Patents by Inventor Katsuhiko Kemmochi
Katsuhiko Kemmochi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20070051296Abstract: A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.Type: ApplicationFiled: September 8, 2005Publication date: March 8, 2007Inventors: Katsuhiko Kemmochi, Robert Mosier, Yasuo Ohama
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Patent number: 7118789Abstract: A silica glass crucible is manufactured by introducing into a rotating crucible mold bulk silica grain to form a bulky wall including a bottom wall and a side wall. After heating the interior of the mold to begin to fuse the bulk silica grains, an inner silica grain, doped with aluminum, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The crucible is cooled, the fused silica grains forming nuclei of crystalline silica within the inner layer.Type: GrantFiled: July 16, 2001Date of Patent: October 10, 2006Assignee: Heraeus Shin-Etsu AmericaInventors: Katsuhiko Kemmochi, Robert O. Mosier, Paul G. Spencer
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Publication number: 20040072007Abstract: A silica glass crucible is disclosed comprising an aluminum-doped inner wall layer. An aluminum-doped layer can be formed on an outer wall portion. The inner layer is non-homogeneously doped with aluminum to promote silica crystallization. The non-homogeneous silica grain mixture contains aluminum and can be aluminum-doped and aluminum-free silica grains or, alternatively, aluminum-coated coarse quartz grain.Type: ApplicationFiled: October 1, 2003Publication date: April 15, 2004Applicant: Heraeus Shin-Etsu AmericaInventors: Katsuhiko Kemmochi, Robert O. Mosier, Paul G. Spencer
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Publication number: 20040040497Abstract: A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.Type: ApplicationFiled: September 3, 2003Publication date: March 4, 2004Inventors: Katsuhiko Kemmochi, Robert Mosier, Paul Spencer
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Patent number: 6641663Abstract: A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.Type: GrantFiled: December 12, 2001Date of Patent: November 4, 2003Assignee: Heracus Shin-Estu AmericaInventors: Katsuhiko Kemmochi, Robert Mosier, Paul Spencer
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Publication number: 20030106491Abstract: A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.Type: ApplicationFiled: December 12, 2001Publication date: June 12, 2003Applicant: Heraeus Shin-Etsu AmericaInventors: Katsuhiko Kemmochi, Robert Mosier, Paul Spencer
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Patent number: 6510707Abstract: Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.Type: GrantFiled: March 15, 2001Date of Patent: January 28, 2003Assignee: Heraeus Shin-Etsu America, Inc.Inventors: Katsuhiko Kemmochi, Takayuki Togawa, Robert Mosier, Paul Spencer
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Publication number: 20030012898Abstract: A silica glass crucible is disclosed comprising an aluminum-doped inner wall layer. An aluminum-doped layer can be formed on an outer wall portion. The inner layer is non-homogeneously doped with aluminum to promote silica crystallization. The non-homogeneous silica grain mixture contains aluminum and can be aluminum-doped and aluminum-free silica grains or, alternatively, aluminum-coated coarse quartz grain.Type: ApplicationFiled: July 16, 2001Publication date: January 16, 2003Applicant: HERAEUS SHIN-ETSU AMERICAInventors: Katsuhiko Kemmochi, Robert O. Mosier, Paul G. Spencer
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Publication number: 20030012899Abstract: A crucible adapted for use in formation of a silicon crystal comprises a crucible wall including a bottom wall and a side wall. An inner layer is formed on an inner portion of the crucible wall and has distributed therein a crystallization agent containing an element selected from the group consisting of barium, aluminum, titanium and strontium.Type: ApplicationFiled: June 18, 2002Publication date: January 16, 2003Applicant: Heraeus Shin-Etsu AmericaInventors: Katsuhiko Kemmochi, Robert Mosier, Paul Spencer
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Publication number: 20020166340Abstract: Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.Type: ApplicationFiled: March 15, 2001Publication date: November 14, 2002Inventors: Katsuhiko Kemmochi, Takayuki Togawa, Robert Mosier, Paul Spencer
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Patent number: 5968259Abstract: Provided are high-purity quartz glass having a high purity, in particular, with little zirconium (Zr) and manufactured at low costs from natural quartz as the starting material and a method for the preparation thereof.Type: GrantFiled: August 27, 1997Date of Patent: October 19, 1999Assignee: Shin-Etsu Quartz Products Co., Ltd.Inventors: Katsuhiko Kemmochi, Hiroyuki Miyazawa, Hiroyuki Watanabe, Kiyotaka Maekawa, Chuzaemon Tsuji, Manabu Saitou
