Abstract: A substrate processing method includes housing, in a processing container, a substrate having an insulating film on a surface of the substrate; exposing the insulating film to plasma generated from a gas including deuterium gas in a state where the substrate housed in the processing container is maintained at a first temperature, to introduce deuterium into the insulating film; and heat-treating the insulating film without exposing the insulating film to the plasma in a state where the substrate housed in the processing container is controlled to be at a second temperature that is different from the first temperature, to adjust concentration of the deuterium introduced into the insulating film.

Abstract: A substrate processing method includes preparing a substrate having a target film including silicon, carbon, and nitrogen on a surface of the substrate; supplying hydrogen gas and oxygen gas to the target film to oxidize a surface layer of the target film and form an oxide film; and etching the oxide film.

Abstract: It is an object of the present invention to provide a modified oxygenase that specifically epoxidizes only the position-?3 of highly unsaturated fatty acid. The present invention relates to: a polypeptide consisting of an amino acid sequence containing one or two or more amino acid substitutions selected from the group consisting of F87K/I/H, A330V, P25L and T438M, in the amino acid sequence as set forth in SEQ ID No: 2; and a polypeptide substantially identical to the aforementioned polypeptide.

Abstract: A film-forming method includes (a) providing a substrate including a recess; (b) supplying aminosilane to the substrate, and forming an inhibition layer over a surface of the recess; (c) forming a silicon nitride film over the surface of the recess by performing a cycle a first number of times, the cycle including supplying a silicon raw material to the substrate, and supplying a nitriding agent to the substrate at a timing different from the supply of the silicon raw material to the substrate; and (d) repeatedly performing (b) and (c) in order of (b) and (c).

Abstract: A film-forming method includes (a) providing a substrate including a recess; (b) supplying aminosilane to the substrate, and forming an inhibition layer over a surface of the recess; (c) forming a silicon nitride film over the surface of the recess by performing a cycle a first number of times, the cycle including supplying a silicon raw material to the substrate, and supplying a nitriding agent to the substrate at a timing different from the supply of the silicon raw material to the substrate; and (d) adjusting adsorptivity of the aminosilane onto the surface of the recess before (b).

Abstract: An object of the present disclosure is, at least, to provide an enzyme that dehydroxylates hydroxyl groups at predetermined positions of urolithins having hydroxyl groups at the predetermined positions, and the object can be solved by an enzyme having the following properties (1) and (2): (1) dehydroxylating a hydroxyl group at the 4-position of urolithins; and (2) in the presence of methyl viologen (MV), being activated by one or more components selected from the group consisting of: reduced nicotinamide adenine dinucleotide (NADH); reduced nicotinamide adenine dinucleotide phosphate (NADPH); flavin adenine dinucleotide (FAD); and flavin adenine mononucleotide (FMN).

Abstract: It is intended to realize a modular soft robot having a high degree of freedom of movement. A voxel 10 constituting at least a portion of a robot comprises: a polyhedral-shaped casing 100 contractable according to discharge of a working fluid from an internal space thereof; and a deformation-regulating member 200 housed in the casing 100 and configured to regulate deformation of the voxel 10 when the working fluid in the casing 100 is discharged, wherein a plurality of the voxels 10 can be coupled together to constitute at least a portion of a robot.

Abstract: The invention provides a metabolism improving agent containing a rare fatty acid such as hydroxylated fatty acid, oxo fatty acid and the like, and further, food, pharmaceutical product and the like containing the metabolism improving agent.

Abstract: When a vehicle and a smartphone are in a second communication state, the vehicle can operate, and then if the vehicle and the smartphone are not in the second communication state for a predetermined time or longer, and if a main switch of the vehicle detects a predetermined operation, an emergency advertising is transmitted from the vehicle. Thereby, the smartphone can be used as a key that can receive the emergency information from the vehicle. By enabling the smartphone to be used as a key for the vehicle, it is possible to popularize a smartphone that can be used as a key for the vehicle.

Abstract: A technique capable of adjusting an etching selectivity ratio of an oxide film to a nitride film is provided. A substrate processing method includes: (a) preparing a substrate having a first region where a nitride film is formed and a second region where an oxide film is formed; (b) exposing the substrate to a plasma generated from a first processing gas containing hydrogen gas and oxygen gas; (c) supplying a second processing gas containing a fluorine-containing gas and a basic gas to the substrate; (d) performing the (b) and the (c) in this order a first number of times; and (e) thermally treating the substrate after the (d).

