Abstract: The present invention relates to a payment system for displaying a subscriber's setting image, which can induce immersion and interest during payment by displaying a personalized image set by a customer in real time through a built-in display or an external display of a payment terminal while payment is being performed.

Abstract: Proposed is a substrate support unit, a method of manufacturing the same, and a substrate processing apparatus including the same. The substrate support unit includes a base component, a chucking component mounted on the base component, and an intermediate layer interposed between the base component and the chucking component, wherein the intermediate layer includes a joining part formed in a partial region to couple the base component and the chucking component.

Abstract: A frequency multiplier is provided. A harmonic generator of the frequency multiplier comprises: a harmonic generating core unit; a first resonant tank which is connected to a first output terminal and a second output terminal of the harmonic generating core unit; and a first feedback circuit which is connected to the first output terminal and the second output terminal of the harmonic generating core unit to change the effective resistance of the first resonant tank.

Abstract: Disclosed are a showerhead assembly and a substrate processing apparatus including the same. The showerhead assembly includes an upper plate including a gas inlet hole formed therein, a gas distribution plate disposed beneath the upper plate, and a shower plate disposed beneath the gas distribution plate and including gas spray holes formed therein. The gas distribution plate includes a gas distribution channel formed therein so as to communicate with the gas inlet hole.

Abstract: An air conditioner includes an evaporator through which a refrigerant circulates, an expansion valve, a compressor, an evaporative condenser, and a water supply module configured to spray water into the evaporative condenser, wherein the water supply module includes a supply line connected to a water supply source and including a supply valve configured to open and close a passage through which water is supplied from the water supply source; a discharge unit connected to one end of the supply line and including a water nozzle configured to supply water to the evaporative condenser; a control unit connected to the supply valve, wherein, when the compressor stops driving, the control unit opens the supply valve in every first determination time period and supplies water to the water nozzle for a predetermined period of time.

Abstract: Disclosed are an electrostatic chuck capable of precisely controlling the temperature of a peripheral area of a substrate and a plasma processing apparatus including the same. The electrostatic chuck configured to support a substrate in a plasma processing apparatus includes a plate configured to support the substrate using electrostatic force and having a disc shape, a first partition wall formed in an annular shape on a peripheral portion of the plate, a second partition wall formed in an annular shape at a position farther inward than the first partition wall on the peripheral portion of the plate, and a connection partition wall configured to interconnect the first partition wall and the second partition wall to partition the peripheral portion of the plate into a plurality of peripheral areas.

Abstract: Disclosed are an electrostatic chuck capable of preventing deformation of a bonding layer and damage to a lift pin, a method of manufacturing the electrostatic chuck, and a plasma processing apparatus. The electrostatic chuck configured to support a substrate and to receive a lift pin so that the lift pin is ascendable and descendable therein includes at least one pin hole formed vertically therethrough to allow the lift pin to ascend and descend along the pin hole, a ceramic puck configured to allow the substrate to be seated thereon, a base plate configured to support the ceramic puck, a bonding layer configured to bond the ceramic puck to the base plate, and an insulating pipe mounted on an inner side wall of the pin hole. The insulating pipe includes an upper insulating pipe bonded to the ceramic puck and a lower insulating pipe adhered to the base plate.

Abstract: A carbon dioxide separation and recovery system includes an exhaust gas sensible heat recovery part which recovers sensible heat of exhaust gas and generates electric energy by using the sensible heat of the recovered exhaust gas; a moisture removal part which is connected to the exhaust gas sensible heat recovery part and removes moisture contained in the sensible heat recovery exhaust gas from which the sensible heat is recovered by using the electric energy generated in the exhaust gas sensible heat recovery part; and a separation part which is connected to the moisture removal part to receive the sensible heat recovery exhaust gas from which moisture is removed by the moisture removal part, and separates solid carbon dioxide from the sensible heat recovery exhaust gas from which moisture is removed.

Abstract: Proposed are an electrostatic chuck, a plasma processing method, and a plasma processing apparatus for preventing abrupt temperature changes in a substrate and maintain a constant temperature. The electrostatic chuck that supports a substrate in the plasma processing apparatus includes a puck on which a substrate for plasma processing is seated and having a heater, and a base plate located below the puck and having a cooling passage through which fluid for cooling flows. A temperature maintenance layer composed of a phase change material is provided inside the base plate.

