Patents by Inventor Kai-Chieh Chang
Kai-Chieh Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250164892Abstract: A method and system for optimizing scan speed of a lithography scanner. A process design layout corresponding to a plurality of rows of fields to be formed on an associated wafer is received and a default machine constant of the lithography scanner is determined. Each of the plurality of rows is then identified corresponding to the received process design layout. A scan speed for each determined type of row and the determined default machine constant is then determined. The associated wafer is then processed utilizing the determined scan speed for each of the plurality of rows in accordance with the process design layout.Type: ApplicationFiled: November 17, 2023Publication date: May 22, 2025Inventors: Kai-Chieh Chang, Che-Chang Hsu, Kai-Fa Ho, Li-Jui Chen
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Patent number: 12298672Abstract: Some implementations described herein provide an exposure tool and associated methods of operation in which a scanner control system generates a scanner route for an exposure recipe such that the distance traveled by a substrate stage of the exposure tool along the scanner route is reduced and/or optimized for non-exposure fields on a semiconductor substrate. In this way, the scanner control system increases the productivity of the exposure tool, reduces processing times of the exposure tool, and increases yield in a semiconductor fabrication facility in which the exposure tool is included.Type: GrantFiled: August 9, 2023Date of Patent: May 13, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen, Heng-Hsin Liu
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Patent number: 12265336Abstract: An exposure tool is configured to remove contaminants and/or prevent contamination of mirrors and/or other optical components included in the exposure tool. In some implementations, the exposure tool is configured to flush and/or otherwise remove contaminants from an illuminator, a projection optics box, and/or one or more other subsystems of the exposure tool using a heated gas such as ozone (O3) or extra clean dry air (XCDA), among other examples. In some implementations, the exposure tool is configured to provide a gas curtain (or gas wall) that includes hydrogen (H2) or another type of gas to reduce the likelihood of contaminants reaching the mirrors included in the exposure tool. In this way, the mirrors and one or more other components of the exposure tool are cleaned and maintained in a clean environment in which radiation absorbing contaminants are controlled to increase the performance of the exposure tool.Type: GrantFiled: August 27, 2021Date of Patent: April 1, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kai-Chieh Chang, Che-Chang Hsu, Yen-Shuo Su, Chun-Lin Chang, Kai-Fa Ho, Li-Jui Chen, Heng-Hsin Liu
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Patent number: 12219123Abstract: A method for rendering data of a three-dimensional image adapted to an eye position and a display system are provided. The method is used to render the three-dimensional image to be displayed in a three-dimensional space. In the method, a three-dimensional image data used to describe the three-dimensional image is obtained. The eye position of a user is detected. The ray-tracing information between the eye position and each lens unit of a multi-optical element module forms a region of visibility (RoV) that may cover a portion of the three-dimensional image in the three-dimensional space. When coordinating the physical characteristics of a display panel and the multi-optical element module, a plurality of elemental images can be obtained. The elemental images form an integral image that records the three-dimensional image data adapted to the eye position, and the integral image is used to reconstruct the three-dimensional image.Type: GrantFiled: July 8, 2021Date of Patent: February 4, 2025Assignee: LIXEL INC.Inventors: Chun-Hsiang Yang, Chih-Hung Ting, Kai-Chieh Chang, Hsin-You Hou, Chih-Wei Shih, Wei-An Chen, Kuan-Yu Chen
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Publication number: 20240411500Abstract: In some examples, a method includes dividing, by a first display device, video data into multiple buffers corresponding to regions of the video data. In some examples, the method includes receiving, by the first display device, an indicator from a second display device. In some examples, the method includes controlling, by the first display device, color processing of data of a first buffer of the multiple buffers based on the indicator to coordinate with the second display device.Type: ApplicationFiled: October 21, 2021Publication date: December 12, 2024Applicant: Hewlett-Packard Development Company, L.P.Inventors: Yi-Fan Lin, Kai-Chieh Chang, Li-Pang Liang
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Publication number: 20240385796Abstract: In some examples, a computing device includes a first video interface for a first monitor, a second video interface for a second monitor, and a processor. In some examples, the processor obtains a first monitor identification from the first monitor and obtains a second monitor identification from the second monitor. In some examples, the processor sends the first monitor identification and the second monitor identification to a color profile server. In some examples, the processor receives a first color profile and a second color profile from the color profile server. In some examples, the processor causes the first color profile and the second color profile to install on the computing device.Type: ApplicationFiled: September 16, 2021Publication date: November 21, 2024Applicant: Hewlett-Packard Development Company, L.P.Inventors: Yi Fan Lin, Kai-Chieh Chang, Li-Pang Liang
