Abstract: An apparatus includes a process chamber configured to perform an ion implantation process. A cooling platen or electrostatic chuck is provided within the process chamber. The cooling platen or electrostatic chuck is configured to support a semiconductor wafer. The cooling platen or electrostatic chuck has a plurality of temperature zones. Each temperature zone includes at least one fluid conduit within or adjacent to the cooling platen or electrostatic chuck. At least two coolant sources are provided, each fluidly coupled to a respective one of the fluid conduits and configured to supply a respectively different coolant to a respective one of the plurality of temperature zones during the ion implantation process. The coolant sources include respectively different chilling or refrigeration units.

Abstract: Disclosed is a method for detecting a hidden station in a specific station constituting a wireless communication network that includes receiving a frame after a lapse of an idle state interval longer than a predetermined waiting time; determining that there is a hidden station, if a size of the received frame is equal to a size of an Acknowledge (ACK) frame; and determining that there is no hidden station, if the size of the received frame is not equal to the size of the ACK frame.

Abstract: There is provided a composite catalyst in which metal particles having catalytic activity are supported at a high density on a surface of an inorganic oxide, and the supported metal particles are strongly fixed to the surface of the inorganic oxide to improve the durability of the composite catalyst. The composite catalyst includes the inorganic oxide and the metal particles. A compound having a functional group including an amino group or a thiol group is bonded to a surface of the inorganic oxide. The metal particles are bonded to the functional group.

Abstract: Provided is a method of forming a phase change memory device, the method including washing and rinsing a phase change device structure. A phase change material layer may be formed on a semiconductor substrate. The phase change material layer may be etched so as to form a phase change device structure. The semiconductor substrate on which the phase change device structure is formed may be washed using a washing solution including a reducing agent containing fluorine (F), a pH controller, a dissolution agent and water. In addition, the semiconductor substrate on which the washing is performed may be rinsed.

Abstract: It relates to a norbornene-based polymer having low dielectric constant which is thus suitable for a low loss dielectric material, an insulating material using the same, an embedded printed circuit board and a functional device, in which the norbornene-based polymer includes at least one repeat unit of formula 1: wherein, at least one of R1 to R4 may be independently selected from the group consisting of hydrogen, in which R5, R6 and R7 are each independently selected from the group consisting of hydrogen, substituted or unsubstituted C1-C6 alkyl, C1-C6 alkyl substituted with an aliphatic bicyclo or multicyclo compound, substituted or unsubstituted C2-C6 alkenyl and substituted or unsubstituted C4-C31 arylalkyl, L is C1-C3 alkyl.

Abstract: An apparatus to acquire 3-dimensional geographical information of an underground pipe includes an in-pipe transfer unit which moves along the inside of the underground pipe, a sensing unit which senses 3-dimensional location information of the in-pipe transfer unit, and an information storage unit which stores a value measured by the sensing unit. Accordingly, the depth at which the underground pipe is located as well as 2-dimensional location information of the underground pipe is stored in the information storage unit so that maintenance and repair of the underground pipe can be carried out with greater efficiency.

Abstract: A plasma processing apparatus includes a temperature measuring unit; airtightly sealed temperature measuring windows provided in a mounting table, for optically communicating to transmit a measurement beam through a top surface and a bottom surface of the mounting table; and one or more connection members for connecting the mounting table and a base plate, which is provided in a space between the mounting table and the base plate. In the plasma processing apparatus, a space above the mounting table is set to be maintained under a vacuum atmosphere, and a space between the mounting table and the base plate is set to be maintained under a normal pressure atmosphere, and each collimator is fixed to the base plate at a position corresponding to each temperature measuring window, thereby measuring a temperature of the substrate via the temperature measuring windows by the temperature measuring unit.

Abstract: An imaging apparatus, including: an imaging section for generating image data by performing continuous shooting, a first setting section for setting the number of images to be photographed, in each of the images a subject image is to be included; a dividing section for dividing a photographing region of the imaging section into divided regions of the number of images set by the first setting section; a second setting section for setting a continuous shooting speed based on a photographed position of the subject image in each of the divided regions divided by the dividing section; and a controller for controlling the imaging section to perform the continuous shooting at the continuous shooting speed set by the second setting section.

Abstract: Disclosed is a radio (wireless) communication system providing a radio communication service and a terminal, and an operation method of a Packet Data Convergence Protocol (PDCP) entity in a Universal Mobile Telecommunications System (UMTS), and more particularly, to an operation method of transmitting, by a transmitting side (transmitter), data blocks by including a Connection Frame Number (CFN) therein such that a receiving side (receiver) processes each of received data blocks by a reference time, as a method of providing a Circuit Switched (CS) service using a High Speed Downlink Packet Access (HSDPA) or High Speed Uplink Packet Access (HSUPA) technology.

Abstract: A method of performing data communication with a base station by a mobile terminal in a wireless communication system includes transmitting uplink data to the base station or receiving downlink data from the base station by using first channel resource assignment information among two or more channel resource assignment information, receiving from the base station a channel resource modification indicator indicating that a channel resource for transmitting or receiving data should be modified, and transmitting the uplink data to the base station or receiving the downlink data from the base station by using second channel resource assignment information among the two or more channel resource assignment information. Therefore, the efficiency of a channel resource can be improved in a wireless communication system.