Abstract: A substrate support unit including a Q-pad capable of minimizing fastening pressure variations that may be caused by heat and a substrate treating apparatus including the substrate support unit are provided. The substrate treating apparatus includes: a chamber housing; a substrate support unit supporting a substrate within the chamber housing; a showerhead unit providing a process gas into the chamber housing; and a plasma generation unit generating plasma for treating the substrate within the chamber housing using the process gas, wherein the substrate support unit includes a base plate, a dielectric layer, which is disposed on the base plate, and a thermal transfer pad, which is disposed between the base plate and the dielectric layer and bonds the base plate and the dielectric layer together, and the thermal transfer pad includes a plurality of corrugated patterns.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus of the present invention comprises a support unit provided in a processing space for processing a substrate and for supporting the substrate, wherein the support unit comprises a puck having a first thermal conductivity and having a concave groove formed thereon; and a block provided in the concave groove and having a second thermal conductivity different from the first thermal conductivity.

Abstract: A redundancy dynamic braking system may include: a main braking force adjusting device configured to control a hydraulic braking device of a vehicle; a receiving unit configured to receive driving information of the vehicle; an electronic control braking device configured to be operated electrically to generate braking force; and an auxiliary braking force adjusting device configured to control the hydraulic braking device and the electronic control braking device, in an event of a failure in the main braking force adjusting device, wherein the auxiliary braking force adjusting device is configured to control the electronic control braking device by adjusting a magnitude and an application time of a current applied to the electronic control braking device based on an estimated target pressure using the driving information.

Abstract: A frequency multiplier is provided. A harmonic generator of the frequency multiplier comprises: a harmonic generating core unit; a first resonant tank which is connected to a first output terminal and a second output terminal of the harmonic generating core unit; and a first feedback circuit which is connected to the first output terminal and the second output terminal of the harmonic generating core unit to change the effective resistance of the first resonant tank.

Abstract: An electrostatic chuck of the present invention includes a top block and a bottom block bonded by a bonding layer. The top block has a first plate on which a chucking electrode and a heater are installed, and the bottom block is provided with a cooling member. A second plate made of a material having lower heat transfer rate than the first plate is disposed between the first plate and the bottom block. Accordingly, when the heater is heated at a high temperature, it is possible to prevent the bonding layer from being damaged by thermal impact.

Abstract: Proposed is a substrate support unit, a method of manufacturing the same, and a substrate processing apparatus including the same. The substrate support unit includes a base component, a chucking component mounted on the base component, and an intermediate layer interposed between the base component and the chucking component, wherein the intermediate layer includes a joining part formed in a partial region to couple the base component and the chucking component.

Abstract: A neural processing system includes a first frontend module, a second frontend module, a first backend module, and a second backend module. The first frontend module executes a feature extraction operation using a first feature map and a first weight, and outputs a first operation result and a second operation result. The second frontend module executes the feature extraction operation using a second feature map and a second weight, and outputs a third operation result and a fourth operation result. The first backend module receives an input of the first operation result provided from the first frontend module and the fourth operation result provided from the second frontend module via a second bridge to sum up the first operation result and the fourth operation result.

Abstract: A neural processing system includes a first frontend module, a second frontend module, a first backend module, and a second backend module. The first frontend module executes a feature extraction operation using a first feature map and a first weight, and outputs a first operation result and a second operation result. The second frontend module executes the feature extraction operation using a second feature map and a second weight, and outputs a third operation result and a fourth operation result. The first backend module receives an input of the first operation result provided from the first frontend module and the fourth operation result provided from the second frontend module via a second bridge to sum up the first operation result and the fourth operation result.

Abstract: A neural processing system includes a first frontend module, a second frontend module, a first backend module, and a second backend module. The first frontend module executes a feature extraction operation using a first feature map and a first weight, and outputs a first operation result and a second operation result. The second frontend module executes the feature extraction operation using a second feature map and a second weight, and outputs a third operation result and a fourth operation result. The first backend module receives an input of the first operation result provided from the first frontend module and the fourth operation result provided from the second frontend module via a second bridge to sum up the first operation result and the fourth operation result.

Abstract: A scent visualization system may comprise a display apparatus for generating a target image including a target object; an olfactory sensor for detecting a scent; and a scent visualization apparatus for generating target associative visualization information that reminds the scent from the target image received from the display apparatus and sensing information received from the olfactory sensor, and generating an associative image by combining the target associative visualization information and the target image. Therefore, a low-cost, high-efficiency, high-utilization, and high-convenience scent visualization system can be provided.

Abstract: A sensory substitution method includes obtaining a color image by using a sensor device, converting color information about the color image, received from the sensor device, into tactile information by using a user terminal, and generating a tactile stimulus corresponding to the tactile information received from the user terminal by using a tactile output device.