Abstract: A substrate cleaning device includes a substrate holder, a lower-surface brush, a first liquid nozzle and a second liquid nozzle. The substrate holder holds a substrate in a horizontal attitude. The lower-surface brush is configured to be movable between a processing position for cleaning of the substrate and a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction. Further, the lower-surface brush is configured to be rotatable about an axis extending in the up-and-down direction. The lower-surface brush cleans a lower surface of the substrate by coming into contact with the lower surface of the substrate. The first liquid nozzle discharges a cleaning liquid to a center portion of the lower-surface brush, at a waiting position. The second liquid nozzle discharges a cleaning liquid to an end portion of the lower-surface brush, at the waiting position.

Abstract: A cleaner comes into contact with a lower-surface center region of a substrate held by a first holder, so that the lower-surface center region is cleaned. The cleaner comes into contact with a lower-surface outer region of the substrate rotated by a second holder, so that the lower-surface outer region of the substrate is cleaned. During cleaning of the lower-surface center region, the second holder is rotated about a vertical axis while not holding the substrate. Alternatively, during cleaning of the lower-surface center region, the gas injector arranged between the cleaner and the second holder injects gas toward the substrate from a first height spaced apart from the substrate by a predetermined distance. Further, during drying of the lower-surface center region, the gas injector injects gas toward the substrate from a second height closer to the substrate than the first height.

Abstract: An object of the present disclosure is to determine a travelable area with high accuracy even when other mobile objects exist in the vicinity. The travel area determination device includes an integration unit configured to integrate surrounding travel area information and travel area information, and an autonomous travel determination unit configured to determine an autonomous travelable area based on the integrated travel area information. A travel area creation unit is configured to determine a free space as a travelable area where a subject vehicle is travelable. The integration unit is configured to determine a travelable area where the surrounding mobile object is travelable as a surrounding travelable area where the subject vehicle is travelable, and integrate it and the travel area information. The autonomous travel determination unit is configured to determine the travelable area and the surrounding travelable area of the subject mobile object as the autonomous travelable areas.

Abstract: A shovel includes a lower traveling structure, an upper swing structure swingably mounted on the lower traveling structure, an attachment, and processing circuitry. The attachment includes a boom attached to the upper swing structure, an arm attached to the distal end of the boom, and an end attachment attached to the distal end of the arm. The processing circuitry is configured to automatically move the attachment in such a manner as to relatively reduce the movement of the attachment.

Abstract: An attachment is attached to an upper turning body. During a normal operation, a drive means drives the attachment according to an input of an operator to a manipulation device. A sensor detects a motion of an excavator. Based on an output of the sensor, the slip suppression unit detects slip of a traveling body in an extension direction of the attachment and corrects an operation of the attachment performed by the drive means.

Abstract: An excavator includes a traveling body, an upper turning body rotatably provided on the traveling body, an attachment which has a boom, an arm, and a bucket and is attached to the upper turning body, and a controller configured to perform a control of a cylinder of at least one shaft of the attachment so as to suppress a vibration of the traveling body or the upper turning body, which is caused by an aerial operation of the attachment.

Abstract: A shovel that corrects the movement of an attachment regardless of the operating state of the attachment by an operator is provided. The shovel includes a traveling body, a turning body turnably mounted on the traveling body, an attachment attached to the turning body, a hydraulic actuator configured to drive the attachment, and a controller. The controller is configured to control the hydraulic actuator to minimize a change in orientation of the traveling body or of the turning body, in response to a change in moment caused by an aerial movement of the attachment.

Abstract: The present disclosure relates to a traveling route generating device including: a driving information obtaining unit to obtain position information and speed information on a vehicle with a plurality of timings when a driver manually drives the vehicle; a traveling route creating unit to create a traveling route of the vehicle manually driven, using the position information and the speed information obtained by the driving information obtaining unit; a speed limit information obtaining unit to obtain speed limit information on a road through which the vehicle has traveled; and a traveling route modifying unit to modify the speed information on the traveling route based on the speed limit information obtained by the speed limit information obtaining unit to generate a modified traveling route.

Abstract: An excavator includes a hydraulic oil holding circuit that is provided in an oil passage between a bottom-side oil chamber of a boom cylinder and a control valve and is closed when the boom is not lowered, and a controller. The controller releases a closed state of the hydraulic oil holding circuit when the excavator is in a predetermined unstable state, and controls a released state so that an acting velocity in a lowering direction of the boom becomes less than or equal to a predetermined reference.

Abstract: A clean and high-purity polycrystalline silicon mass having a small content of chromium, iron, nickel, copper, and cobalt in total, which are heavy metal impurities that reduce the quality of single-crystal silicon, can be obtained from a silicon rod by before crushing a polycrystalline silicon rod, removing at least 70 mm of a polycrystalline silicon portion from the electrode side end of the polycrystalline silicon rod extracted to the outside of a reactor is provided. Thereby, the polycrystalline silicon portion in which the total of the chromium, iron, nickel, copper, and cobalt concentrations in a bulk is not less than 150 ppta can be removed.

