Patents by Inventor Kang-Min Kuo

Kang-Min Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170033194
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a first fin structure over a semiconductor substrate. The semiconductor device structure also includes a second fin structure over the semiconductor substrate. The second fin structure has a lower height than that of the first fin structure. The second fin structure includes a first sidewall and a second sidewall, and the first sidewall and the second sidewall surround a recess over the second fin structure.
    Type: Application
    Filed: July 31, 2015
    Publication date: February 2, 2017
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lung CHEN, Kang-Min KUO, Wen-Hsin CHAN
  • Patent number: 9515158
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate, an interfacial layer formed over the substrate, and an insertion layer formed over the interfacial layer. The semiconductor structure further includes a gate dielectric layer formed over the insertion layer and a gate structure formed over the gate dielectric layer. In addition, the insertion layer is made of M1Ox, and M1 is a metal, O is oxygen, and x is a value greater than 4.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: December 6, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Wei Lian, Chih-Lin Wang, Kang-Min Kuo, Chih-Wei Lin
  • Publication number: 20160307896
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate and a gate structure formed over the substrate. The gate structure includes a gate dielectric layer formed over the substrate and a capping layer formed over the gate dielectric layer. The gate structure further includes a capping oxide layer formed over the capping layer and a work function metal layer formed over the capping oxide layer. The gate structure further includes a gate electrode layer formed over the work function metal layer.
    Type: Application
    Filed: April 17, 2015
    Publication date: October 20, 2016
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Chih-Wei LIN, Chih-Lin WANG, Kang-Min KUO, Cheng-Wei LIAN
  • Publication number: 20160293702
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a gate stack over a semiconductor substrate. The semiconductor device structure also includes a source/drain structure over the semiconductor substrate, and the source/drain structure includes a dopant. The semiconductor device structure further includes a channel region under the gate stack. In addition, the semiconductor device structure includes a semiconductor layer surrounding the source/drain structure. The semiconductor layer is configured to prevent the dopant from entering the channel region.
    Type: Application
    Filed: May 5, 2015
    Publication date: October 6, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Lung CHEN, Kang-Min KUO, Wen-Hsin CHAN
  • Publication number: 20160247741
    Abstract: A semiconductor device is disclosed in some embodiments. The device includes a substrate, and a layer disposed over the substrate. The layer includes an opening extending through the layer. A plurality of bar or pillar structures or a tapered region are arranged in a peripheral portion of the opening and laterally surround a central portion of the opening. A metal body extends through the central portion of the opening.
    Type: Application
    Filed: May 4, 2016
    Publication date: August 25, 2016
    Inventors: Ying-Chieh Liao, Han-Wei Yang, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9412866
    Abstract: The present disclosure relates to an integrated chip having one or more back-end-of-the-line (BEOL) selectivity stress films that apply a stress that improves the performance of semiconductor devices underlying the BEOL selectivity stress films, and an associated method of formation. In some embodiments, the integrated chip has a semiconductor substrate with one or more semiconductor devices having a first device type. A stress transfer element is located within a back-end-of-the-line stack at a position over the one or more semiconductor devices. A selectivity stress film is located over the stress transfer element. The selectivity stress film induces a stress upon the stress transfer element, wherein the stress has a compressive or tensile state depending on the first device type of the one or more semiconductor devices. The stress acts upon the one or more semiconductor devices to improve their performance.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: August 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gwo-Chyuan Kuoh, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien, Yen-Ming Peng
  • Publication number: 20160190318
    Abstract: A semiconductor device includes a substrate, first strain-inducing source and drain structures, a first gate structure, a first channel region, second strain-inducing source and drain structures, a second gate structure, and a second channel region. At least one of the first strain-inducing source and drain structures has a first proximity to the first channel region. At least one of the second strain-inducing source and drain structures has a second proximity to the second channel region. The second proximity is different from the first proximity.
    Type: Application
    Filed: July 16, 2015
    Publication date: June 30, 2016
    Inventors: Chia-Hsin CHEN, Chih-Lin WANG, Kang-Min KUO
  • Publication number: 20160190240
    Abstract: A semiconductor structure includes a semiconductor substrate, a first active area, a second active area, a first trench, at least one raised portion, and a first dielectric. The first active area is in the semiconductor substrate. The second active area is in the semiconductor substrate. The first trench is in the semiconductor substrate and separates the first active area and the second active area from each other. The raised portion is raised from the semiconductor substrate and is disposed in the first trench. The first dielectric is in the first trench and covers the raised portion.
