Abstract: In sophisticated semiconductor devices, an efficient stress decoupling may be accomplished between neighboring transistor elements of a densely packed device region by providing a gap or a stress decoupling region between the corresponding transistors. For example, a gap may be formed in the stress-inducing material so as to reduce the mutual interaction of the stress-inducing material on the closely spaced transistor elements. In some illustrative aspects, the stress-inducing material may be provided as an island for each individual transistor element.

Abstract: In complex semiconductor devices, sophisticated ULK materials may be used in metal line layers in combination with a via layer of enhanced mechanical stability by increasing the amount of dielectric material of superior mechanical strength. Due to the superior mechanical stability of the via layers, reflow processes for directly connecting the semiconductor die and a package substrate may be performed on the basis of a lead-free material system without unduly increasing yield losses.

Abstract: By depositing the lower portion of a silicon dioxide interlayer dielectric by means of SACVD or HDP-CVD techniques, the generation of voids may be reliably avoided even for devices having spaces between closely spaced lines on the order of 200 nm or less. Moreover, the bulk silicon dioxide material is deposited by well-established plasma enhanced CVD techniques, thereby providing the potential for using well-established process recipes for the subsequent CMP process, so that production yield and cost of ownership may be maintained at a low level.

Abstract: The thickness of drain and source areas may be reduced by a cavity etch used for refilling the cavities with an appropriate semiconductor material, wherein, prior to the epitaxial growth, an implantation process may be performed so as to allow the formation of deep drain and source areas without contributing to unwanted channel doping for a given critical gate height. In other cases, the effective ion blocking length of the gate electrode structure may be enhanced by performing a tilted implantation step for incorporating deep drain and source regions.

Abstract: Contact failures in sophisticated semiconductor devices may be reduced by relaxing the pronounced surface topography in isolation regions prior to depositing the interlayer dielectric material system. To this end, a deposition/etch sequence may be applied in which a fill material may be removed from the active region, while the recesses in the isolation regions may at least be partially filled.

Abstract: When forming substrate diodes in SOI devices, superior diode characteristics may be preserved by providing an additional spacer element in the substrate opening and/or by using a superior contact patterning regime on the basis of a sacrificial fill material. In both cases, integrity of a metal silicide in the substrate diode may be preserved, thereby avoiding undue deviations from the desired ideal diode characteristics. In some illustrative embodiments, the superior diode characteristics may be achieved without requiring any additional lithography step.

Abstract: Contact elements of sophisticated semiconductor devices may be formed for gate electrode structures and for drain and source regions in separate process sequences in order to apply electroless plating techniques without causing undue overfill of one type of contact opening. Consequently, superior process uniformity in combination with a reduced overall contact resistance may be accomplished. In some illustrative embodiments, cobalt may be used as a contact metal without any additional conductive barrier materials.

Abstract: In an integrated circuit device, such as a microprocessor, a device internal optical communication system is provided in order to enhance signal transfer capabilities while relaxing overall thermal conditions. Furthermore, the device internal optical data or signal transfer capabilities may result in superior operating speed and a high degree of design flexibility. The optical communication system may be applied as a chip internal system in single chip systems or as an inter-chip optical system in three-dimensional chip configurations provided in a single package.

Abstract: In sophisticated semiconductor devices, the integrity of the device level may be enhanced after applying a replacement gate approach by providing an additional diffusion barrier layer, such as a silicon nitride layer, thereby obtaining a similar degree of diffusion blocking capabilities as in semiconductor devices without performing a replacement gate approach.

Abstract: In sophisticated semiconductor devices, contact elements in the contact level may be formed by patterning the contact openings and filling the contact openings with the metal of the first metallization layer in a common deposition sequence. To this end, in some illustrative embodiments, a sacrificial fill material may be provided in contact openings prior to depositing the dielectric material of the first metallization layer.

Abstract: During a replacement gate approach, the inverse tapering of the opening obtained after removal of the polysilicon material may be reduced by depositing a spacer layer and forming corresponding spacer elements on inner sidewalls of the opening. Consequently, the metal-containing gate electrode material and the high-k dielectric material may be deposited with enhanced reliability.