Abstract: To provide a traveling route generation apparatus and a traveling route generation method which can suppress generation of the traveling route with bad interpolation accuracy, and can generates the traveling route with good interpolation accuracy, when generating the traveling route of the vehicle. To provide a vehicle control apparatus and a vehicle control method which can control the traveling of vehicle based on the traveling route generated above. A traveling route generation apparatus and a traveling route generation method compares the two traveling positions and the two traveling directions which are temporally before and after relation, and determines whether to interpolate between the two traveling positions, and generates the traveling route which interpolates between the two traveling positions determined to interpolate, when it is determined to interpolate.

Abstract: In a biological simulation apparatus, an operation unit represents a structure domain where tissues of a biological organ exist by a structure mesh model based on a Lagrange description and a fluid domain where fluid inside the biological organ exists by an ALE fluid mesh model based on an ALE description method. In a fluid-structure interaction simulation, the operation unit deforms the structure mesh model, and then deforms the ALE fluid mesh model so as to form no gap on a first interface between a domain where a site other than a certain site of the biological organ in the structure domain exists and the fluid domain or no overlap with the structure domain. The operation unit captures a position of a second interface between a domain where the certain site exists and the fluid domain by using the ALE fluid mesh model as a reference.

Abstract: A shovel includes a traveling body, an upper turning body turnably provided on the traveling body, an attachment including a boom, an arm, and a bucket and attached to the upper turning body, and a processor. The processor is configured to correct the motion of the attachment in such a manner as to control a slip of the traveling body toward the back in the extension direction of the attachment.

Abstract: A shovel includes a traveling body, an upper turning body turnably provided on the traveling body, an attachment including a boom, an arm, and a bucket and attached to the upper turning body, and a processor. The processor is configured to correct a motion of the boom cylinder of the attachment in such a manner as to control a lift of the rear of the traveling body with the front of the traveling body serving as a tipping fulcrum. The processor is configured to correct the motion of the boom cylinder based on a rod pressure and a bottom pressure of the boom cylinder.

Abstract: For evaluating a polycrystalline silicon rod to be used as a raw material for production of FZ Si single crystals, novel evaluation values (values of characteristics×amount of crystals) including the amount of crystals grown in the growth direction (radial direction) are defined and the homogeneity in crystal characteristics in the growth direction (radial direction) is evaluated. Specifically, the homogeneity of the polycrystalline rod is evaluated by sampling a plurality of specimen plates each having, as a principal plane thereof, a cross-section perpendicular to a radial direction of the polycrystalline rod grown by a Siemens method at equal intervals in the radial direction, determining values of characteristics of the crystals of the specimen plates by measurements, and by using evaluation values obtained by multiplying amounts of the crystals (relative amounts of the crystals) at sites where the specimen plates have been sampled by the values of the crystal characteristics.

Abstract: A shovel includes a lower traveling body, an upper turning body turnably mounted on the lower traveling body, an attachment including a boom attached to the upper turning body, an arm attached to an end of the boom, and an end attachment attached to an end of the arm, wherein a motion of the arm or the end attachment is corrected according to a stability of a body of the shovel.

Abstract: A shovel includes a lower traveling structure, an upper swing structure swingably mounted on the lower traveling structure, an attachment, and processing circuitry. The attachment includes a boom attached to the upper swing structure, an arm attached to the distal end of the boom, and an end attachment attached to the distal end of the arm. The processing circuitry is configured to automatically move the attachment in such a manner as to relatively reduce the movement of the attachment.

Abstract: An attachment is attached to an upper turning body. During a normal operation, a drive means drives the attachment according to an input of an operator to a manipulation device. A sensor detects a motion of an excavator. Based on an output of the sensor, the slip suppression unit detects slip of a traveling body in an extension direction of the attachment and corrects an operation of the attachment performed by the drive means.

Abstract: An excavator includes a hydraulic oil holding circuit that is provided in an oil passage between a bottom-side oil chamber of a boom cylinder and a control valve and is closed when the boom is not lowered, and a controller. The controller releases a closed state of the hydraulic oil holding circuit when the excavator is in a predetermined unstable state, and controls a released state so that an acting velocity in a lowering direction of the boom becomes less than or equal to a predetermined reference.

Abstract: For evaluating a polycrystalline silicon rod to be used as a raw material for production of FZ Si single crystals, novel evaluation values (values of characteristics×amount of crystals) including the amount of crystals grown in the growth direction (radial direction) are defined and the homogeneity in crystal characteristics in the growth direction (radial direction) is evaluated. Specifically, the homogeneity of the polycrystalline rod is evaluated by sampling a plurality of specimen plates each having, as a principal plane thereof, a cross-section perpendicular to a radial direction of the polycrystalline rod grown by a Siemens method at equal intervals in the radial direction, determining values of characteristics of the crystals of the specimen plates by measurements, and by using evaluation values obtained by multiplying amounts of the crystals (relative amounts of the crystals) at sites where the specimen plates have been sampled by the values of the crystal characteristics.