Patents by Inventor Josef Kramer

Josef Kramer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120145553
    Abstract: This disclosure enables high-productivity controlled fabrication of uniform porous semiconductor layers (made of single layer or multi-layer porous semiconductors such as porous silicon, comprising single porosity or multi-porosity layers). Some applications include fabrication of MEMS separation and sacrificial layers for die detachment and MEMS device fabrication, membrane formation and shallow trench isolation (STI) porous silicon (using porous silicon formation with an optimal porosity and its subsequent oxidation). Further, this disclosure is applicable to the general fields of photovoltaics, MEMS, including sensors and actuators, stand-alone, or integrated with integrated semiconductor microelectronics, semiconductor microelectronics chips and optoelectronics.
    Type: Application
    Filed: November 3, 2011
    Publication date: June 14, 2012
    Applicant: SOLEXEL, INC.
    Inventors: Karl-Josef Kramer, Mehrdad M. Moslehi, Subramanian Tamilmani, George D. Kamian, Jay Ashjaee, Takao Yonehara
  • Publication number: 20120138455
    Abstract: An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, only lower circumferential portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, remaining circumferential portions of the substrates. A drive mechanism separates the first support unit and the second support unit when loading and unloading the substrates, and for connecting the first support unit and the second support unit after the substrates are placed in the substrate holder.
    Type: Application
    Filed: December 2, 2011
    Publication date: June 7, 2012
    Inventors: Yasuyoshi MIYAJI, Noriyuki HAYASHI, Takamitsu INAHARA, Takao YONEHARA, Karl-Josef KRAMER, Subramanian TAMILMANI
  • Patent number: 8193076
    Abstract: The present disclosure relates to methods and apparatuses template. The method involves forming a mechanically weak layer conformally on a semiconductor template. Then forming a thin for releasing a thin semiconductor substrate from a reusable semiconductor substrate conformally on the mechanically weak layer. The thin semiconductor substrate, the mechanically weak layer and the template forming a wafer. Then defining the border of the thin-film semiconductor substrate to be released by exposing the peripheral of the mechanically weak layer. Then releasing the thin-film semiconductor substrate by applying a controlled air flow parallel to said mechanically weak layer wherein the controlled air flow separates the thin semiconductor substrate and template according to lifting forces.
    Type: Grant
    Filed: June 29, 2010
    Date of Patent: June 5, 2012
    Assignee: Solexel, Inc.
    Inventors: Mehrdad M. Moslehi, David Xuan-Qi Wang, Sam Tone Tor, Karl-Josef Kramer
  • Publication number: 20120125256
    Abstract: Mechanisms are disclosed by which a semiconductor wafer, silicon in some embodiments, is repeatedly used to serve as a template and carrier for fabricating high efficiency capable thin semiconductor solar cells substrates. Mechanisms that enable such repeated use of these templates at consistent quality and with high yield are disclosed.
    Type: Application
    Filed: August 13, 2011
    Publication date: May 24, 2012
    Applicant: SOLEXEL, INC.
    Inventors: Karl-Josef Kramer, Mehrdad M. Moslehi, David Xuan-Qi Wang, Subramanian Tamilmani, Sam Tone Tor, Rahim Kavari, Rafael Ricolcol, George Kamian, Joseph Leigh
  • Publication number: 20120103408
    Abstract: Fabrication methods and structures relating to backplanes for back contact solar cells that provide for solar cell substrate reinforcement and electrical interconnects are described. The method comprises depositing an interdigitated pattern of base electrodes and emitter electrodes on a backside surface of a semiconductor substrate, forming electrically conductive emitter plugs and base plugs on the interdigitated pattern, and attaching a backplane having a second interdigitated pattern of base electrodes and emitter electrodes at the conductive emitter and base plugs to form electrical interconnects.
    Type: Application
    Filed: August 5, 2011
    Publication date: May 3, 2012
    Applicant: SOLEXEL, INC.
    Inventors: Mehrdad M. Moslehi, David Xuan-Qi Wang, Karl-Josef Kramer, Sean M. Seutter, Sam Tone Tor, Anthony Calcaterra
  • Patent number: 8160324
    Abstract: A method for analyzing image errors in an image dataset of a medical imaging device is provided. The method includes transmitting the image dataset to a central computing center, analyzing the image errors by a server of the computing center, determining a type of image error in the image dataset, and forwarding the image dataset to a service technician who is responsible for the type of image error determined in the image dataset.
    Type: Grant
    Filed: September 11, 2008
    Date of Patent: April 17, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventors: Axel Fischer, Hermann-Josef Krämer
  • Publication number: 20120085278
    Abstract: High productivity thin film deposition methods and tools are provided wherein a thin film semiconductor material layer with a thickness in the range of less than 1 micron to 100 microns is deposited on a plurality of wafers in a reactor. The wafers are loaded on a batch susceptor and the batch susceptor is positioned in the reactor such that a tapered gas flow space is created between the susceptor and an interior wall of the reactor. Reactant gas is then directed into the tapered gas space and over each wafer thereby improving deposition uniformity across each wafer and from wafer to wafer.
