Abstract: An illumination system for illuminating a mask in a microlithographic exposure apparatus has an optical axis and a pupil surface. The system can include an array of reflective or transparent beam deflection elements such as mirrors. Each deflection element can be adapted to deflect an impinging light ray by a deflection angle that is variable in response to a control signal. The beam deflection elements can be arranged in a first plane. The system can further include an optical raster element, which includes a plurality of microlenses and/or diffractive structures. The beam deflection elements), which can be arranged in a first plane, and the optical raster element, which can be arranged in a second plane, can commonly produce a two-dimensional far field intensity distribution. An optical imaging system can optically conjugate the first plane to the second plane.

Abstract: A foldable wiper plate includes a first plate wing pivotable about a first axis, and a second plate wing pivotable about a second axis differing from the first axis. The first plate wing includes a first lock-in device that releasably interlocks the first plate wing with the second axis.

Abstract: Flame-retardant polymer foams which comprise, as flame retardant, at least one halogenated polymer, for example brominated polystyrene or styrene-butadiene block copolymer having bromine content in the range from 40 to 80% by weight, or tetrabromobisphenol A compounds (TBBPA), processes for producing these, and also flame-retardant expandable styrene polymers.

Abstract: A mopping device includes a mop plate including a first mopping wing and a second mopping wing. The first and second mopping wings are configured to fold toward one another, and the first and second mopping wings each include a first material and each include at least one sliding element made of a second material. The mopping device further includes a first squeezing arm and a second squeezing arm disposed movably relative to the first and second mopping wings. The first and second squeezing arms are configured to respectively slide on the respective at least one sliding element and fold the first and second mopping wings toward one another.

Abstract: A fiber cable for helicopter rescue winches includes a plurality of load-bearing synthetic-fiber strands braided with one another, at least one electrically conductive insert, and a wear indicator providing a visual check of a state of the fiber cable, where the load-bearing synthetic-fiber strands are encased in a radial direction by a friction-reducing stable fiber layer, an inner cable jacket, and outer cable jacket.

Abstract: The present invention relates to a method and a device for controlling multiple actuators with a controller and multiple actuators controllable by the controller. At least several groups of actuators are individually controllable by the controller and to each actuator or each group of actuators is assigned at least one memory storage unit, which can store at least one parameter for controlling one or more actuators. At least two parameters are assigned to each actuator or each group of actuators, with one position of the actuator(s) being assigned to each of the parameters.

Abstract: An electronic operating device for a gas discharge lamp having a voltage transformer which converts an input voltage into an intermediate circuit voltage, and an inverter with a lamp inductor and a bridge circuit with at least two switches which converts the intermediate circuit voltage into a lamp voltage, the operating device being designed to adjust the intermediate circuit voltage present between the DC voltage transformer and the inverter to a predetermined value which is dependent on the lamp state. Also disclosed is a method for operating an operating device.

Abstract: The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.

Abstract: The present invention relates to a substantially anhydrous suspension incorporating at least one biostable hydroxyalkylcellulose having an MS of 1.0 to 3.0, at least one oil, and at least one defoamer. The cellulose ether is preferably a hydroxyethylcellulose (HEC) having an MS of 1.0 to 3.0, preferably of 1.8 to 2.8, more preferably about 2.4. The oil is preferably a natural oil. Further disclosed is an emulsion paint, more particularly for interior coatings, which includes this suspension. It is particularly resistant to enzymes having a cellulytic action (cellulases), and this is manifested in a reduced fall in viscosity.

Abstract: A gravitation compensator for mounting optical elements in a projection exposure apparatus and a corresponding projection exposure apparatus are disclosed. The gravitation compensator at least partly compensates for the weight force of a mounted optical element and simultaneously enables a change in the position of the optical element without the compensated weight force being altered in an impermissible manner during the change in position. This applies, in particular, to high weight forces which are to be compensated. Furthermore, the gravitation compensator enables use in different atmospheres and the compensation of corresponding aging effects.

Abstract: A projection exposure apparatus for microlithography for the production of semiconductor components includes at least one optical assembly with at least one optical element which can be actuated in a mechanically controlled manner is mounted in a structure. For carrying out the mechanical actuation, a control signal transmission device and/or an energy transmission device are/is provided, which introduce(s) no parasitic mechanical effects into the optical assembly at least during specific operating states of the projection exposure apparatus.

Abstract: An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

Abstract: A working apparatus for processing, especially sealing, underwater bed areas, especially banks and bottoms of waterways, especially canals, a process for setting up said apparatus, a process for moving said apparatus and uses of said apparatus are described.

Abstract: A fiber cable for helicopter rescue winches includes a plurality of load-bearing synthetic-fiber strands braided with one another, at least one electrically conductive insert, and a wear indicator providing a visual check of a state of the fiber cable, where the load-bearing synthetic-fiber strands are encased in a radial direction by a friction-reducing stable fiber layer, an inner cable jacket, and outer cable jacket.

Abstract: In an extraction device comprising a suction apparatus (16) with an electric motor (32) and an centrifugal separator (14) exhibiting an inlet cylinder (22), a vertically arranged dip pipe (30) and a lateral suction nozzle (24) through which a laden gas stream enters the inlet cylinder (22), it is provided with a view to creating a low-cost and easy-to-handle extraction device of a compact design, having a centrifugal separator, that the electric motor (32) is arranged inside the dip pipe (30).

Abstract: A fiber cable for helicopter rescue winches includes a plurality of load-bearing synthetic-fiber strands braided with one another, at least one electrically conductive insert, and a wear indicator providing a visual check of a state of the fiber cable, where the load-bearing synthetic-fiber strands are encased in a radial direction by a friction-reducing stable fiber layer, an inner cable jacket, and outer cable jacket.

Abstract: A foldable mop plate includes a first plate wing coupled to a second plate wing by an articulated coupling and at least one mopping cover. The at least one mopping cover is disposed on the first and second plate wings and configured to be squeezed out through a folding of the first and second plate wings toward one another. Further, a spacing between the first and second plate wings in a region of the articulated coupling is enlargeable upon a folding of the first and second plate wings toward one another.

Abstract: A pair of one piece cast impellers having radially extending curved and twisted three dimensional blades and being in a compressor housing which is connected to a drive motor and the impellers being mounted onto a motor drive shaft by jamming or press fitting the impellers on the shaft to provide a two stage radial compressor wherein the drive motor (5), a drive shaft (14) on which there a arranged two impellers (10, 12) there is envisaged that the drive motor (5) is a fast-running asynchronous motor with a speed in excess of 10,000 rpm and a power of around 5 to 10 kW.

Abstract: An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

Abstract: A data transmission method is described, where first data is transmitted to a first processor, then second data based on the first data is transmitted to a second processor, and a check result is transmitted back to the first processor. This permits an independent check of data transmitted to a first processor by a second processor, so that abuse or prohibited use of first data in the first processor can be prevented.