Abstract: A beam space-charge compensation device is applied to an angular energy filter provided in an ion beam processing system that performs processing by irradiating onto a wafer with an ion beam. The beam space-charge compensation device comprises a plasma shower provided in a beam-guiding chamber of the angular energy filter. The plasma shower comprises an arc chamber having a filament for generating thermo-electrons for plasma. The arc chamber comprises an extraction hole for extracting the thermo-electrons. The plasma shower is arranged such that the extraction hole is located on lines of magnetic force, perpendicular to an ion beam advancing direction, of the magnetic field and that a center axis of the filament and a center axis of said extraction hole coincide with the lines of magnetic force, perpendicular to the ion beam advancing direction, of the magnetic field.

Abstract: An article acquisition game apparatus includes a storage unit storing articles, and an article transferring unit enabling a player to hold the articles in the storage unit and transfer the articles to a predetermined transfer position when the player operates an operation input unit. The game apparatus comprises a distributing unit dividing the articles transferred to the transfer position into two or more groups, a first accumulation unit accumulating at least one group of the articles divided by the distributing unit, an article disbursement unit allowing the player to take out at least one group of the articles other than those accumulated by the first accumulation unit, an operating information generating unit generating operating information based on predetermined conditions, and an ejecting unit ejecting the articles accumulated by the first accumulation unit, to the article disbursement unit, based on the operating information.

Abstract: A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.

Abstract: A prize-capturing game apparatus 10 comprises a prize storage portion 14 in which a prize 18 is stored. A drop inlet 26 for dropping the prize 18 gripped by a movable body 24 is disposed on the prize storage portion 14. The drop inlet 26 is opened or closed by a shutter 74 of a mechanism 37 for opening and closing the drop inlet. A prize deposit room 30 is disposed below the drop inlet 26 and an outlet 32 for taking out the prize 18 is disposed on a front face of the prize deposit room 30. The outlet 32 is opened and closed by the prize outlet door 34. During a game, the shutter 74 opens the drop inlet 26 to receive the drop of the prize 18 and the prize outlet door 34 is locked in a closed position using a locking mechanism 62. After the game, the shutter 74 closes the drop inlet 26 and a lock of the prize outlet door 34 using the door locking mechanism 62 is released.

Abstract: A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.

Abstract: Each of game data storage parts (40), in which, while a replication of game data is created, and an item can be used on the basis of different game data, it is possible to prevent the item from increasing by the replication, stores original item data relating to an original item and replica item data relating to a replica item. Besides, a replication part (54) stores game data into a replication target on the basis of game data stored in a replication source so that a sum of the number of original items relating to the original item data stored in the game data storage part (40) of the replication source and the number of replica items relating to the replica item data stored in the game data storage part (40) becomes the number of replica items relating to the replica item data stored in the game data storage part (40) of the replication target. At this time, link data to correlate the replication target with the replication source is also stored.

Abstract: A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.

Abstract: A beam space-charge compensation device is applied to an angular energy filter provided in an ion beam processing system that performs processing by irradiating onto a wafer with an ion beam. The beam space-charge compensation device comprises a plasma shower provided in a beam-guiding chamber of the angular energy filter. The plasma shower comprises an arc chamber having a filament for generating thermo-electrons for plasma. The arc chamber comprises an extraction hole for extracting the thermo-electrons. The plasma shower is arranged such that the extraction hole is located on lines of magnetic force, perpendicular to an ion beam advancing direction, of the magnetic field and that a center axis of the filament and a center axis of said extraction hole coincide with the lines of magnetic force, perpendicular to the ion beam advancing direction, of the magnetic field.

Abstract: In an irradiation system with an ion beam/charged particle beam having an energy filter, the energy filter is formed by deflection electrodes and a deflection magnet which can be switchingly used. The deflection magnet has a general window-frame shape and is formed with a hollow portion at its center. The deflection electrodes are installed, along with suppression electrodes, in a vacuum chamber arranged in the hollow portion of the deflection magnet. The deflection electrodes are installed with respect to the deflection magnet such that a deflection trajectory of a beam caused by a magnetic field and a deflection trajectory of a beam caused by an electric field overlap each other. Since the deflection electrodes and the deflection magnet can be switchingly used, the system can deal with a wider range of beam conditions and thus is widely usable.

