Abstract: The present invention controls a device that constitutes the cause of disturbance and improves accuracy during the use of a prescribed device. A server provided with: a storage unit for storing reservation information for using a first device that includes information corresponding to the start date/time and end date/time of use of the first device; and a processing unit for transmitting, to a control terminal that controls a second device, a first indication for placing the second device into a prescribed state when the start date/time based on the reservation information stored in the storage unit is reached, and transmitting, to the control terminal, a second indication for placing the second device into a state prior to the start date/time when the end date/time based on the reservation information stored in the storage unit is reached.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An on-line diagnostic system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostics systems comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment formation is decrypted using the common key, and the decrypted equipment information is outputted.

Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An on-line diagnostics system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostic system comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment information is decrypted using the common key, and the decrypted equipment information is outputted.

Abstract: An on-line diagnostics system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostics system comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment information is decrypted using the common key, and the decrypted equipment information is outputted.

Abstract: AN on-line diagnostic system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostics systems comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment formation is decrypted using the common key, and the decrypted equipment information is outputted.

Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.

Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.

Abstract: A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state.

Abstract: A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.

Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. Judgment can be made at the time of performing the device maintenance operation and the device repairing operation.

Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.

Abstract: A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. Judgment can be made at the time of performing the device maintenance operation and the device repairing operation.

Abstract: A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.