    Type: Application
    Filed: May 21, 2015
    Publication date: June 30, 2016
    Inventors: Cong-Min FANG, Kang-Min KUO, Shi-Min WU
  • Publication number: 20160190064
    Abstract: A semiconductor device with the metal fuse is provided. The metal fuse connects an electronic component (e.g., a transistor) and a existing dummy feature which is grounded. The protection of the metal fuse can be designed to start at the beginning of the metallization formation processes. The grounded dummy feature provides a path for the plasma charging to the ground during the entire back end of the line process. The metal fuse is a process level protection as opposed to the diode, which is a circuit level protection. As a process level protection, the metal fuse protects subsequently-formed circuitry. In addition, no additional active area is required for the metal fuse in the chip other than internal dummy patterns that are already implemented.
    Type: Application
    Filed: March 5, 2016
    Publication date: June 30, 2016
    Inventors: Chen-Chung LAI, Kang-Min KUO, Yen-Ming PENG, Gwo-Chyuan KUOH, Han-Wei YANG, Yi-Ruei LIN, Chin-Chia CHANG, Ying-Chieh LIAO, Che-Chia HSU, Bor-Zen TIEN
  • Patent number: 9349688
    Abstract: A semiconductor device having enhanced passivation integrity is disclosed. The device includes a substrate, a first layer, and a metal layer. The first layer is formed over the substrate. The first layer includes a via opening and a tapered portion proximate to the via opening. The metal layer is formed over the via opening and the tapered portion of the first layer. The metal layer is substantially free from gaps and voids.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: May 24, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ying-Chieh Liao, Han-Wei Yang, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9299621
    Abstract: An integrated circuit includes a number of lateral diffusion measurement structures arranged on a silicon substrate. A lateral diffusion measurement structure includes a p-type region and an n-type region which cooperatively span a predetermined initial distance between opposing outer edges of the lateral diffusion measurement structure. The p-type and n-type regions meet at a p-n junction expected to be positioned at a target junction location after dopant diffusion has occurred.
    Type: Grant
    Filed: September 12, 2013
    Date of Patent: March 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Han-Wei Yang, Yi-Ruei Lin, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9299658
    Abstract: A semiconductor device with the metal fuse and a fabricating method thereof are provided. The metal fuse connects an electronic component (e.g., a transistor) and a existing dummy feature which is grounded. The protection of the metal fuse can be designed to start at the beginning of the metallization formation processes. The grounded dummy feature provides a path for the plasma charging to the ground during the entire back end of the line process. The metal fuse is a process level protection as opposed to the diode, which is a circuit level protection. As a process level protection, the metal fuse protects subsequently-formed circuitry. In addition, no additional active area is required for the metal fuse in the chip other than internal dummy patterns that are already implemented.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: March 29, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Chung Lai, Kang-Min Kuo, Yen-Ming Peng, Gwo-Chyuan Kuoh, Han-Wei Yang, Yi-Ruei Lin, Chin-Chia Chang, Ying-Chieh Liao, Che-Chia Hsu, Bor-Zen Tien
  • Publication number: 20160071799
    Abstract: The semiconductor device includes a substrate, an epi-layer, a first etch stop layer, an interlayer dielectric (ILD) layer, a second etch stop layer, a protective layer, a liner, a silicide cap and a contact plug. The substrate has a first portion and a second portion. The epi-layer is disposed in the first portion. The first etch stop layer is disposed on the second portion. The ILD layer is disposed on the first etch stop layer. The second etch stop layer is disposed on the ILD layer, in which the first etch stop layer, the ILD layer and the second etch stop layer form a sidewall surrounding the first portion. The protective layer is disposed on the sidewall. The liner is disposed on the protective layer. The silicide cap is disposed on the epi-layer. The contact plug is disposed on the silicide cap and surrounded by the liner.
    Type: Application
    Filed: September 4, 2014
    Publication date: March 10, 2016
    Inventors: Wen-Jia HSIEH, Long-Jie HONG, Chih-Lin WANG, Kang-Min KUO
  • Publication number: 20150311156
    Abstract: A semiconductor device having enhanced passivation integrity is disclosed. The device includes a substrate, a first layer, and a metal layer. The first layer is formed over the substrate. The first layer includes a via opening and a tapered portion proximate to the via opening. The metal layer is formed over the via opening and the tapered portion of the first layer. The metal layer is substantially free from gaps and voids.