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Patent number: 5877027Abstract: An analytical method for the quantitative determination of the impurities in silicon dioxide by which trace amounts of hardly soluble impurities contained in silicon dioxide can be reliably decomposed and converted into a solution so that the contents of all of the impurities contained in silicon dioxide or, in particular, zirconium in a natural quartz powder can be accurately determined. Silicon dioxide is decomposed with hydrofluoric acid or an acid mixture of hydrofluoric acid and another inorganic acid to give a decomposition solution which is, as such or after admixture with another inorganic acid, subjected to evaporation to dryness and the residue is heated to cause fusion with addition of a salt or hydroxide of an alkali metal followed by dissolution of the salt or hydroxide of an alkali metal with pure water or with an aqueous solution of an inorganic acid to give an aqueous solution which is subjected to quantitative analysis of the impurities therein.Type: GrantFiled: August 27, 1997Date of Patent: March 2, 1999Assignee: Shin-Etsu Quartz Products Co., Ltd.Inventors: Katsuhiko Kemmochi, Kiyotaka Maekawa, Chuzaemon Tsuji, Manabu Saitou, Hiroyuki Miyazawa, Hiroyuki Watanabe
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Patent number: 5807416Abstract: A silica glass member shows a glassy carbon coating wherein a surface of a silica glass substrate of the silica glass member shows a mean surface roughness (R.sub.a) in a range of 0.03 .mu.m to 2 .mu.m and it is coated with a glassy carbon coating. The member is manufactured by chemically roughening the substrate to a surface roughness in the above recited range; coating the surface of the silica glass substrate with an organic raw material containing carbon, curing and thereafter carbonizing the film of the organic raw material by forming a glassy carbon coating.Type: GrantFiled: September 16, 1996Date of Patent: September 15, 1998Assignee: Heraeus Quarzglas GmbHInventors: Katsuhiko Kemmochi, Dietmar Hellmann, Christian Gebauer
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Patent number: 5730800Abstract: An improved method is proposed for the preparation of a semiconductor silicon single crystal of N-type by the Czochralski process, which is free from the problem of occurrence of delayed OSFs as defects in the single crystal even after prolonged storage at room temperature based on the discovery that presence of a certain amount of aluminum in the melt of silicon contained in a fused silica glass crucible acts to suppress occurrence of delayed OSFs as a type of defects in the single crystal while copper as an impurity acts adversely in this regard. With a known fact that an about 30 .mu.m thick inner surface layer of the crucible is melted down into the silicon melt during the single crystal pulling-up process, namely, the invention proposes use of a crucible of which the inner surface layer of 30 .mu.m thickness contains aluminum in an average concentration of 40 to 500 ppm by weight while the content of copper is as low as possible not to exceed 0.5 ppb by weight.Type: GrantFiled: December 17, 1996Date of Patent: March 24, 1998Assignees: Shin-Etsu Handotai Co., Ltd., Shin-Etsu Quartz Products Co., Ltd.Inventors: Wataru Sato, Masahiro Sakurada, Ohta Tomohiko, Katsuhiko Kemmochi
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Patent number: 5609682Abstract: An improved method is proposed for the preparation of a semiconductor silicon single crystal of N-type by the Czochralski process, which is free from the problem of occurrence of delayed OSFs as defects in the single crystal even after prolonged storage at room temperature based on the discovery that presence of a certain amount of aluminum in the melt of silicon contained in a fused silica glass crucible acts to suppress occurrence of delayed OSFs as a type of defects in the single crystal while copper as an impurity acts adversely in this regard. With a known fact that an about 30 .mu.m thick inner surface layer of the crucible is melted down into the silicon melt during the single crystal pulling-up process, namely, the invention proposes use of a crucible of which the inner surface layer of 30 .mu.m thickness contains aluminum in an average concentration of 40 to 500 ppm by weight while the content of copper is as low as possible not to exceed 0.5 ppb by weight.Type: GrantFiled: July 6, 1995Date of Patent: March 11, 1997Assignees: Shin-Etsu Handotai Co., Ltd., Shin-Etsu Quartz Co., Ltd.Inventors: Wataru Sato, Masahiro Sakurada, Ohta Tomohiko, Katsuhiko Kemmochi