Abstract: A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

Abstract: The invention has an object to provide a regenerator and cryogenics pump using a regenerator material which fulfills such requirements as specific heat, thermal conductivity, manufacturing easiness, strength, hardness, chemical stabilization and low cost instead of Pb which is environmentally harmful. In a regenerator 14 which contains regenerator material 16 in an internal path for refrigerant, and in which heat is exchanged between the helium gas as refrigerant, and regenerator material, regenerator material 16 is any one of Sn, Bi—Sn alloy and Ag—Sn alloy. The regenerator material 16 is spherical. Plural spheres are packed in the internal path of the regenerator 14.

Abstract: A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

Abstract: To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y).

Abstract: To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.

Abstract: A printing apparatus free from contamination of dust into a coated layer is provided. A printing apparatus of this application includes a first ejecting head and a printing head. The first ejecting head is located on a leading side in a moving direction D of the printing head. Since electric charge is removed from an object to be printed and dust is removed therefrom, by blowing an electric charge-removing gas through the first ejecting head before an ink lands on the object to be printed, dust does not contaminate a coated layer. In addition, since a suction hole is arranged between an ejecting hole and a nozzle zone, a stream of the electric charge-removing gas is not formed in the nozzle zone, and thus a meniscus of nozzles is not disturbed.

Abstract: According to a first invention, since a flow of a spacer dispersed liquid is formed in a transporting chamber separated from a discharging chamber by an internal filter, the spacer dispersed liquid is stably discharged through an ejection hole, while the discharging chamber on a side of a nozzle plate is not affected by the flow of the spacer dispersed liquid. According to a second invention, since a spacer dispersed liquid does not flow inside a discharging chamber in a printing state in which the spacer dispersed liquid is discharged, the spacer dispersed liquid is stably discharged through an ejection hole. To the contrary, since the spacer dispersed liquid is directed inside both the discharging chamber and the transporting chamber in a waiting state in which the spacer dispersed liquid is not discharged, spacer particles in the spacer dispersed liquid do not settle.

Abstract: To provide a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrix 5 in the shape of lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of ink 7 are jetted onto each of the spacer forming positions on one of the opposite substrate E. The gap between the opposite substrates can be securely maintained at constant for filling liquid crystal.

Abstract: According to a first invention, since a flow of a spacer dispersed liquid is formed in a transporting chamber separated from a discharging chamber by an internal filter, the spacer dispersed liquid is stably discharged through an ejection hole, while the discharging chamber on a side of a nozzle plate is not affected by the flow of the spacer dispersed liquid. According to a second invention, since a spacer dispersed liquid does not flow inside a discharging chamber in a printing state in which the spacer dispersed liquid is discharged, the spacer dispersed liquid is stably discharged through an ejection hole. To the contrary, since the spacer dispersed liquid is directed inside both the discharging chamber and the transporting chamber in a waiting state in which the spacer dispersed liquid is not discharged, spacer particles in the spacer dispersed liquid do not settle.

Abstract: A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

Abstract: A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

Abstract: This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

Abstract: This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

Abstract: This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

Abstract: A magnetic field measurement system including a pick-up coil is not moved but fixed. Strips of superconducting material are arranged in a plane with narrow slits between the strips. The strips are moved very near the pick-up coil along the plane. From output variations of a SQUID magnetometer during the movement, a magnitude of a static field perpendicular to the plane of the strips is obtained.

Abstract: In a refrigerator having a compressor settled in a room temperature portion and an expander which is connected to the room temperature portion, a piston of the expander is settled in the room temperature portion and pressure variation at a low temperature portion is transferred to the piston through a gas column in a pipe connecting the room temperature portion and the low temperature portion.

Abstract: A head with a pick-up coil is attached to a supporter so that the head is freely movable along the direction perpendicular to the surface of a superconductor. Fluid spouted from the spout hole of the head maintains the height (gap space) of the head from the surface. The head is firmly fixed to the supporter in the direction along the surface. Since the relative position of the head in the direction along the surface of the superconductor is changable by drive means for moving the superconductor or the head, the distribution of the magnetic flux which is trapped in the superconductor is measured by scanning the surface of the superconductor with pick-up coil.

Abstract: A wafer transferring hand is so constructed that at least three seats made of a soft low-friction material are provided in an integral manner, a groove having a width slightly wider than the thickness of the wafer is formed in the laterally arranged seats, the bottom of the groove being arcuated in a manner conforming to the periphery of the wafer, while a similar groove having an adjustable width is provided in the seat arranged at the center, the bottom of the groove being spaced apart outwardly from the periphery of the wafer, and at least two cut-away portions are provided between the seats so as to provide a gap between the periphery of the wafer and the bottom of the cut-away portion.