    Type: Application
    Filed: July 6, 2015
    Publication date: October 29, 2015
    Inventors: Ying-Chieh Liao, Han-Wei Yang, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Publication number: 20150294914
    Abstract: A semiconductor device with an increased effective gate length or an increased effective channel width, and a method of forming the same are provided. The effective gate length or the effective channel width of the device is increased by lowering a top surface of an oxide isolation structure below the gate of the semiconductor device.
    Type: Application
    Filed: April 9, 2014
    Publication date: October 15, 2015
    Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
    Inventors: Long-Jie Hong, Chih-Lin Wang, Kang-Min Kuo
  • Publication number: 20150255394
    Abstract: A semiconductor device with the metal fuse and a fabricating method thereof are provided. The metal fuse connects an electronic component (e.g., a transistor) and a existing dummy feature which is grounded. The protection of the metal fuse can be designed to start at the beginning of the metallization formation processes. The grounded dummy feature provides a path for the plasma charging to the ground during the entire back end of the line process. The metal fuse is a process level protection as opposed to the diode, which is a circuit level protection. As a process level protection, the metal fuse protects subsequently-formed circuitry. In addition, no additional active area is required for the metal fuse in the chip other than internal dummy patterns that are already implemented.
    Type: Application
    Filed: May 20, 2015
    Publication date: September 10, 2015
    Inventors: Chen-Chung LAI, Kang-Min KUO, Yen-Ming PENG, Gwo-Chyuan KUOH, Han-Wei YANG, Yi-Ruei LIN, Chin-Chia CHANG, Ying-Chieh LIAO, Che-Chia HSU, Bor-Zen TIEN
  • Patent number: 9093528
    Abstract: The present disclosure relates to an integrated chip having one or more back-end-of-the-line (BEOL) stress compensation layers that reduce stress on one or more underlying semiconductor devices, and an associated method of formation. In some embodiments, the integrated chip has a semiconductor substrate with one or more semiconductor devices. A stressed element is located within a back-end-of-the-line stack at a position overlying the one or more semiconductor devices. A stressing layer is located over the stressed element induces a stress upon the stressed element. A stress compensation layer, located over the stressed element, provides a counter-stress to reduce the stress induced on the stressed element by the stressing layer. By reducing the stress induced on the stressed element, stress on the semiconductor substrate is reduced, improving uniformity of performance of the one or more semiconductor devices.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: July 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yen-Ming Peng, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9093373
    Abstract: An integrated circuit includes a p-type region formed beneath a surface of a semiconductor substrate, and an n-type region formed beneath the surface of the semiconductor substrate. The n-type region meets the p-type region at a p-n junction. A diffusion barrier structure, which is beneath the surface of the semiconductor substrate and extends along a side of the p-n junction, limits lateral diffusion between the p-type region and n-type region.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: July 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-Chia Chang, Han-Wei Yang, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9076804
    Abstract: A semiconductor device having enhanced passivation integrity is disclosed. The device includes a substrate, a first layer, and a metal layer. The first layer is formed over the substrate. The first layer includes a via opening and a tapered portion proximate to the via opening. The metal layer is formed over the via opening and the tapered portion of the first layer. The metal layer is substantially free from gaps and voids.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: July 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ying-Chieh Liao, Han-Wei Yang, Chen-Chung Lai, Kang-Min Kuo, Bor-Zen Tien
  • Patent number: 9070687
    Abstract: A semiconductor device with the metal fuse is provided. The metal fuse connects an electronic component (e.g., a transistor) and a existing dummy feature which is grounded. The protection of the metal fuse can be designed to start at the beginning of the metallization formation processes. The grounded dummy feature provides a path for the plasma charging to the ground during the entire back end of the line process. The metal fuse is a process level protection as opposed to the diode, which is a circuit level protection. As a process level protection, the metal fuse protects subsequently-formed circuitry. In addition, no additional active area is required for the metal fuse in the chip other than internal dummy patterns that are already implemented.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: June 30, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Chung Lai, Kang-Min Kuo, Yen-Ming Peng, Gwo-Chyuan Kuoh, Han-Wei Yang, Yi-Ruei Lin, Chin-Chia Chang, Ying-Chieh Liao, Che-Chia Hsu, Bor-Zen Tien