Abstract: A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element by way of at least one contact column and is at least largely supported thereby. The contact column moreover makes electrical contact to the sensor element. Also proposed is a method for manufacturing a largely self-supporting membrane, a polymer layer first being deposited on a base element, patterned, and equipped with at least one cutout. The cutout is subsequently filled with a filler material, and a membrane layer is applied onto the polymer layer. Lastly, the polymer layer is removed again. The proposed method for manufacturing a largely self-supporting membrane layer is suitable in particular for constructing a sensor, in particular a thermal sensor or a thermal sensor array.

Abstract: In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

Abstract: A microtool for manipulating components is proposed. A component is held with the microtool by at least one gripper arm having a gripping surface, the gripper being movable by an actuator structure. Also provided is a device for releasing the held component from the gripping surface, whereby an acceleration is induced in the gripper arm for at least a time, and the force of inertia resulting from the inertial mass of the held component and the exerted acceleration will be greater than any force of adhesion acting between the held component and the gripping surface. A process is also proposed for producing a microtool or a microtool part, in particular a microgripper by micropatterning.

Abstract: A system for converting a voice input requested location to a destination location useable by a navigation device in a vehicle. The system includes a mobile communicator, preferably a mobile phone, in communication with a base station and a voice portal server. The voice portal server identifies through a voice recognition algorithm a destination location corresponding to a requested location verbally input by the vehicle occupant. The voice portal server may access the internet for additional information. The voice portal server may prompt the occupant to respond to interrogatories to narrow the possible matches for the requested location to one destination location. The destination location is transmitted from the voice portal server via the base station and via the mobile communicator to a decoder in an encoded format, preferably in DTMF (Dual Tone Multi-Frequency) format. The decoder decoding the destination location and transmitting the destination location to a navigation device.

Abstract: A faceplate including an antenna for receiving navigation signals, a processor electrically coupled to the antenna for determining a position, a display electrically coupled to the processor for displaying navigation information, and at least one input arrangement. The faceplate able to be installed on a front side of a vehicular electronic unit in a dashboard of a vehicle. The at least one input arrangement controlling the vehicular electronic unit when the faceplate is received on the front side of the vehicular electronic unit. A system for navigating including a handheld unit. The handheld unit includes an antenna, a processor electrically coupled to the antenna, and a display electrically coupled to the processor. A further antenna is situated on a vehicle and a receptacle is situated in a dashboard of the vehicle for receiving the handheld unit. The receptacle electrically couples the further antenna to the handheld unit when the handheld unit is received in the receptacle.

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract: The invention relates to a device for generating bias voltages for the electrodes of a rotation rate sensor. By evaluating a rotation rate signal and a quadrature signal, control signals are generated, using an adaptive quadrature compensator, that are converted by means of a bias voltage generating arrangement into bias voltages that are delivered to the electrodes of an electrode arrangement disposed underneath the seismic mass or masses of the rotation rate sensor. As a result, the sensor structure can be inclined in such a way that the quadrature signal occurring at the output is minimized. In accordance with a further feature of the invention, the bias voltages generated by the bias voltage generating arrangement are modified, as a function of the output signal of a bandwidth adjusting circuit, in such a way that the amplitude frequency response of the detection motion has a desired bandwidth.

Abstract: A microtool for manipulating components is proposed. A component is held with the microtool by at least one gripper arm having a gripping surface, the gripper being movable by an actuator structure. Also provided is a device for releasing the held component from the gripping surface, whereby an acceleration is induced in the gripper arm for at least a time, and the force of inertia resulting from the inertial mass of the held component and the exerted acceleration will be greater than any force of adhesion acting between the held component and the gripping surface. A process is also proposed for producing a microtool or a microtool part, in particular a microgripper by micropatterning.

Abstract: System for interfacing a device onboard a vehicle and a voice portal server external to the vehicle including a voice communicator and a data communicator situated in the vehicle. The onboard device communicates electronically with the voice communicator and/or the data communicator which in turn are able to communicate wirelessly with a base station. The base station communicates electronically with the voice portal server. A method of providing information to an occupant of a vehicle includes providing a voice communicator, a data communicator, an onboard device, a base station, and a voice portal server. The voice portal server communicates electronically with the base station, the base station communicates wirelessly with the voice communicator and/or the data communicator, and the onboard device communicates electronically with the voice communicator and/or the data communicator.

Abstract: A system for converting a voice input requested location to a destination location useable by a navigation device in a vehicle. The system includes a mobile communicator, preferably a mobile phone, in communication with a base station and a voice portal server. The voice portal server identifies through a voice recognition algorithm a destination location corresponding to a requested location verbally input by the vehicle occupant. The voice portal server may access the internet for additional information. The voice portal server may prompt the occupant to respond to interrogatories to narrow the possible matches for the requested location to one destination location. The destination location is transmitted from the voice portal server via the base station and via the mobile communicator to a decoder in an encoded format, preferably in DTMF (Dual Tone Multi-Frequency) format. The decoder decoding the destination location and transmitting the destination location to a navigation device.

Abstract: An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.

Abstract: A structural body which, at least region-wise, has at least one area which is in contact with a liquid or a gas flowing past, and which, at least to a great extent, is provided with a surface patterning made of a plurality of randomly or irregularly distributed geometric forms, in particular pyramids. At least one such structural body be used in a capacitive sensor with which, in particular, the dielectric constants or the conductance of a liquid or a gas can be determined.

Abstract: A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

Abstract: A magnetic field sensor that can be manufactured using the technology of surface micromechanics, having a conductor loop that has at least one deformable segment; a deformation device for deforming the deformable segment of the conductor loop with a predeterminable time dependence; a voltage sensing device for sensing the voltage induced at the ends of the conductor loop upon deformation in the presence of a magnetic field; and a magnetic field determining device for determining the present static and/or dynamic magnetic field in consideration of at least the time dependence of the deformation.

Abstract: An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.

Abstract: An integrated adjustable capacitor device and method for making such a device are provided. The adjustable capacitor includes an underlying electrode, a dielectric cavity, an upper electrode, and an etch cavity for removing sacrificial material from the dielectric cavity. The surface of the device is relatively flat due to epitaxal deposition of epi polysilicon and single crystal silicon. The adjustable capacitor system is capable of undergoing CMOS processes without requiring additional steps of covering the capacitor device to protect it and then removing the covering following the CMOS processes.

Abstract: A gyroscope system including multiple rotating or oscillating disks filters out disturbance acceleration inputs such as vibrations or jarring while detecting and measuring external angular velocity. The gyroscope disks are decoupled from a substrate to decrease the impact of external vibrations on the gyroscope operation. The gyroscope disks are rotated in opposite directions or oscillated out of phase to decrease the impact of disturbance vibrations and jarring while more accurately measuring external angular velocities applied to the system.

Abstract: A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the third layers; etching through the first layer up to the second layer to produce an island region, lying on the second layer, which is joined to region of the first layer surrounding the island region by way of one or more connecting webs, and etching through a region of the third layer up to the second layer and removing a region of the second layer below the island region in such a way that the island region can perform movements, preferably torsional vibrations, about the one or more connecting webs, the torsional vibrations having such an amplitude that a part of the island region extends into the etched-through region of the third layer.