Patents by Inventor Juntaro Arima
Juntaro Arima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20050109937Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.Type: ApplicationFiled: September 3, 2004Publication date: May 26, 2005Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
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Patent number: 6862485Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: GrantFiled: July 17, 2002Date of Patent: March 1, 2005Assignee: Hitachi, Ltd.Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20050038545Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: September 20, 2004Publication date: February 17, 2005Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20050038546Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: September 20, 2004Publication date: February 17, 2005Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20050033465Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: September 20, 2004Publication date: February 10, 2005Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Patent number: 6803573Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.Type: GrantFiled: July 10, 2003Date of Patent: October 12, 2004Assignee: Hitachi, Ltd.Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
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Patent number: 6792325Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: GrantFiled: July 17, 2002Date of Patent: September 14, 2004Assignee: Hitachi, Ltd.Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20040078946Abstract: A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.Type: ApplicationFiled: October 22, 2003Publication date: April 29, 2004Inventors: Shigeru Nakamoto, Hideaki Kondo, Juntaro Arima
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Patent number: 6708072Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: GrantFiled: February 25, 2002Date of Patent: March 16, 2004Assignee: Hitachi, Ltd.Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20040016882Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a finction for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.Type: ApplicationFiled: July 10, 2003Publication date: January 29, 2004Applicant: Hitachi, Ltd,Inventors: Satoru Yamaguchi, Takashi Ilzumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
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Publication number: 20030226010Abstract: An on-line diagnostics system and method enable equipment information stored in each piece of industrial equipment to be safely disclosed to maintenance personnel to the extent permitted by the user of the industrial equipment. The on-line diagnostics system comprises industrial equipment and a maintenance apparatus for the maintenance of the industrial equipment, which are connected via the Internet. Equipment information indicating the state of the industrial equipment is encrypted using a specific common key, and the encrypted equipment information is transmitted to the maintenance apparatus in response to a request therefrom. The fact that the common key has been transmitted from the industrial equipment to the maintenance apparatus is outputted. After receiving the encrypted equipment information and the common key that have been transmitted, the encrypted equipment information is decrypted using the common key, and the decrypted equipment information is outputted.Type: ApplicationFiled: May 22, 2003Publication date: December 4, 2003Inventors: Juntaro Arima, Takashi Iizumi, Masaaki Inaba
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Patent number: 6627888Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.Type: GrantFiled: February 23, 2001Date of Patent: September 30, 2003Assignee: Hitachi, Ltd.Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
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Publication number: 20030163217Abstract: A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.Type: ApplicationFiled: February 27, 2002Publication date: August 28, 2003Inventors: Shigeru Nakamoto, Hideaki Kondo, Juntaro Arima
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Publication number: 20030063123Abstract: A length-measuring SEM is a device which transports a wafer into a sample chamber held in a high vacuum and measures a line width and a hole diameter of a semiconductor device. Using the length-measuring SEM, the device state in vacuum can be easily grasped. The length-measuring SEM is applicable to other vacuum device. By visualizing the state of a driving system in vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, it is easy to grasp the device state in vacuum. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. With the provision of such functions, the proper judgement can be made at the time of performing the device maintenance operation and the device repairing operation.Type: ApplicationFiled: September 25, 2002Publication date: April 3, 2003Inventors: Hitoshi Fukube, Kenichiro Sonobe, Juntaro Arima
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Publication number: 20020183875Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: July 17, 2002Publication date: December 5, 2002Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20020183876Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: July 17, 2002Publication date: December 5, 2002Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20020183880Abstract: The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100.Type: ApplicationFiled: February 25, 2002Publication date: December 5, 2002Inventors: Juntaro Arima, Masaaki Inaba, Takeiki Aizono, Takashi Iizumi
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Publication number: 20010019109Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed.Type: ApplicationFiled: February 23, 2001Publication date: September 6, 2001Applicant: Hitachi, Ltd.Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
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Patent number: 4912328Abstract: An apparatus for improving the signal-to-noise ratio of a scan-type imaging system, in which an image portion which appears virtually periodically or regularly on contiguous scanning lines and a scanning line for which the improvement of signal-to-noise ratio is intended are specified using cursors, the positional differences on the image signal waveforms between the specified scanning line and scanning lines in the specified image portion are detected, and the image signal waveforms in the specified image portion are added by being shifted by the amount of detected positional differences, so that the signal-to-noise ratio of the image signal waveform of the specified scanning line is improved.Type: GrantFiled: September 7, 1988Date of Patent: March 27, 1990Assignee: Hitachi, Ltd.Inventors: Makoto Kato, Tetsuo Yokoyama, Juntaro Arima, Toshihiro Furuya
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Patent number: 4725730Abstract: A stereoscopic measuring method and system for measuring the sectional shape of a step formed object such as a semiconductor element carrying a resist and wiring on a wafer. The method and system comprises the steps of means for detecting the images of the step formed object from at least two directions so as to form pictures corresponding to the images detected from different directions, determining the distances D between the upper and lower edges of a step in respective pictures; determining the angles .theta. of inclination of the edge lines with respect to the axis of the pictures, determining the angles of inclination of the standard plane fixed to the step formed object with respect to the viewing directions, and determining, as significant factors of the shape to be determined, the height H and width W of the step formed object.Type: GrantFiled: August 28, 1985Date of Patent: February 16, 1988Assignee: Hitachi, Ltd.Inventors: Makoto Kato, Tetsuo Yokoyama, Juntaro Arima, Shimbu Yamagata, Toshihiro Furuya