    Type: Application
    Filed: June 9, 2011
    Publication date: April 12, 2012
    Applicant: SOLEXEL INC.
    Inventors: Mehrdad M. Moslehi, Karl-Josef Kramer, Jay Ashjaee, George D. Kamian, David Mordo, Takao Yonehara
  • Publication number: 20110284068
    Abstract: The disclosed subject matter provides a method and structure for obtaining ultra-low surface recombination velocities from highly efficient surface passivation in crystalline silicon substrate-based solar cells by utilizing a bi-layer passivation scheme which also works as an efficient ARC. The bi-layer passivation consists of a first thin layer of wet chemical oxide or a thin hydrogenated amorphous silicon layer. A second layer of amorphous hydrogenated silicon nitride film is deposited on top of the wet chemical oxide or amorphous silicon film. This deposition is then followed by annealing to further enhance the surface passivation.
    Type: Application
    Filed: April 23, 2011
    Publication date: November 24, 2011
    Applicant: SOLEXEL, INC.
    Inventors: Mehrdad M. Moslehi, Karl-Josef Kramer, Anand Deshpande, Rafael Ricolcol, Sean M. Seutter
  • Publication number: 20110256654
    Abstract: This disclosure presents manufacturing methods and apparatus designs for making TFSSs from both sides of a re-usable semiconductor template, thus effectively increasing the substrate manufacturing throughput and reducing the substrate manufacturing cost. This approach also reduces the amortized starting template cost per manufactured substrate (TFSS) by about a factor of 2 for a given number of template reuse cycles.
    Type: Application
    Filed: February 12, 2011
    Publication date: October 20, 2011
    Applicant: SOLEXEL, INC.
    Inventors: Mehrdad M. Moslehi, Karl-Josef Kramer, David Xuan-Qi Wang, Pawan Kapur, Somnath Nag, George D Kamian, Jay Ashjaee, Takao Yonehara
  • Patent number: 7950347
    Abstract: The invention provides a rotatable and optionally heatable device for holding a flat substrate. The device includes a supporting means for placing and holding the substrate on a supporting surface, optionally a heater, a means for rotating the supporting means and a means for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is caused to rotate.
    Type: Grant
    Filed: November 3, 2005
    Date of Patent: May 31, 2011
    Assignee: Suss Microtec Lithography, GmbH
    Inventors: Katrin Weilermann, Karl-Josef Kramer
  • Publication number: 20110030610
    Abstract: This disclosure enables high-productivity fabrication of semiconductor-based separation layers (made of single layer or multi-layer porous semiconductors such as porous silicon, comprising single porosity or multi-porosity layers), optical reflectors (made of multi-layer/multi-porosity porous semiconductors such as porous silicon), formation of porous semiconductor (such as porous silicon) for anti-reflection coatings, passivation layers, and multi-junction, multi-band-gap solar cells (for instance, by forming a variable band gap porous silicon emitter on a crystalline silicon thin film or wafer-based solar cell). Other applications include fabrication of MEMS separation and sacrificial layers for die detachment and MEMS device fabrication, membrane formation and shallow trench isolation (STI) porous silicon (using porous silicon formation with an optimal porosity and its subsequent oxidation).
    Type: Application
    Filed: May 5, 2010
    Publication date: February 10, 2011
    Applicant: SOLEXEL, INC.
    Inventors: George D. Kamian, Somnath Nag, Subbu Tamilmani, Mehrdad M. Moslehi, Karl-Josef Kramer, Takao Yonehara
  • Publication number: 20110021006
    Abstract: The present disclosure relates to methods and apparatuses for releasing a thin semiconductor substrate from a reusable template. The method involves forming a mechanically weak layer conformally on a semiconductor template. Then forming a thin semiconductor substrate conformally on the mechanically weak layer. The thin semiconductor substrate, the mechanically weak layer and the template forming a wafer. Then defining the border of the thin-film semiconductor substrate to be released by exposing the peripheral of the mechanically weak layer. Then releasing the thin-film semiconductor substrate by applying a controlled air flow parallel to said mechanically weak layer wherein the controlled air flow separates the thin semiconductor substrate and template according to lifting forces.
    Type: Application
    Filed: June 29, 2010
    Publication date: January 27, 2011
    Applicant: SOLEXEL, INC.
    Inventors: Mehrdad M. Moslehi, David Xuan-Qi Wang, Sam Tone Tor, Karl-Josef Kramer
  • Publication number: 20090074273
    Abstract: A method for analyzing image errors in an image dataset of a medical imaging device is provided. The method includes transmitting the image dataset to a central computing center, analyzing the image errors by a server of the computing center, determining a type of image error in the image dataset, and forwarding the image dataset to a service technician who is responsible for the type of image error determined in the image dataset.