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Publication number: 20240385540Abstract: An exposure tool is configured to remove contaminants and/or prevent contamination of mirrors and/or other optical components included in the exposure tool. In some implementations, the exposure tool is configured to flush and/or otherwise remove contaminants from an illuminator, a projection optics box, and/or one or more other subsystems of the exposure tool using a heated gas such as ozone (O3) or extra clean dry air (XCDA), among other examples. In some implementations, the exposure tool is configured to provide a gas curtain (or gas wall) that includes hydrogen (H2) or another type of gas to reduce the likelihood of contaminants reaching the mirrors included in the exposure tool. In this way, the mirrors and one or more other components of the exposure tool are cleaned and maintained in a clean environment in which radiation absorbing contaminants are controlled to increase the performance of the exposure tool.Type: ApplicationFiled: July 26, 2024Publication date: November 21, 2024Inventors: Kai-Chieh CHANG, Che-Chang HSU, Yen-Shuo SU, Chun-Lin CHANG, Kai-Fa HO, Li-Jui CHEN, Heng-Hsin LIU
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Publication number: 20240385537Abstract: A reticle is pre-heated prior to an exposure operation of a semiconductor substrate lot to reduce substrate to substrate temperature variations of the reticle in the exposure operation. The reticle may be pre-heated while being stored in a reticle storage slot, while being transferred from the reticle storage slot to a reticle stage of an exposure tool, and/or in another location prior to being secured to the reticle stage for the exposure operation. In this way, the reduction in temperature variation of the reticle in the exposure operation provided by pre-heating the reticle may reduce overlay deltas and misalignment for the semiconductor substrates that are processed in the exposure operation. This increases overlay performance, increases yield of the exposure tool, and increases semiconductor device quality.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Kai-Chieh CHANG, Kai-Fa HO, Li-Jui CHEN, Heng-Hsin LIU
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Patent number: 12111583Abstract: A reticle is pre-heated prior to an exposure operation of a semiconductor substrate lot to reduce substrate to substrate temperature variations of the reticle in the exposure operation. The reticle may be pre-heated while being stored in a reticle storage slot, while being transferred from the reticle storage slot to a reticle stage of an exposure tool, and/or in another location prior to being secured to the reticle stage for the exposure operation. In this way, the reduction in temperature variation of the reticle in the exposure operation provided by pre-heating the reticle may reduce overlay deltas and misalignment for the semiconductor substrates that are processed in the exposure operation. This increases overlay performance, increases yield of the exposure tool, and increases semiconductor device quality.Type: GrantFiled: August 9, 2023Date of Patent: October 8, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen, Heng-Hsin Liu
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Publication number: 20240331728Abstract: A data media may generally be configured in accordance with various embodiments with contactingly adjacent first and second heatsink layers that are tuned with a common crystallographic orientation and with different thermal conductivities to provide a predetermined thermal gradient. The data media may further be configured with a recording layer formed with the common crystallographic orientation adjacent the first and second heatsink layers.Type: ApplicationFiled: February 9, 2024Publication date: October 3, 2024Applicant: Seagate Technology LLCInventors: Wei-Heng HSU, Yingguo Peng, Pin-Wei Huang, Kai Chieh Chang, Ganping Ju
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Patent number: 12088988Abstract: A venting device includes a first flap, which is configured to be actuated to swing upward during a rising time, and a second flap, which is disposed opposite to the first flap and configured to be actuated to swing downward during a falling time, a first actuating portion disposed on the first flap, and a second actuating portion disposed on the second flap. The venting device configured to form a vent is disposed within a wearable sound device or to be disposed within the wearable sound device. The vent is formed via applying a first voltage to the first actuating portion and applying a second voltage on the second actuating portion, such that the venting device gradually forms the vent.Type: GrantFiled: December 6, 2023Date of Patent: September 10, 2024Assignee: xMEMS Labs, Inc.Inventors: Wen-Chien Chen, Kai-Chieh Chang, Chiung C. Lo, Yuan-Shuang Liu
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Publication number: 20240121547Abstract: A venting device includes a first flap, which is configured to be actuated to swing upward during a rising time, and a second flap, which is disposed opposite to the first flap and configured to be actuated to swing downward during a falling time, a first actuating portion disposed on the first flap, and a second actuating portion disposed on the second flap. The venting device configured to form a vent is disposed within a wearable sound device or to be disposed within the wearable sound device. The vent is formed via applying a first voltage to the first actuating portion and applying a second voltage on the second actuating portion, such that the venting device gradually forms the vent.Type: ApplicationFiled: December 6, 2023Publication date: April 11, 2024Applicant: xMEMS Labs, Inc.Inventors: Wen-Chien Chen, Kai-Chieh Chang, Chiung C. Lo, Yuan-Shuang Liu
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Publication number: 20240108133Abstract: A locker system capable of dynamically generating a storage space based on an object volume and an operation method thereof are disclosed. In the locker system, at least one group of support members is disposed on a cabinet body to allow a user to select whether to dispose a detachable carrier; in order to place an stored object into the cabinet body, an object volume of the stored object is detected, the user is prompted to dispose the detachable carrier at a specified location inside the cabinet body based on the object volume, so that the interior space of the cabinet door can be dynamically partitioned to generate an appropriate storage space for placing the stored object, thereby achieving the technical effect of improving a space usage rate.Type: ApplicationFiled: September 21, 2023Publication date: April 4, 2024Inventor: Kai-Chieh CHANG
