Patents by Inventor Judy Xilin An

Judy Xilin An has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6855583
    Abstract: A method forming a tri-gate fin field effect transistor includes forming an oxide layer over a silicon-on-insulator wafer comprising a silicon layer, and etching the silicon and oxide layers using a rectangular mask to form a mesa. The method further includes etching a portion of the mesa using a second mask to form a fin, forming a gate dielectric layer over the fin, and forming a tri-gate over the fin and the gate dielectric layer.
    Type: Grant
    Filed: August 5, 2003
    Date of Patent: February 15, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Zoran Krivokapic, Judy Xilin An, Bin Yu
  • Patent number: 6853020
    Abstract: A double-gate semiconductor device includes a substrate, an insulating layer, a fin and two gates. The insulating layer is formed on the substrate and the fin is formed on the insulating layer. A first gate is formed on the insulating layer and is located on one side of the fin. A portion of the first gate includes conductive material doped with an n-type dopant. The second gate is formed on the insulating layer and is located on the opposite side of the fin as the first gate. A portion of the second gate includes conductive material doped with a p-type dopant.
    Type: Grant
    Filed: November 8, 2002
    Date of Patent: February 8, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bin Yu, Judy Xilin An
  • Patent number: 6842048
    Abstract: A NOR gate includes is constructed with two asymmetric FinFET type transistors instead of the conventional four-transistor NOR gate. The reduction in the number of transistors from four down to two allows for significant improvements in integrated semiconductor circuits.
    Type: Grant
    Filed: November 22, 2002
    Date of Patent: January 11, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Zoran Krivokapic, Judy Xilin An, Ming-Ren Lin, Haihong Wang
  • Patent number: 6833588
    Abstract: A double-gate semiconductor device includes a substrate, an insulating layer, a fin and a gate. The insulating layer is formed on the substrate and the gate is formed on the insulating layer. The fin has a number of side surfaces, a top surface and a bottom surface. The bottom surface and at least a portion of the side surfaces of the fin are surrounded by the gate. The gate material surrounding the fin has a U-shaped cross-section at a channel region of the semiconductor device.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: December 21, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bin Yu, Shibly S. Ahmed, Judy Xilin An, Srikanteswara Dakshina-Murthy, Zoran Krivokapic, Haihong Wang
  • Patent number: 6815268
    Abstract: A method of forming a gate in a FinFET device includes forming a fin on an insulating layer, forming source/drain regions and forming a gate oxide on the fin. The method also includes depositing a gate material over the insulating layer and the fin, depositing a barrier layer over the gate material and depositing a bottom anti-reflective coating (BARC) layer over the barrier layer. The method further includes forming a gate mask over the BARC layer, etching the BARC layer, where the etching terminates on the barrier layer, and etching the gate material to form the gate.
    Type: Grant
    Filed: November 22, 2002
    Date of Patent: November 9, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bin Yu, Judy Xilin An, Srikanteswara Dakshina-Murthy
  • Patent number: 6803631
    Abstract: A semiconductor structure includes a fin and a layer formed on the fin. The fin includes a first crystalline material having a rectangular cross section and a number of surfaces. The layer is formed on the surfaces and includes a second crystalline material. The first crystalline material has a different lattice constant than the second crystalline material to induce tensile strain within the first layer.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: October 12, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Srikanteswara Dakshina-Murthy, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu
  • Publication number: 20040195627
    Abstract: A semiconductor device includes a fin and a layer formed on at least a portion of the fin. The fin includes a first crystalline material. The layer includes a second crystalline material, where the first crystalline material has a larger lattice constant than the second crystalline material to induce tensile strain within the layer.
    Type: Application
    Filed: April 28, 2004
    Publication date: October 7, 2004
    Inventors: Srikanteswara Dakshina-Murthy, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu
  • Publication number: 20040197975
    Abstract: A narrow channel FinFET is described herein with a narrow channel width. A protective layer may be formed over the narrow channel, the protective layer being wider than the narrow channel.
    Type: Application
    Filed: April 23, 2004
    Publication date: October 7, 2004
    Inventors: Zoran Krivokapic, Judy Xilin An, Srikanteswara Dakshina-Murthy, Haihong Wang, Bin Yu
  • Patent number: 6800885
    Abstract: An asymmetric double gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a first fin formed on a substrate; a second fin formed on the substrate; a first gate formed adjacent first sides of the first and second fins, the first gate being doped with a first type of impurity; and a second gate formed between second sides of the first and second fins, the second gate being doped with a second type of impurity. An asymmetric all-around gate MOSFET includes multiple fins; a first gate structure doped with a first type of impurity and formed adjacent a first side of one of the fins; a second gate structure doped with the first type of impurity and formed adjacent a first side of another one of the fins; a third gate structure doped with a second type of impurity and formed between two of the fins; and a fourth gate structure formed at least partially beneath one or more of the fins.
    Type: Grant
    Filed: March 12, 2003
    Date of Patent: October 5, 2004
    Assignee: Advance Micro Devices, Inc.
    Inventors: Judy Xilin An, Bin Yu
  • Publication number: 20040145000
    Abstract: A triple gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a fin structure, a first gate formed adjacent a first side of the fin structure, a second gate formed adjacent a second side of the fin structure opposite the first side, and a top gate formed on top of the fin structure. A gate around MOSFET includes multiple fins, a first sidewall gate structure formed adjacent one of the fins, a second sidewall gate structure formed adjacent another one of the fins, a top gate structure formed on one or more of the fins, and a bottom gate structure formed under one or more of the fins.
