Patents by Inventor Kamal M. Karda

Kamal M. Karda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230031362
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell included in a memory cell string; the memory cell including charge storage structure and channel structure separated from the charge storage structure by a dielectric structure; a first control gate associated with the memory cell and located on a first side of the charge storage structure and a first side of the channel structure; and a second control gate associated with the memory cell and electrically separated from the first control gate, the second control gate located on a second side of the charge storage structure and a second side of the channel structure.
    Type: Application
    Filed: July 28, 2021
    Publication date: February 2, 2023
    Inventors: Haitao Liu, Kamal M. Karda, Albert Fayrushin, Yingda Dong
  • Publication number: 20230022021
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having vertically oriented access devices having a first source/drain region and a second source drain region vertically separated by a channel region, and gates opposing the channel region, vertically oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the first source/drain region and horizontally oriented digit lines coupled to the second source/drain regions.
    Type: Application
    Filed: October 6, 2022
    Publication date: January 26, 2023
    Inventors: Kamal M. Karda, Haitao Liu, Litao Yang
  • Publication number: 20230014320
    Abstract: An array of vertical transistors comprises spaced pillars of individual vertical transistors that individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. The upper source/drain region comprises a conductor oxide material in individual of the pillars. The channel region comprises an oxide semiconductor material in the individual pillars. The lower source/drain region comprises a first conductive oxide material in the individual pillars atop and directly against a second conductive oxide material in the individual pillars. Horizontally-elongated and spaced conductor lines individually interconnect a respective multiple of the vertical transistors in a column direction. The conductor lines individually comprise the second conductive oxide material atop and directly against metal material. The first conductive oxide material, the second conductive oxide material, and the metal material comprise different compositions relative one another.
    Type: Application
    Filed: September 19, 2022
    Publication date: January 19, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Yi Fang Lee, Jaydip Guha, Lars P. Heineck, Kamal M. Karda, Si-Woo Lee, Terrence B. McDaniel, Scott E. Sills, Kevin J. Torek, Sheng-Wei Yang
  • Patent number: 11557592
    Abstract: An example apparatus includes a first source/drain region and a second source/drain region formed in a substrate. The first source/drain region and the second source/drain region are separated by a channel. The apparatus includes a gate opposing the channel. The gate includes noble metal nanoparticles. A sense line is coupled to the first source/drain region and a storage node is coupled to the second source/drain region.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: January 17, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Kamal M. Karda, Haitao Liu
  • Patent number: 11538809
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices having a first source/drain region and a second source drain region separated by a channel region, and gates opposing the channel region, vertically oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the second source/drain region and horizontally oriented digit lines coupled to the first source/drain regions. In one example, an insulator material is formed on a surface of the first source/drain region and a conductor material formed on the insulator material to form a metal insulator semiconductor (MIS) interface between the horizontally oriented digit lines and the first source/drain regions of the horizontally oriented access devices.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: December 27, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Deepak Chandra Pandey, Litao Yang, Srinivas Pulugurtha, Yunfei Gao, Haitao Liu
  • Publication number: 20220406941
    Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.
    Type: Application
    Filed: August 22, 2022
    Publication date: December 22, 2022
    Inventors: Kamal M. Karda, Guangyu Huang, Haitao Liu, Akira Goda
  • Patent number: 11532630
    Abstract: Systems, methods and apparatus are provided for depositing alternating layers of dielectric material and sacrificial material in repeating iterations to form a vertical stack, forming a plurality of vertical openings through the vertical stack to form elongated vertical, pillar columns with sidewalls in the vertical stack, patterning the pillar columns to expose a location to form a channel region, selectively removing a portion of the sacrificial material to form first horizontal openings in the first horizontal direction in the sidewalls of the elongated vertical, pillar columns, and depositing a channel material in the first horizontal openings to form the channel region within the sidewalls for the horizontally oriented access devices.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: December 20, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu
  • Patent number: 11527620
    Abstract: Some embodiments include an integrated assembly having a polycrystalline first semiconductor material, and having a second semiconductor material directly adjacent to the polycrystalline first semiconductor material. The second semiconductor material is of a different composition than the polycrystalline first semiconductor material. A conductivity-enhancing dopant is within the second semiconductor material. The conductivity-enhancing dopant is a neutral-type dopant relative to the polycrystalline first semiconductor material. An electrical gate is adjacent to a region of the polycrystalline first semiconductor material and is configured to induce an electric field within said region of the polycrystalline first semiconductor material. The gate is not adjacent to the second semiconductor material.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Deepak Chandra Pandey, Haitao Liu, Richard J. Hill, Guangyu Huang, Yunfei Gao, Ramanathan Gandhi, Scott E. Sills
  • Publication number: 20220392511
    Abstract: Some embodiments include apparatuses and methods operating the apparatuses. One of the apparatuses includes a first data line located over a substrate, a second data line located over the first data line, a third data line located over the second data line and electrically separated from the first and second data lines, and a memory cell coupled to the first, second, and third data lines. The memory cell includes a first material between the first and second data lines and electrically coupled to the first and second data lines; a second material located over the first data line and the first material, the second material electrically separated from the first material and electrically coupled to the third data line; and a memory element electrically coupled to the second material and electrically separated from the first material and first and second data lines.
