Abstract: A form measuring device includes: a measuring unit configured to detect a height at each position in a reference axis direction of a measured object and measure a cross-sectional form of the measured object; and an arithmetic unit configured to synthesize a plurality of form measurement data, obtained by repeated measurements of the form of the same measured object by the measuring unit, and calculate synthesized form measurement data. In the synthesis of the form measurement data, the arithmetic unit is configured to calculate shift amounts in the reference axis direction and a height direction of the form measurement data with respect to the synthesized form measurement data and align the form measurement data in the reference axis direction and the height direction based on the calculated shift amount.

Abstract: A correction method for correcting measurement error in data obtained when a stylus tip of a measurement apparatus that moves following the height of a workpiece traces the workpiece along a measurement axis, the measurement error having occurred due to stylus movement in a plane defined by the measurement axis and height directions, the method includes a calibration measurement process of obtaining calibration measurement data that includes shift information on the position of the stylus tip, corresponding to the position of the stylus tip in the height directions while the stylus is moved in the correction target plane and a correction-parameter setting process obtaining a correction parameter value optimal to correct the shift information on the position of the stylus tip, included in the calibration measurement data, for each of the sectors obtained by dividing a measurement range in the height directions.

Abstract: A correction method for correcting measurement error in data obtained when a stylus tip of a measurement apparatus that moves following the height of a workpiece traces the workpiece along a measurement axis, the measurement error having occurred due to stylus movement in a plane defined by the measurement axis and height directions, the method comprising the step of: a calibration measurement process of obtaining calibration measurement data that includes shift information on the position of the stylus tip, corresponding to the position of the stylus tip in the height directions while the stylus is moved in the correction target plane; and a correction-parameter setting process of simultaneously obtaining a correction parameter value optimal to correct the shift information on the position of the stylus tip, included in the calibration measurement data, for each of the sectors obtained by dividing a measurement range in the height directions.

Abstract: A signal-processing method is disclosed, where, after inputting a measurement data, weighted spline formula is selected to calculate an initial value of a spline filter, weight is adjusted, a spline filter output is calculated, convergence is judged thereafter. When the weight is judged not converged, the weight is updated and the weight-adjustment and spline filter output calculation are repeated to conduct robust spline filtering on the measurement data.

Abstract: A signal-processing method is disclosed, where, after inputting a measurement data, weighted spline formula is selected to calculate an initial value of a spline filter, weight is adjusted, a spline filter output is calculated, convergence is judged thereafter. When the weight is judged not converged, the weight is updated and the weight-adjustment and spline filter output calculation are repeated to conduct robust spline filtering on the measurement data.