Patents by Inventor Julian Kaller
Julian Kaller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230243644Abstract: A method for measuring a surface shape of an optical element, wherein the optical element has a main body with a substrate and a reflective surface, and wherein at least one cooling channel for receiving a coolant is formed in the substrate, comprising: a) recording a cooling channel pressure, b) recording a measurement environment pressure, c) determining a pressure difference based on the cooling channel pressure and the measurement environment pressure, d) comparing the pressure difference with a predetermined target pressure difference, e) monitoring for a deviation between the pressure difference and the target pressure difference, wherein, if a deviation greater than a predetermined limit value is detected, the cooling channel pressure is adapted in such a way that the deviation becomes less than or equal to the predetermined limit value, and f) measuring the surface shape if the deviation is less than or equal to the predetermined limit value.Type: ApplicationFiled: April 6, 2023Publication date: August 3, 2023Inventors: Hans Michael STIEPAN, Thomas MONZ, Julian KALLER, Ulrich LOERING
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Patent number: 11194119Abstract: An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m?1 K?1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m?1 K?1.Type: GrantFiled: December 3, 2019Date of Patent: December 7, 2021Assignee: Carl Zeiss SMT GmbHInventors: Julian Kaller, Franz Sorg, Ralf Winter, Karl-Stefan Weissenrieder
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Publication number: 20200103771Abstract: An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m?1 K?1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m?1 K?1.Type: ApplicationFiled: December 3, 2019Publication date: April 2, 2020Inventors: Julian Kaller, Franz Sorg, Ralf Winter, Karl-Stefan Weissenrieder
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Patent number: 10509336Abstract: An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m?1 K?1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m?1 K?1.Type: GrantFiled: May 25, 2017Date of Patent: December 17, 2019Assignee: Carl Zeiss SMT GmbHInventors: Julian Kaller, Franz Sorg, Ralf Winter, Karl-Stefan Weissenrieder
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Patent number: 10281824Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: GrantFiled: January 24, 2017Date of Patent: May 7, 2019Assignee: Carl Zeiss SMT GmbHInventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple
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Patent number: 10203607Abstract: An optical element unit including a first optical element module and a sealing arrangement is disclosed. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially prevents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.Type: GrantFiled: December 4, 2014Date of Patent: February 12, 2019Assignee: Carl Zeiss SMT GmbHInventors: Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler, Dirk Schaffer, Bernhard Gellrich
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Publication number: 20180031827Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.Type: ApplicationFiled: July 11, 2017Publication date: February 1, 2018Inventors: Guido SOYEZ, Stephan BACK, Joachim BUECHELE, Julian KALLER, Guido LIMBACH, Harald WOELFLE
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Publication number: 20170261867Abstract: An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m?1 K?1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m?1 K?1.Type: ApplicationFiled: May 25, 2017Publication date: September 14, 2017Inventors: Julian Kaller, Franz Sorg, Ralf Winter, Karl-Stefan Weissenrieder
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Patent number: 9703098Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.Type: GrantFiled: August 22, 2016Date of Patent: July 11, 2017Assignee: Carl Zeiss SMT GmbHInventors: Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
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Publication number: 20170192362Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: ApplicationFiled: January 24, 2017Publication date: July 6, 2017Inventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple
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Publication number: 20160357012Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.Type: ApplicationFiled: August 22, 2016Publication date: December 8, 2016Inventors: Guido SOYEZ, Stephan BACK, Joachim BUECHELE, Julian KALLER, Guido LIMBACH, Harald WOELFLE
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Patent number: 9423695Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.Type: GrantFiled: January 26, 2015Date of Patent: August 23, 2016Assignee: Carl Zeiss SMT GmbHInventors: Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
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Patent number: 9097984Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: GrantFiled: July 22, 2014Date of Patent: August 4, 2015Assignee: Carl Zeiss SMT GmbHInventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple
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Publication number: 20150168846Abstract: An optical element unit including a first optical element module and a sealing arrangement is disclosed. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially prevents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.Type: ApplicationFiled: December 4, 2014Publication date: June 18, 2015Inventors: Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler, Dirk Schaffer, Bernhard Gellrich
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Patent number: 9046795Abstract: An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.Type: GrantFiled: March 11, 2008Date of Patent: June 2, 2015Assignee: Carl Zeiss SMT GmbHInventors: Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle, Jens Kugler, Dirk Schaffer, Bernhard Gellrich
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Publication number: 20150138521Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.Type: ApplicationFiled: January 26, 2015Publication date: May 21, 2015Inventors: Guido SOYEZ, Stephan BACK, Joachim BUECHELE, Julian KALLER, Guido LIMBACH, Harald WOELFLE
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Patent number: 8939587Abstract: An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region.Type: GrantFiled: February 13, 2013Date of Patent: January 27, 2015Assignee: Carl Zeiss SMT GmbHInventors: Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
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Publication number: 20140333913Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: ApplicationFiled: July 22, 2014Publication date: November 13, 2014Inventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple
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Patent number: 8870396Abstract: For the production of mirrors for EUV lithography, substrates are suggested having a mean relative thermal longitudinal expansion of no more than 10 ppb across a temperature difference ?T of 15° C. and a zero-crossing temperature in the range between 20° C. and 40° C. For this purpose, at least one first and one second material having low thermal expansion coefficients and opposite gradients of the relative thermal expansion as a function of temperature are selected and a substrate is produced by mixing and bonding these materials.Type: GrantFiled: November 2, 2012Date of Patent: October 28, 2014Assignee: Carl Zeiss SMT GmbHInventors: Julian Kaller, Wilfried Clauss, Michael Gerhard
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Publication number: 20140293256Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: ApplicationFiled: June 10, 2014Publication date: October 2, 2014Inventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple