Abstract: A wafer holding apparatus for fixing a wafer having a central portion and a circumference portion includes a holding platform, a lift stage, and a fixing device. The holding platform has a hole structure and a support rib protruding inwardly from an inner wall of the hole structure. The lift stage includes a support platform and a driving arm connected to the support platform for driving the support platform to ascend or descend. When the support platform ascends to a support position to support the wafer, the central portion is flat on the support platform to make the circumference portion flat on a top surface of the support rib in a surface contact manner. The fixing device is for fixing the circumference portion to the top surface of the support rib. After the circumference portion is fixed to the support rib, the lift stage descends to a retracted position.