Abstract: A charge compensation device according to this invention is for suppressing charging of a wafer when the wafer is irradiated with a beam from a beam generation source unit. The charge compensation device comprises at least one first arc chamber having at least one first extraction hole and a second arc chamber having at least one second extraction hole faced on the reciprocal swinging beam of the predetermined scan range. A first arc voltage is applied to the first arc chamber to generate first plasma in the first arc chamber. The generated first plasma is extracted from the first arc chamber and introduced into the second arc chamber. Second plasma is produced in the second arc chamber, and second extracted plasma from the second arc chamber forms a plasma bridge between the second extraction hole and the reciprocal swinging beam.

Abstract: A camera which maintains accuracy of stop position in accordance with the state of an image-taking optical system and allows driving of a focus lens to a target position in a short time period, is disclosed. The camera comprises a motor which drives the focusing lens, and a controller which controls the motor such that the focusing lens is stopped at the target position by performing deceleration control in accordance with a predetermined deceleration control pattern. The controller changes the deceleration control pattern in accordance with the state of the image-taking optical system detected by the state detector.

Abstract: A method of controlling a mover device that includes: a fixed base; a movable base that is moveable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; and a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base, includes the steps of: generating a moving force from the moving force generating unit to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the mov

Abstract: A camera which maintains accuracy of stop position in accordance with the state of an image-taking optical system and allows driving of a focus lens to a target position in a short time period, is disclosed. The camera comprises a motor which drives the focusing lens, and a controller which controls the motor such that the focusing lens is stopped at the target position by performing deceleration control in accordance with a predetermined deceleration control pattern. The controller changes the deceleration control pattern in accordance with the state of the image-taking optical system detected by the state detector.

Abstract: A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.

Abstract: There is disclosed a camera system capable of reducing a time after a lens drive command is output until a lens is driven. A camera system according to the present invention comprises a lens apparatus having a booster circuit for boosting a supply voltage and an actuator for receiving a voltage supply from the booster circuit so as to drive a lens unit, and a camera. A camera controller transmits a booster drive command and a lens drive command to the lens controller. The lens controller drives the booster circuit in response to a reception of the booster drive command, and drives the actuator in response to a reception of the lens drive command.

Abstract: A vibration correction apparatus has a motion vector detection circuit for detecting a motion vector signal at a predetermined sampling period, a signal processing circuit for calculating a correction target value in accordance with the motion vector signal detected by the motion vector detection circuit, a correction system for correcting a motion in accordance with the correction target value, and a control circuit for generating a new correction target value through interpolation of the correction target value, shortening a correction period of correction by the correction system shorter than a sampling period of the motion vector, and making the period of correction by the correction system variable with each image pickup system.

Abstract: There is disclosed a camera system capable of reducing a time after a lens drive command is output until a lens is driven. A camera system according to the present invention comprises a lens apparatus having a booster circuit for boosting a supply voltage and an actuator for receiving a voltage supply from the booster circuit so as to drive a lens unit, and a camera. A camera controller transmits a booster drive command and a lens drive command to the lens controller. The lens controller drives the booster circuit in response to a reception of the booster drive command, and drives the actuator in response to a reception of the lens drive command.

Abstract: A position control device arranged to store a stop position of a movable lens member and, after the lens member is moved from the stop position to an arbitrary position, to automatically move the lens member to the stored stop position includes a first encoder which divides a movable range of the lens member into a plurality of areas and detects one of the areas in which the stored stop position is located and a second encoder which outputs pulses according to the movement of the lens member at a finer rate of resolution than the resolution of the first encoder. In the position control device, information on the area detected by the first encoder and the number of pulses detected by the second encoder as a position within the detected area is stored as the information on the stored stop position. The position control device compares the output of the first encoder and that of the second encoder with the stored information in moving the lens member to the stored stop position.

Abstract: An optical apparatus includes an actuator for driving an optical function member of an interchangeable lens, a storage part (memory) storing a plurality of driving patterns for the actuator in advance, and a controller for controlling the actuator to perform driving using one of the plurality of driving patterns stored in the storage part (memory). The controller selects one of the plurality of driving patterns from the storage part (memory) in accordance with the type of image pickup apparatus on which the interchangeable lens is mounted.

Abstract: An apparatus for producing a metallic ribbon includes a cooling roll, a melt nozzle, and an air-cutoff unit provided to cover at least a portion of the periphery of the cooling roll and at least the melt blowout end of the melt nozzle, for preventing an inflow of air due to rotation of the cooing roll. The air-cutoff unit has a roll top air-cutoff plate provided above the cooling roll to extent from the front side to the rear side in the rotation direction of the cooling roll in such a manner that it approaches the cooling surface in the direction opposite to the rotation direction of the cooling roll. The melt blowout end of the melt nozzle is arranged to pass through a nozzle mounting hole provided in the roll top air-cutoff plate and face the cooling surface of the cooling roll.