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Publication number: 20240019789Abstract: A reticle is pre-heated prior to an exposure operation of a semiconductor substrate lot to reduce substrate to substrate temperature variations of the reticle in the exposure operation. The reticle may be pre-heated while being stored in a reticle storage slot, while being transferred from the reticle storage slot to a reticle stage of an exposure tool, and/or in another location prior to being secured to the reticle stage for the exposure operation. In this way, the reduction in temperature variation of the reticle in the exposure operation provided by pre-heating the reticle may reduce overlay deltas and misalignment for the semiconductor substrates that are processed in the exposure operation. This increases overlay performance, increases yield of the exposure tool, and increases semiconductor device quality.Type: ApplicationFiled: August 9, 2023Publication date: January 18, 2024Inventors: Kai-Chieh CHANG, Kai-Fa HO, Li-Jui CHEN, Heng-Hsin LIU
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Publication number: 20230384688Abstract: Some implementations described herein provide an exposure tool and associated methods of operation in which a scanner control system generates a scanner route for an exposure recipe such that the distance traveled by a substrate stage of the exposure tool along the scanner route is reduced and/or optimized for non-exposure fields on a semiconductor substrate. In this way, the scanner control system increases the productivity of the exposure tool, reduces processing times of the exposure tool, and increases yield in a semiconductor fabrication facility in which the exposure tool is included.Type: ApplicationFiled: August 9, 2023Publication date: November 30, 2023Inventors: Kai-Chieh CHANG, Kai-Fa HO, Li-Jui CHEN, Heng-Hsin LIU
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Patent number: 11822256Abstract: A reticle is pre-heated prior to an exposure operation of a semiconductor substrate lot to reduce substrate to substrate temperature variations of the reticle in the exposure operation. The reticle may be pre-heated while being stored in a reticle storage slot, while being transferred from the reticle storage slot to a reticle stage of an exposure tool, and/or in another location prior to being secured to the reticle stage for the exposure operation. In this way, the reduction in temperature variation of the reticle in the exposure operation provided by pre-heating the reticle may reduce overlay deltas and misalignment for the semiconductor substrates that are processed in the exposure operation. This increases overlay performance, increases yield of the exposure tool, and increases semiconductor device quality.Type: GrantFiled: August 27, 2021Date of Patent: November 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen, Heng-Hsin Liu
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Patent number: 11809087Abstract: Some implementations described herein provide an exposure tool and associated methods of operation in which a scanner control system generates a scanner route for an exposure recipe such that the distance traveled by a substrate stage of the exposure tool along the scanner route is reduced and/or optimized for non-exposure fields on a semiconductor substrate. In this way, the scanner control system increases the productivity of the exposure tool, reduces processing times of the exposure tool, and increases yield in a semiconductor fabrication facility in which the exposure tool is included.Type: GrantFiled: August 27, 2021Date of Patent: November 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen, Heng-Hsin Liu
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Patent number: 11778165Abstract: A floating three-dimensional image display system is provided. The floating three-dimensional image display system includes a controller and a first floating image display device. The controller converts a plurality of image information of an electronic device into a plurality of first floating image information according to the plurality of image information and a plurality of depth information of the electronic device, and displays the plurality of first floating image information in a space above a first side of the first floating image display device through the first floating image display device.Type: GrantFiled: April 28, 2021Date of Patent: October 3, 2023Assignee: Lixel Inc.Inventors: Chun-Hsiang Yang, Chih-Hung Ting, Kai-Chieh Chang
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Patent number: 11763845Abstract: A magnetic stack includes a substrate and a soft magnetic underlayer deposited on a top surface of the substrate. A heat sink layer is disposed on top of the soft magnetic underlayer, and an interlayer is deposited on top of the heat sink layer. A non-magnetic seed layer is deposited on top of the interlayer. A magnetic recording structure which includes more than one magnetic recording layer is deposited on the top surface of the non-magnetic seed layer.Type: GrantFiled: December 17, 2021Date of Patent: September 19, 2023Assignee: SEAGATE TECHNOLOGY LLCInventors: Florin Zavaliche, Kai Chieh Chang, Pin-Wei Huang, Ganping Ju, Jan-Ulrich Thiele
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Patent number: 11687166Abstract: An image processing system and an image processing device are provided. The image processing system includes an electronic device and the image processing device. The image processing device is connected to the electronic device. The image processing device displays a floating three-dimensional input device image information. The image processing device interacts with an object through the three-dimensional input device image information to generate a plurality of control signals, and transmits the plurality of control signals to the electronic device.Type: GrantFiled: March 17, 2021Date of Patent: June 27, 2023Assignee: LIXEL INC.Inventors: Chun-Hsiang Yang, Chih-Hung Ting, Kai-Chieh Chang, Ta-Kai Lin, Yu-Hsien Li