    Type: Application
    Filed: August 15, 2022
    Publication date: December 8, 2022
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11515417
    Abstract: A transistor comprises a first conductive contact, a heterogeneous channel comprising at least one oxide semiconductor material over the first conductive contact, a second conductive contact over the heterogeneous channel, and a gate electrode laterally neighboring the heterogeneous channel. A device, a method of forming a device, a memory device, and an electronic system are also described.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: November 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy, Yi Fang Lee, Kamal M. Karda
  • Patent number: 11495600
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having vertically oriented access devices having a first source/drain region and a second source drain region vertically separated by a channel region, and gates opposing the channel region, vertically oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the first source/drain region and horizontally oriented digit lines coupled to the second source/drain regions.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: November 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Litao Yang
  • Publication number: 20220352383
    Abstract: Some embodiments include integrated memory. The integrated memory includes a first series of first conductive structures and a second series of conductive structures. The first conductive structures extend along a first direction. The second conductive structures extend along a second direction which crosses the first direction. Pillars of semiconductor material extend upwardly from the first conductive structures. Each of the pillars includes a lower source/drain region, an upper source/drain region, and a channel region between the lower and upper source/drain regions. The lower source/drain regions are coupled with the first conductive structures. Insulative material is adjacent sidewall surfaces of the pillars. The insulative material includes ZrOx, where x is a number greater than 0. The second conductive structures include gating regions which are spaced from the channel regions by at least the insulative material. Storage elements are coupled with the upper source/drain regions.
    Type: Application
    Filed: July 13, 2022
    Publication date: November 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Srinivas Pulugurtha, Litao Yang, Haitao Liu, Kamal M. Karda
  • Patent number: 11488981
    Abstract: An array of vertical transistors comprises spaced pillars of individual vertical transistors that individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. The upper source/drain region comprises a conductor oxide material in individual of the pillars. The channel region comprises an oxide semiconductor material in the individual pillars. The lower source/drain region comprises a first conductive oxide material in the individual pillars atop and directly against a second conductive oxide material in the individual pillars. Horizontally-elongated and spaced conductor lines individually interconnect a respective multiple of the vertical transistors in a column direction. The conductor lines individually comprise the second conductive oxide material atop and directly against metal material. The first conductive oxide material, the second conductive oxide material, and the metal material comprise different compositions relative one another.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: November 1, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yi Fang Lee, Jaydip Guha, Lars P. Heineck, Kamal M. Karda, Si-Woo Lee, Terrence B. McDaniel, Scott E. Sills, Kevin J. Torek, Sheng-Wei Yang
  • Publication number: 20220344468
    Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.
    Type: Application
    Filed: July 8, 2022
    Publication date: October 27, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Manuj Nahar, Vassil N. Antonov, Kamal M. Karda, Michael Mutch, Hung-Wei Liu, Jeffery B. Hull
  • Publication number: 20220344338
    Abstract: Systems, methods, and apparatuses are provided for self-aligned etch back for vertical three dimensional (3D) memory. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes removing portions of the semiconductor material to form first horizontal openings and depositing a fill in the first horizontal openings. The method can further include forming third vertical openings to expose third vertical sidewalls in the vertical stack and selectively removing the fill material to form a plurality of second horizontal openings in which to form horizontally oriented storage nodes.
    Type: Application
    Filed: April 22, 2021
    Publication date: October 27, 2022
    Inventors: Litao Yang, Si-Woo Lee, Haitao Liu, Kamal M. Karda
  • Patent number: 11476259
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Hong Li, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Sanh D. Tang, Scott E. Sills
  • Patent number: 11476252
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first data line located in a first level of the apparatus; a second data line located in a second level of the apparatus; a first memory cell located in a third level of the apparatus between the first and second levels, the first memory cell including a first transistor coupled to the first data line, and a second transistor coupled between the first data line and a charge storage structure of the first transistor; and a second memory cell located in a fourth level of the apparatus between the first and second levels, the second memory cell including a third transistor coupled to the second data line, and a fourth transistor coupled between the second data line and a charge storage structure of the third transistor, the first transistor coupled in series with the third transistor between the first and second data lines.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Patent number: 11469250
    Abstract: Some embodiments include an integrated assembly having a ferroelectric transistor body region between a first comparative digit line and a second comparative digit line. A carrier-reservoir structure is coupled with the ferroelectric transistor body region through an extension that passes along a side of the first comparative digit line. Some embodiments include an integrated assembly having a conductive structure over a carrier-reservoir structure. A bottom of the conductive structure is spaced from the carrier-reservoir structure by an insulative region. A ferroelectric transistor is over the conductive structure. The ferroelectric transistor has a bottom source/drain region over the conductive structure, has a body region over the bottom source/drain region, and has a top source/drain region over the body region. An extension extends upwardly from the carrier-reservoir structure, along a side of the conductive structure, and to a bottom of the body region.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: October 11, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu
  • Patent number: 11469230
    Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells. The vertically stacked memory cells have horizontally oriented access devices having a first source/drain region, a channel region, and a second source drain and storage nodes that are vertically separated from the access devices.
    Type: Grant
    Filed: March 1, 2021
    Date of Patent: October 11, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Litao Yang
  • Patent number: 11462544
    Abstract: An array of recessed access gate lines includes active area regions having dielectric trench isolation material there-between. The trench isolation material comprises dielectric projections extending into opposing ends of individual active area regions under an elevationally outermost surface of material of the active area regions. The active area material is elevationally over the dielectric projections. Recessed access gate lines individually extend transversally across the active area regions and extend between the ends of immediately end-to-end adjacent active area regions within the dielectric trench isolation material. Other arrays are disclosed, as are methods.
    Type: Grant
    Filed: October 16, 2018
    Date of Patent: October 4, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kamal M. Karda, Wolfgang Mueller, Sourabh Dhir, Robert Kerr, Sangmin Hwang, Haitao Liu