Abstract: A technique capable of controlling the etching amount of a nitride film is provided. A substrate processing method includes: (a) preparing a substrate having a nitride film on a surface thereof; (b) exposing the substrate to a plasma generated from a first processing gas containing hydrogen gas and oxygen gas; (c) supplying a second processing gas containing a fluorine-containing gas and a basic gas to the substrate; (d) performing the (b) and the (c) in this order a first number of times; and (e) thermally treating the substrate after the (d).

Abstract: A film forming method includes: (a) preparing a substrate having a recess in a surface thereof; (b) forming a silicon nitride film in the recess; (C) forming an amorphous silicon film in the recess; (d) removing the amorphous silicon film; and (e) filling the recess with the silicon nitride film after the (d) removing the amorphous silicon film. The amorphous silicon film is formed such that step coverage of the amorphous silicon film is lower than step coverage of the silicon nitride film, and the (c) forming the amorphous silicon film is performed one or more times during the (b) forming the silicon nitride film.

Abstract: To provide a technique capable of controlling film properties, a film forming method according to one embodiment of the present disclosure includes: forming a SiCN layer on a substrate using a first silicon raw material and a first nitriding agent; forming a SiN layer on the SiCN layer using a second silicon raw material and a second nitriding agent; and forming a laminate film in which the SiCN layer and the SiN layer are laminated, by repeating the forming of the SiCN layer and the forming of the SiN layer. The first silicon raw material contains a Si—C—Si bond.

Abstract: A film deposition apparatus includes a processing vessel, a first nozzle having a first gas hole for injecting a first processing gas, a second nozzle having a second gas hole for injecting a second processing gas, a shutter to move between positions, a driving source to move the shutter, and a controller to control the driving source. The positions include a first position where the shutter does not cover the first gas hole but covers the second gas hole, and a second position where the shutter covers the first gas hole but does not cover the second gas hole. The controller controls the driving source to move the shutter to the first position when the first processing gas is injected from the first nozzle, and to the second position when the second processing gas is injected from the second nozzle.

Abstract: When a vehicle and a smartphone are in a second communication state, the vehicle can operate, and then if the vehicle and the smartphone are not in the second communication state for a predetermined time or longer, and if a main switch of the vehicle detects a predetermined operation, an emergency advertising is transmitted from the vehicle. Thereby, the smartphone can be used as a key that can receive the emergency information from the vehicle. By enabling the smartphone to be used as a key for the vehicle, it is possible to popularize a smartphone that can be used as a key for the vehicle.

Abstract: A method for producing a hydroxylated fatty acid by a hydration reaction using a novel enzyme derived from the genus Clostridium in the soil and using fatty acid as a substrate is provided by the present invention. In addition, a novel rare fatty acid with utility value which is obtained by the production method is also provided.

Abstract: A vehicle control system includes: a vehicle including an operation device; a first communication device; and a second communication device. In a case in which the first communication device is positioned in a first area containing a position of the vehicle, the vehicle operates in an operation waiting state in which the operation device is allowed to receive an operation. In a case in which the second communication device is positioned in a second area contained in the first area and smaller than the first area, the vehicle operates in the operation waiting state. In a case in which the first communication device is positioned in the first area and the second communication device is positioned in the second area, the second communication device generates a notification indicating that the vehicle is in the operation waiting state.

Abstract: In a mask pattern forming method, a resist film is formed over a thin film, the resist film is processed into resist patterns having a predetermined pitch by photolithography, slimming of the resist patterns is performed, and an oxide film is formed on the thin film and the resist patterns after an end of the slimming step in a film deposition apparatus by supplying a source gas and an oxygen radical or an oxygen-containing gas. In the mask pattern forming method, the slimming and the oxide film forming are continuously performed in the film deposition apparatus.

Abstract: A vehicle wireless communication system includes: a vehicle including an output circuit; and first and second communication devices configured to wirelessly communicate with the vehicle. In a case in which the first communication device is positioned in a first area including one point located inside the vehicle, the use of the vehicle is permitted. In a case in which the first communication device is positioned in a second area including the one point and the second communication device is not positioned in a third area including the one point, the output circuit outputs a notification that there is a possibility of failure to carry the second communication device. In a case in which the first communication device is positioned in the second area and the second communication device is positioned in the third area, the output circuit of the vehicle does not output the notification.

Abstract: A vehicle control system includes: a vehicle including an operation device; a first communication device; and a second communication device. In a case in which the first communication device is positioned in a first area containing a position of the vehicle, the vehicle operates in an operation waiting state in which the operation device is allowed to receive an operation. In a case in which the second communication device is positioned in a second area contained in the first area and smaller than the first area, the vehicle operates in the operation waiting state. In a case in which the first communication device is positioned in the first area and the second communication device is positioned in the second area, the second communication device generates a notification indicating that the vehicle is in the operation waiting state.