Abstract: Embodiments of the present invention provide a method and system for reassigning traffic channel configuration, which is applicable to reassigning traffic channel configuration between a site A and a site B with the reassignment being initiated by the site A. The site A transmits a reassignment message to the site B, where the reassignment message carries reassigned traffic channel configuration. The site B determines whether the reassignment message is received correctly, and processes traffic data and transmits the traffic data to the site A according to a determining result. The site A processes the traffic data, and determines whether the reassignment message is correctly received by the site B through determining whether the traffic data are correct. The method and the system enable a base station to determine whether a terminal correctly receives a reassignment message without the terminal transmitting an acknowledgement message, which guarantees fluent communications between the two parties.

Abstract: The present invention relates to a microplasma current switch enabling to increase the amount of electric current passing through the microplasma current switch by adjusting the areas of electrodes exposed to plasmas. The present invention includes a plasma discharge space; a plasma generating means installed within the plasma discharge space; an exposed cathode electrode installed within the plasma discharge space; and an exposed anode electrode installed within the plasma discharge space apart from the exposed cathode electrode, wherein the exposed anode electrode is connected electrically to the exposed cathode electrode by generating a plasma, and the exposed area of the exposed anode electrode to the plasma is smaller than that of the exposed cathode electrode.

Abstract: Disclosed is a radio (wireless) communication system providing a radio communication service and a terminal, and more particularly, to a method of exchanging a data block or data unit between a base station and a terminal in an Evolved Universal Mobile Telecommunications System (E-UMTS) that has evolved from a Universal Mobile Telecommunications System (UMTS) or a Long Term Evolution (LTE) system, which can generate a data block to enhance efficiency of radio resources.

Abstract: A CMOS charge pump with improved latch-up immunity is provided. The CMOS charge pump includes a blocking transistor that disconnects first and second boost nodes from a bulk node in response to a blocking control signal, such that a bulk voltage can be maintained at a predetermined level or higher. The CMOS charge pump in a power-up period first precharges the bulk voltage before the main pump performs a boosting operation and prevents a latch-up phenomenon.

Abstract: A welding observation apparatus is provided to use partial darkening by a telecentric optical system and a photochromic filter (PCF) as an optical system for filtering light emission from arc discharge in order to verify the welding condition under the welding arc discharge, without forming an image on the PCF, so that light reducing performance can be secured even if a focus shifts from on the PCF, with satisfactory monitoring of welding condition. The welding observation apparatus comprises: an arc welding unit 8; an objective optical system (1, 2) for concentrating light from the arc welding unit 8; a telecentric optical system 3 for guiding the light concentrated by the objective optical system (1, 2); a PCF 4 for illuminating with the light guided by the telecentric optical system 3; and a solid state imaging device 9 for receiving the light passing through the PCF 4, wherein the light from the arc welding unit 8 is partial-darkened by the PCF 4.

Abstract: The image sensor includes a substrate, an insulating structure formed on a first surface of the substrate and including a first metal wiring layer exposed by a contact hole penetrating the substrate, a conductive spacer formed on sidewalls of the contact hole and electrically connected to the first metal wiring layer, and a pad formed on a second surface of the substrate and electrically connected to the first metal wiring layer.

Abstract: A patterning process includes (1) coating and baking a first positive resist composition to form a first resist film, exposing, post-exposure baking, and alkali developing to form a first resist pattern, (2) applying a resist-modifying composition to the first resist pattern and heating to modify the first resist pattern, (3) coating and baking a second positive resist composition to form a second resist film, exposing, post-exposure baking, and alkali developing to form a second resist pattern. The modified first resist film has a contact angle with pure water of 50°-85°.

Abstract: An apparatus and method for operating the femto BS includes receiving an Identification-index (I-index) and a physical cell Identifier (ID) used to generate of Inter Working Signal (IWS) contents from a macro BS. The IWS contents is generated by using the physical cell ID. The method includes performing scrambling on the IWS contents by using one of scrambling codes included in a scrambling code set of the macro BS. Thereafter, the IWS contents are transmitted.

Abstract: A biocoke producing apparatus that realizes efficient mass production of biocoke; a method of controlling the same; and a process for manufacture thereof. The apparatus includes a horizontal tubular reaction vessel (10) provided on its one end side with a supply part (11) for pulverized biomass and provided on its other end side with a discharge part (12). On the supply part side, there is provided an extrusion piston (6) capable of reciprocation along the longitudinal direction in the interior of the reaction vessel and capable of pressurizing the pulverized biomass within the vessel; The temperature range and pressure range for inducing a pyrolytic or thermal curing reaction of lignin and hemicellulose contained in the pulverized biomass are preset, and the reaction vessel (10) is provided with a thermal reaction region (13) for heating the pulverized biomass at temperature within the above temperature range and with a cooling region (14).

Abstract: A gaming system is provided enabling real-time cash management to be performed, even while in the play of a game to be performed by employing game media rendering their items of recorded information readable. Having received a result of detection of game chips on a game betting board from a game betting device, a server device accumulates the result of the detection, and judges whether or not movement of game chips has occurred between a dealer and each player, in comparison with a past result. When movement of game chips has occurred between the dealer and such each player, data relevant to a game chip table, a player table, and a dealer table is updated so as to reflect a result of the movement.