    Type: Application
    Filed: January 23, 2003
    Publication date: July 29, 2004
    Inventors: Judy Xilin An, Haihong Wang, Bin Yu
  • Publication number: 20040145019
    Abstract: A semiconductor structure includes a fin and a layer formed on the fin. The fin includes a first crystalline material having a rectangular cross section and a number of surfaces. The layer is formed on the surfaces and includes a second crystalline material. The first crystalline material has a different lattice constant than the second crystalline material to induce tensile strain within the first layer.
    Type: Application
    Filed: January 23, 2003
    Publication date: July 29, 2004
    Inventors: Srikanteswara Dakshina-Murthy, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu
  • Patent number: 6765227
    Abstract: A semiconductor-on-insulator (SOI) wafer. The wafer includes a silicon substrate, a buried oxide (BOX) layer disposed on the substrate, and an active layer disposed on the box layer. The active layer has an upper silicon layer disposed on a silicon-germanium layer. The silicon-germanium layer is disposed on a lower silicon layer. The silicon-germanium of the silicon-germanium layer is strained silicon-germanium and is about 200 Å to about 400 Å thick.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: July 20, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bin Yu, William G. En, Judy Xilin An, Concetta E. Riccobene
  • Patent number: 6765303
    Abstract: A SRAM cell includes a single FinFET and two resonant tunnel diodes. The FinFet has multiple channel regions formed from separate fins. The resonant tunnel diodes may be formed from FinFET type fins. In particular, the resonant diodes may includes a thin, undoped silicon region surrounded by a dielectric. The SRAM cell is small and provides fast read/write access times.
    Type: Grant
    Filed: May 6, 2003
    Date of Patent: July 20, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Zoran Krivokapic, Judy Xilin An, Matthew S. Buynoski
  • Patent number: 6762483
    Abstract: A method of forming fins for a double-gate fin field effect transistor (FinFET) includes forming a second layer of semi-conducting material over a first layer of semi-conducting material and forming double caps in the second layer of semi-conducting material. The method further includes forming spacers adjacent sides of each of the double caps and forming double fins in the first semi-conducting material beneath the double caps. The method also includes thinning the double fins to produce narrow double fins.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: July 13, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Zoran Krivokapic, Judy Xilin An, Srikanteswara Dakshina-Murthy, Haihong Wang, Bin Yu
  • Publication number: 20040100306
    Abstract: A NOR gate includes is constructed with two asymmetric FinFET type transistors instead of the conventional four-transistor NOR gate. The reduction in the number of transistors from four down to two allows for significant improvements in integrated semiconductor circuits.
    Type: Application
    Filed: November 22, 2002
    Publication date: May 27, 2004
    Inventors: Zoran Krivokapic, Judy Xilin An, Ming-Ren Lin, Haihong Wang
  • Publication number: 20040075121
    Abstract: A double-gate semiconductor device includes a substrate, an insulating layer, a fin and a gate. The insulating layer is formed on the substrate and the gate is formed on the insulating layer. The fin has a number of side surfaces, a top surface and a bottom surface. The bottom surface and at least a portion of the side surfaces of the fin are surrounded by the gate. The gate material surrounding the fin has a U-shaped cross-section at a channel region of the semiconductor device.
    Type: Application
    Filed: October 22, 2002
    Publication date: April 22, 2004
    Inventors: Bin Yu, Shibly S. Ahmed, Judy Xilin An, Srikanteswara Dakshina-Murthy, Zoran Krivokapic, Haihong Wang
  • Publication number: 20040075122
    Abstract: A double gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a fin, a first gate and a second gate. The first gate is formed on top of the fin. The second gate surrounds the fin and the first gate. In another implementation, a triple gate MOSFET includes a fin, a first gate, a second gate, and a third gate. The first gate is formed on top of the fin. The second gate is formed adjacent the fin. The third gate is formed adjacent the fin and opposite the second gate.
    Type: Application
    Filed: October 22, 2002
    Publication date: April 22, 2004
    Inventors: Ming-Ren Lin, Judy Xilin An, Zoran Krivokapic, Cyrus E. Tabery, Haihong Wang, Bin Yu
  • Patent number: 6716690
    Abstract: Multiple dopant implantations are performed on a FinFET device to thereby distribute the dopant in a substantially uniform manner along a vertical depth of the FinFET in the source/drain junction. Each of the multiple implantations may be performed at different tilt angles.
    Type: Grant
    Filed: March 12, 2003
    Date of Patent: April 6, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Haihong Wang, Judy Xilin An, Bin Yu
  • Patent number: 6717212
    Abstract: A device and method for making a semiconductor-on-insulator (SOI) structure having a leaky, thermally conductive material (LTCIM) layer disposed between a semiconductor substrate and a semiconductor layer.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: April 6, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Dong-Hyuk Ju, William George En, Srinath Krishnan, Concetta E. Riccobene, Zoran Krivokapic, Judy Xilin An, Bin Yu
  • Patent number: 6716686
    Abstract: A method for forming one or more FinFET devices includes forming a source region and a drain region in an oxide layer, where the oxide layer is disposed on a substrate, and etching the oxide layer between the source region and the drain region to form a group of oxide walls and channels for a first device. The method further includes depositing a connector material over the oxide walls and channels for the first device, forming a gate mask for the first device, removing the connector material from the channels, depositing channel material in the channels for the first device, forming a gate dielectric for first device over the channels, depositing a gate material over the gate dielectric for the first device, and patterning and etching the gate material to form at least one gate electrode for the first device.
    Type: Grant
    Filed: July 8, 2003
    Date of Patent: April 6, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Matthew S. Buynoski, Judy Xilin An, Bin Yu