Abstract: A substrate having a plurality of zones is polished and spectra are measured. For each zone, a first linear function fits a sequence of index values associated with reference spectra that best match the measured spectra. A projected time at which a reference zone will reach the target index value is determined based on the first linear function, and for at least one adjustable zone, a polishing parameter adjustment is calculated such that the adjustable zone has closer to the target index at the projected time than without such adjustment. The adjustment is calculated based on a feedback error calculated for a previous substrate. The feedback error for a subsequent substrate is calculated based on a second linear function that fits a sequence of index values associated with reference spectra that best match spectra measured after the polishing parameter is adjusted.

Abstract: A computer-implemented method of generating reference spectra includes polishing a first substrate in a polishing apparatus having a rotatable platen, measuring a sequence of spectra from the substrate during polishing with an in-situ monitoring system, associating each spectrum in the sequence of spectra with a index value equal to a number of platen rotations at which the each spectrum was measured, and storing the sequence of spectra as reference spectra.

Abstract: Systems, methods, and other embodiments associated with programmable application specific integrated circuit (ASIC) fault injection are described. One example ASIC includes a serializer de-serializer (SERDES). The example ASIC may also include logics to process data in the ASIC. At least one of the logics either receives data from the SERDES and/or provides data to the SERDES. The example ASIC may also include an embedded fault injection logic (EFIL) to control injection of a fault to a path (e.g., data, control) associated with at least one of the logics. The example ASIC may also include an embedded set of multiplexers (ESOMs) controlled by the EFIL. The ESOMs are controllable by the EFIL to inject a fault signal to the data path.

Abstract: Embodiments described herein use closed-loop control (CLC) of conditioning sweep to enable uniform groove depth removal across the pad, throughout pad life. A sensor integrated into the conditioning arm enables the pad stack thickness to be monitored in-situ and in real time. Feedback from the thickness sensor is used to modify pad conditioner dwell times across the pad surface, correcting for drifts in the pad profile that may arise as the pad and disk age. Pad profile CLC enables uniform reduction in groove depth with continued conditioning, providing longer consumables lifetimes and reduced operating costs.

Abstract: A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

Abstract: A substrate processing system includes a processing module to process a substrate, a factory interface module configured to accommodate at least one cassette for holding the substrate, a spectrographic monitoring system positioned in or adjoining the factory interface module, and a substrate handler to transfer the substrate between the at least one cassette, the spectrographic monitoring system and the processing module.

Abstract: Method and apparatus for operating for operating an Institute of Electrical and Electronics Engineers (IEEE) Standard 1149.1 compliant Joint Test Action Group (JTAG) Test Access Port (TAP) controller are disclosed. An example apparatus includes write logic that is configured to operationally interface with a TAP controller and a processor. The write logic is further configured to receive, from the processor, data for initializing the apparatus and operating the TAP controller, convert at least a portion of the data from a parallel format to a serial format and communicate the converted data to the TAP controller.

Abstract: A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.

Abstract: A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.

Abstract: A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

Abstract: Systems, methods, and other embodiments associated with programmable application specific integrated circuit (ASIC) fault injection are described. One example ASIC includes a serializer de-serializer (SERDES). The example ASIC may also include logics to process data in the ASIC. At least one of the logics either receives data from the SERDES and/or provides data to the SERDES. The example ASIC may also include an embedded fault injection logic (EFIL) to control injection of a fault to a path (e.g., data, control) associated with at least one of the logics. The example ASIC may also include an embedded set of multiplexers (ESOMs) controlled by the EFIL. The ESOMs are controllable by the EFIL to inject a fault signal to the data path.

Abstract: A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber.

Abstract: A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

Abstract: A method and apparatus to regulate voltage used to power an ASIC comprising an ASIC having a signal source and a modulator. The modulator establishes a characteristic of a signal created by the signal source to indicate a voltage level to be used to power the ASIC. The signal is communicated to a voltage regulator to apply an optimal voltage to the ASIC.

Abstract: Method and apparatus for operating for operating an Institute of Electrical and Electronics Engineers (IEEE) Standard 1149.1 compliant Joint Test Action Group (JTAG) Test Access Port (TAP) controller are disclosed. An example apparatus includes write logic that is configured to operationally interface with a TAP controller and a processor. The write logic is further configured to receive, from the processor, data for initializing the apparatus and operating the TAP controller, convert at least a portion of the data from a parallel format to a serial format and communicate the converted data to the TAP controller.

Abstract: A wireless communication system capable of sharing system resource includes a wireless communication device for performing a first wireless communication function, and a plurality of electronic devices each including an interface for coupling the wireless communication device by means of plug and play, an operating unit for performing a function of each electronic device, a wireless communication unit for performing a second wireless communication function, a detection unit coupled to the interface for detecting whether the wireless communication device is coupled to the interface, and a control unit coupled to the detection unit and the operating unit for controlling the operating unit to perform the first communication function via the interface according to a detection result provided by the detection unit.

Abstract: An input method for a touch panel includes displaying a plurality of selecting objects each corresponding to a control signal, enlarging the plurality of neighboring selecting objects in the plurality of selecting objects when the plurality of neighboring selecting objects in the plurality of selecting objects are selected, receiving a direction indication signal corresponding to a direction toward to a first selecting object of the plurality of neighboring selecting objects from a first position, and outputting a control signal corresponding to the first selecting objects according to the direction indication signal.

Abstract: A method for identifying persons with increased risk of developing type 2 diabetes mellitus utilizing selected biomarkers described hereafter either alone or in combination. The present invention allows for broad based, reliable, screening of large population bases and provides other advantages, including the formulation of effective strategies for characterizing, archiving, and contrasting data from multiple sample types under varying conditions.

Abstract: A computer implemented method includes obtaining at least one current spectrum with an in-situ optical monitoring system, comparing the current spectrum to a plurality of different reference spectra, and determining based on the comparing whether a polishing endpoint has been achieved for the substrate having the outermost layer undergoing polishing. The current spectrum is a spectrum of light reflected from a substrate having an outermost layer undergoing polishing and at least one underlying layer. The plurality of reference spectra represent spectra of light reflected from substrates with outermost layers having the same thickness and underlying layers having different thicknesses.

Abstract: A method for obtaining Internet radio resources based on Session Initiation Protocol (SIP) is adapted for use between an administrator server and at least one client terminal. The method includes the following steps: (a) enabling the client terminal and the administrator server to set up a tunnel based on the SIP; (b) enabling the client terminal to send a SIP message requesting radio station data to the administrator server through the tunnel; and (c) enabling the administrator server to provide the radio station data to the client terminal through the tunnel. Since SIP has very good flexibility and functionality, obtaining Internet radio resources based on the SIP can overcome inconveniences associated with searching by the user.