Abstract: A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.

Abstract: Provided are an apparatus for generating directional sound and a mobile terminal using the apparatus.

Abstract: A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer.

Abstract: Provided is an optical fiber illuminator used for recording and reading high density optical information according to a near field recording (NFR) scheme, a method of fabricating the optical fiber illuminator, and an optical recording head and recording apparatus having the optical fiber illuminator. The optical fiber illuminator includes: an optical fiber having a core upon which light is incident and a clad that surrounds the core, one end of the optical fiber having a mirror formed in an inclined manner; and a lens formed on an outer surface of the optical fiber for focusing light reflected by the mirror. The optical fiber illuminator has an improved optical arrangement for optical illumination and detection, it is easy to manufacture, its optical input is easy to control, and it can be readily provided in an array form.

Abstract: An ultra-small optical/magnetic head actuator includes: a swing arm movable in a horizontal direction (tracking direction) and a vertical direction (focusing direction) and having mounted thereon a head for reading and writing information on a disk. A tracking actuator moves the swing arm in the horizontal direction (tracking direction) and a pivot hinge adjusts a radius of rotation of the swing arm and guides the movement of the swing arm in the tracking direction. A focusing actuator moves the swing arm in the vertical direction (focusing direction), wherein the focusing actuator includes a focusing coil attached under the swing arm and a Halbach magnet array disposed under the focusing coil minimizes thickness. Friction or backlash can be avoided, and non-repetitive errors can be reduced. The thickness of the ultra-small storage device can be reduced due to the use of a Halbach magnet array.

Abstract: Provided is thin film type energy generation-storage device in which an energy generation device generating energy using a piezoelectric material and an energy storage device storing the generated energy are formed in a thin film type one unit.

Abstract: Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical insulation from one another, and an electronic device using the same. The IDE in which the anodes and the cathodes are arranged radially in an alternating fashion is fabricated and applied to the electronic device, so that the entire fabrication process can be simplified compared to that of a typical electronic device in which an upper electrode is different from a lower electrode. Also, circular or polygonal IDEs can be applied to systems that are driven or measure values on their central axes, thereby enhancing the performance and efficiency of the systems. Furthermore, the circular or polygonal IDEs can be employed in systems such as acoustic sensors, pressure sensors, micro-speakers, biological sensors, and acceleration sensors, so that the structure and operation of the systems can be simplified.

Abstract: Provided are an apparatus for collecting environmental data and a method of monitoring an environment in real time. The apparatus for collecting environmental data includes a receiver for receiving an environmental data collection command from outside, a headset controller for interpreting the environmental data collection command received from the receiver, and distinguishing an audio signal received from outside from the environmental data collection command, the environment sensor unit for collecting environmental data according to the environmental data collection command interpreted from the headset controller, and a transmitter for transmitting the environmental data collected by the environment sensor unit.

Abstract: Provided are a surface-coated polymer actuator and a method of preparing the same. The polymer actuator includes an ionic conductive polymer membrane, metal electrodes formed on both surfaces of the ionic conductive polymer membrane, and coating layers formed on both the surfaces of the metal electrodes. By coating the surfaces of the metal electrodes of the polymer actuator, the leakage of solvent from the electrode surfaces due to an inner pressure, which is caused by the solvent's flow due to an electrical stimulus when the actuator is operated, can be prevented and thus the displacement and drivability of the polymer actuator can be improved.

Abstract: Provided are a method of manufacturing nanoelectrode lines. The method includes the steps of: sequentially forming an insulating layer, a first photoresist layer, and a drop-shaped second photoresist on a substrate; disposing an imprint mold having a plurality of molding patterns over the second photoresist; applying pressure to the mold to allow the second photoresist to flow into the mold patterns; irradiating ultraviolet (UV) light onto the mold to cure the second photoresist; removing the mold from the cured second photoresist and patterning the second photoresist; patterning the first photoresist layer using the patterned second photoresist as a mask; patterning the insulating layer; and forming a metal layer between the patterned insulating layers. In this method, metal electrode lines are formed between insulating layers using an imprint lithography process, so that nanoelectronic devices can be freed from crosstalk between the metal electrode lines.

Abstract: Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer.

Abstract: Provided is a hetero-junction membrane including: a first layer comprising first nanoparticles of a first conductive type; and a second layer comprising second nanoparticles of a second conductive type, wherein the first layer and the second layer are joined to each other. The hetero-junction membrane has advantages in that actuating efficiency is much higher, the direction of actuating can be predicted and the manufacturing processes are simple compared to conventional bucky paper formed of a single layer.

Abstract: Provided is a method of fabricating a near-field optical probe adapted to a near-field scanning optical microscopy and a near-field information storage device, in which a cantilever and an optical tip are provided in one body and the optical tip is arranged to face the upper portion of the substrate. High-concentrated boron ions are implanted into an uppermost silicon layer of a silicon on insulator (SOI) substrate, and a silicon layer into which boron ions are implanted while the silicon inside the tip is etched to form the hole to act as an etch stop layer, thereby easily removing the silicon inside the tip even with the cantilever exposed, and simplifying the process due to the simultaneous fabrication of the cantilever and the tip.

Abstract: Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical insulation from one another, and an electronic device using the same. The IDE in which the anodes and the cathodes are arranged radially in an alternating fashion is fabricated and applied to the electronic device, so that the entire fabrication process can be simplified compared to that of a typical electronic device in which an upper electrode is different from a lower electrode. Also, circular or polygonal IDEs can be applied to systems that are driven or measure values on their central axes, thereby enhancing the performance and efficiency of the systems. Furthermore, the circular or polygonal IDEs can be employed in systems such as acoustic sensors, pressure sensors, micro-speakers, biological sensors, and acceleration sensors, so that the structure and operation of the systems can be simplified.

Abstract: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.

Abstract: An electrochemical gas sensor and a method of manufacturing the same are provided. The electrochemical gas sensor includes: a substrate; an electrode patterned on the substrate; a solid electrolyte layer having proton conductivity formed on the substrate having the patterned electrode; and a hydrophobic microporous membrane formed on the solid electrolyte layer. The gas sensor chip is easily integrated with a driving circuit and uses a solid electrolyte layer, and thus it can be manufactured in a smaller size and in a large area process.

Abstract: A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process.

Abstract: The present invention relates to a head for recording/reading optical data and method of manufacturing the same. The present invention completely buries an aperture with a material a third non-linear coefficient of which is great in order to induce self-focusing. Thus, the present invention can reduce the amount of beam by about one half wavelength and focus the beam in a parabolic shape having almost no optical loss. Therefore, the present invention can improve the transmissivity of the probe by several hundreds times compared to a conventional optical fiver probe, by effectively exciting a near-field scanning optical microscopy for the aperture at an end portion of the probe.

Abstract: Provided are a method for preparing polymer actuators with high stability and polymer actuators prepared by the method, and more specifically, to a method for preparing polymer actuators with high stability that use low power, are extremely thin, and can be substituted in a motor of a camera module, and polymer actuators prepared by the method. The method includes the steps of: preparing an Ionic Polymer Metal Composite (IPMC) in which metal electrodes are plated on both surfaces of a ionic polymer film; removing water from the ionic polymer film of the IPMC; and expanding the IPMC in a polar solvent that has a higher boiling point and a lower freezing point than water.

Abstract: An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.