurality of mandrel structures. A second set of second spacers of the plurality of spacers and a second set of mandrel structures of the plurality of mandrel structures remain exposed. One of the second set of mandrel structures and the second set of second spacers is removed selective to the second set of second spacers and the second set of mandrel structures, respectively.