    Type: Application
    Filed: September 11, 2008
    Publication date: March 19, 2009
    Inventors: Axel Fischer, Hermann-Josef Kramer
  • Publication number: 20090000544
    Abstract: The invention provides a rotatable and optionally heatable device for holding a flat substrate. The device comprises a supporting means for placing and holding the substrate on a supporting surface, optionally a heater, a means for rotating the supporting means and a means for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is caused to rotate.
    Type: Application
    Filed: November 3, 2005
    Publication date: January 1, 2009
    Applicant: SÜSS MICRO TEC LITHOGRAPHY GMBH
    Inventors: Katrin Weilermann, Karl-Josef Kramer
  • Patent number: 7232796
    Abstract: The invention relates to tissue inhibitor of metalloproteinase-2 (TIMP-2) as an osteoanabolically active peptide for use as a medicament for treating bone defects, bone diseases and for improving bone regeneration.
    Type: Grant
    Filed: April 4, 2001
    Date of Patent: June 19, 2007
    Assignee: IPF PharmaCeuticals GmbH
    Inventors: Franz-Josef Kramer, Silke Mark, Ludger Ständker, Wolf-Georg Forssmann
  • Publication number: 20030195143
    Abstract: The invention relates to TIMP-2) as an osteoanabolically active peptide for use as a medicament for treating bone defects, bone diseases and for improving bone regeneration.
    Type: Application
    Filed: December 11, 2002
    Publication date: October 16, 2003
    Inventors: Franz-Josef Kramer, Silke Mark, Ludger Standker, Wolf-Georg Forssmann
  • Patent number: 6387803
    Abstract: The invented method produces a silicide region on a silicon body that is useful for a variety of purposes, including the reduction of the electrical contact resistance to the silicon body or an integrated electronic device formed thereon. The invented method includes a step of producing an amorphous region on the silicon body using ion implantation, for example, a step of forming a metal layer such as titanium, cobalt or nickel in contact with the amorphous region, and a step of irradiating the metal with intense light from a source such as a laser, to cause metal atoms to diffuse into the amorphous region to form an alloy region with a silicide composition. In an application of the invented method to the manufacture of a MISFET device, the metal layer is preferably formed with a thickness that is at least sufficient to produce a stoichiometric proportion of metal and silicon atoms in the amorphous region of the gate of the MISFET device.
    Type: Grant
    Filed: September 21, 1998
    Date of Patent: May 14, 2002
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Gaurav Verma, Karl-Josef Kramer, Kurt Weiner
  • Patent number: 6297135
    Abstract: The invented method can be used to form silicide contacts to an integrated MISFET device. Field isolation layers are formed to electrically isolate a portion of the silicon substrate, and gate, source and drain regions are formed therein. A polysilicon runner(s) that makes an electrical connection to the integrated device, is formed on the isolation layers. The structure is subjected to ion implantation to amorphized portions of the silicon gate, source, drain and runner regions. A metal layer is formed in contact with the amorphized regions, and the metal layer overlying the active region of the integrated device is selectively irradiated using a mask. The light melts part of the gate, and amorphized source and drain regions while the remaining portions of the integrated device and substrate remain in their solid phases. Metal diffuses into the melted gate, source and drain regions which are thus converted into respective silicide alloy regions.
    Type: Grant
    Filed: September 21, 1998
    Date of Patent: October 2, 2001
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Gaurav Verma, Karl-Josef Kramer, Kurt Weiner
  • Publication number: 20010012693
    Abstract: The invented method produces a silicide region on a silicon body that is useful for a variety of purposes, including the reduction of the electrical contact resistance to the silicon body or an integrated electronic device formed thereon. The invented method includes a step of producing an amorphous region on the silicon body using ion implantation, for example, a step of forming a metal layer such as titanium, cobalt or nickel in contact with the amorphous region, and a step of irradiating the metal with intense light from a source such as a laser, to cause metal atoms to diffuse into the amorphous region to form an alloy region with a silicide composition. In an application of the invented method to the manufacture of a MISFET device, the metal layer is preferably formed with a thickness that is at least sufficient to produce a stoichiometric proportion of metal and silicon atoms in the amorphous region of the gate of the MISFET device.
    Type: Application
    Filed: September 21, 1998
    Publication date: August 9, 2001
    Inventors: SOMIT TALWAR, GAURAV VERMA, KARL-JOSEF KRAMER, KURT WEINER
  • Patent number: 5908307
    Abstract: Pre-amorphization of a surface layer of crystalline silicon to an ultra-shallow (e.g., less than 100 nm) depth provides a solution to fabrication problems including (1) high thermal conduction in crystalline silicon and (2) shadowing and diffraction-interference effects by an already fabricated gate of a field-effect transistor on incident laser radiation. Such problems, in the past, have prevented prior-art projection gas immersion laser doping from being effectively employed in the fabrication of integrated circuits comprising MOS field-effect transistors employing 100 nm and shallower junction technology.
    Type: Grant
    Filed: January 31, 1997
    Date of Patent: June 1, 1999
    Assignee: Ultratech Stepper, Inc.
    Inventors: Somit Talwar, Karl-Josef Kramer, Guarav Verma, Kurt Weiner