Abstract: In sophisticated semiconductor devices, the contact elements connecting to active semiconductor regions having formed thereabove closely spaced gate electrode structures may be provided on the basis of a liner material so as to reduce the lateral width of the contact opening, while, on the other hand, non-critical contact elements may be formed on the basis of non-reduced lateral dimensions. To this end, at least a first portion of the critical contact element is formed and provided with a liner material prior to forming the non-critical contact element.

Abstract: When forming a metal silicide within contact openings in complex semiconductor devices, a silicidation of sidewall surface areas of the contact openings may be initiated by forming a silicon layer therein, thereby reducing unwanted diffusion of the refractory metal species into the laterally adjacent dielectric material. In this manner, superior reliability and electrical performance of the resulting contact elements may be achieved on the basis of a late silicide process.

Abstract: Methods are provided for fabricating integrated circuits that include forming first and second spaced apart gate structures overlying a semiconductor substrate, and forming first and second spaced apart source/drain regions in the semiconductor substrate between the gate structures. A first layer of insulating material is deposited overlying the gate structures and the source/drain regions by a process of atomic layer deposition, and a second layer of insulating material is deposited overlying the first layer by a process of chemical vapor deposition. First and second openings are etched through the second layer and the first layer to expose portions of the source/drain regions. The first and second openings are filled with conductive material to form first and second spaced apart contacts, electrically isolated from each other, in electrical contact with the first and second source/drain regions.

Abstract: Disclosed herein are various methods of forming conductive contacts with reduced dimensions and various semiconductor devices incorporating such conductive contacts. In one example, one method disclosed herein includes forming a layer of insulating material above a semiconducting substrate, wherein the layer of material has a first thickness, forming a plurality of contact openings in the layer of material having the first thickness and forming an organic material in at least a portion of each of the contact openings. This illustrative method further includes the steps of, after forming the organic material, performing an etching process to reduce the first thickness of the layer of insulating material to a second thickness that is less than the first thickness, after performing the etching process, removing the organic material from the contact openings and forming a conductive contact in each of the contact openings.

Abstract: In sophisticated semiconductor devices, superior contact resistivity may be accomplished for a given contact configuration by providing hybrid contact elements, at least a portion of which may be comprised of a highly conductive material, such as copper. To this end, a well-established contact material, such as tungsten, may be used as buffer material in order to preserve integrity of sensitive device areas upon depositing the highly conductive metal.

Abstract: Disclosed herein are various methods of forming conductive structures, such as conductive lines and vias, using a dual metal hard mask integration technique. In one example, the method includes forming a first layer of insulating material, forming a first patterned metal hard mask layer above the first layer of insulating material, forming a second patterned metal hard mask layer above the first patterned metal hard mask layer, performing at least one etching process through both of the second patterned metal hard mask layer and the first patterned metal hard mask layer to define a trench in the first layer of insulating material and forming a conductive structure in the trench.

Abstract: During a replacement gate approach, the inverse tapering of the opening obtained after removal of the polysilicon material may be reduced by depositing a spacer layer and forming corresponding spacer elements on inner sidewalls of the opening. Consequently, the metal-containing gate electrode material and the high-k dielectric material may be deposited with enhanced reliability.

Abstract: In a replacement gate approach, the semiconductor material of the gate electrode structures may be efficiently removed during a wet chemical etch process, while this material may be substantially preserved in electronic fuses. Consequently, well-established semiconductor-based electronic fuses may be used instead of requiring sophisticated metal-based fuse structures. The etch selectivity of the semiconductor material may be modified on the basis of ion implantation or electron bombardment.

Abstract: Different threshold voltages of transistors of the same conductivity type in a complex integrated circuit may be adjusted on the basis of different Miller capacitances, which may be accomplished by appropriately adapting a spacer width and/or performing a tilted extension implantation. Thus, efficient process strategies may be available to controllably adjust the Miller capacitance, thereby providing enhanced transistor performance of low threshold transistors while not unduly contributing to process complexity compared to conventional approaches in which threshold voltage values may be adjusted on the basis of complex halo and well doping regimes.