Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: The present invention is to prevent an absorption member from dropping off while reducing damage to the absorption member. An absorption rotor includes plural spokes extending in a radial manner from the circumference of the rotation axis, a tubular rim 4 coupling end portions of the plural spokes, an absorption member accommodated in a space which is surrounded by the plural spokes and the rim, the absorption member that absorbs a substance to be absorbed when a gas passes through, and a drop-off prevention member respectively fixed to the spoke and the absorption member, the drop-off prevention member that prevents the absorption member from dropping off the spoke. The drop-off prevention member is arranged between the absorption member and the spoke, and between a surface from which the gas flows into the absorption member and a surface from which the gas flows out of the absorption member.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: The present invention is to prevent an absorption member from dropping off while reducing damage to the absorption member. An absorption rotor includes plural spokes extending in a radial manner from the circumference of the rotation axis, a tubular rim 4 coupling end portions of the plural spokes, an absorption member accommodated in a space which is surrounded by the plural spokes and the rim, the absorption member that absorbs a substance to be absorbed when a gas passes through, and a drop-off prevention member respectively fixed to the spoke and the absorption member, the drop-off prevention member that prevents the absorption member from dropping off the spoke. The drop-off prevention member is arranged between the absorption member and the spoke, and between a surface from which the gas flows into the absorption member and a surface from which the gas flows out of the absorption member.

Abstract: A radiation-sensitive composition including a compound (P) having a partial structure (A) having an ionic structural site and capable of decomposing upon irradiation with an actinic ray or radiation to generate an acid and a partial structure (B) having at least one phenolic hydroxyl group, a part or all of hydrogen atoms of the hydroxyl group or groups each being protected by a group capable of leaving by the action of an acid, wherein the ionic structural site of the partial structure (A) contained in the compound (P) is a structure capable of generating an acid anion in the compound (P) upon irradiation with an actinic ray or radiation; a pattern-forming method using the same; and a resin which is used in the composition.

Abstract: Provided is a actinic ray-sensitive or radiation-sensitive resin composition including (P) a resin containing (A) a repeating unit having an ionic structure moiety that contains a cation represented by formula (Ia) and is capable of producing an acid anion on the side chain upon irradiation with an actinic ray or radiation: wherein each of R1a to R13a independently represents a hydrogen atom or a monovalent substituent and may combine together to form a ring, and Z represents a single bond or a divalent linking group.

Abstract: A resin composition is provided that includes two or more types of compounds selected from the group consisting of (Component A) a compound comprising a silicon atom having a total of one or two alkoxy and hydroxy groups, (Component B) a compound comprising a silicon atom having a total of three alkoxy and hydroxy groups, and (Component C) a compound comprising a silicon atom having a total of four alkoxy and hydroxy groups. There are also provided a relief printing plate precursor that includes a relief-forming layer formed from the resin composition, a process for producing a relief printing plate precursor that includes a layer formation step of forming a relief-forming layer from the resin composition and a crosslinking step of thermally crosslinking the relief-forming layer so as to form a crosslinked relief-forming layer.

Abstract: A positive resist composition for use with electron beam, X-ray or EUV and a pattern forming method using the positive resist composition are provided, the positive resist composition including: (A) a resin capable of decomposing under an action of an acid to increase a dissolution rate in an aqueous alkali solution; (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (C) a basic compound; and (D) an organic solvent, wherein the entire solid content concentration in the resist composition is from 1.0 to 4.5 mass % and a ratio of (B) the compound capable of generating an acid upon irradiation with actinic rays or radiation is from 10 to 50 mass % based on the entire solid content.

Abstract: A layout method of a semiconductor integrated circuit includes five steps. The first step is of extracting a wiring crowding place where wiring lines are crowded as compared with a predetermined condition, after carrying out a routing in a region where a placement of circuit elements is carried out. The second step is of generating routing prohibition regions where a routing is prohibited in an area including the wiring crowding place. The third step is of carrying out a routing by bypassing the routing prohibition regions. The fourth step is of deleting the routing prohibition regions. The fifth step is of carrying out a re-routing. The generating step includes: calculating a size and an interval of the routing prohibition regions based on a rate for generating a routing prohibition region in the area in each wiring layer, and generating the routing prohibition regions in the area on the basis of the calculating result.

Abstract: Disclosed are a process for producing a flexographic printing plate precursor for laser engraving, the method comprising, in the following order: an applying step (1) of applying a composition comprising (Component A) a radical polymerizable compound and (Component B) a thermal radical polymerization initiator onto a support; and a curing step (2) of thermally curing the composition in an atmosphere in which an oxygen partial pressure is from 0.0001 atm to 0.1 atm, a flexographic printing plate precursor for laser engraving produced by the process; a process for making a flexographic printing plate; and a flexographic printing plate.

Abstract: The flexographic printing plate precursor for laser engraving of the present invention includes, above a support, a crosslinked relief-forming layer formed by subjecting a resin composition containing a chain-polymerizable monomer (A), a crosslinking agent (B) that crosslinks in a step-growth reaction, and a crosslinkable polymer (C) having a crosslinkable group that reacts with the crosslinking agent (B) to chain polymerization and step-growth crosslinking reactions, the crosslinked relief-forming layer having a storage modulus E? (MPa) at a frequency of 100 Hz and 25° C. satisfying the relationship (a) below and having a maximum tensile elongation L (%) at break at 25° C. satisfying the relationship (b) below.

Abstract: Disclosed herein is a speaker system including a speaker unit with a speaker body incorporated therein; and a speaker panel disposed on the front side of the speaker unit; wherein the speaker panel has a multiplicity of fine holes permitting a sound of the speaker body to pass therethrough, and has an opaque part hiding the presence of the speaker unit, and a transparent part in the periphery of the opaque part.

Abstract: Provided is a positive resist composition for an electron beam, an X-ray or EUV, including: (A) a resin capable of decomposing by the action of an acid to increase the dissolution rate in an aqueous alkali solution; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, represented by the following formula (ZI) or (ZII); (C) a basic compound; and (D) an organic solvent, wherein a concentration of all solid contents in said composition is from 1.0 to 4.5 mass %, and a total amount of the compound represented by formula (ZI) or (ZII) is 12 mass % or more based on all solid contents in said composition: wherein symbols in the formulae are defined in the specification.

Abstract: A resin composition is provided that includes two or more types of compounds selected from the group consisting of (Component A) a compound comprising a silicon atom having a total of one or two alkoxy and hydroxy groups, (Component B) a compound comprising a silicon atom having a total of three alkoxy and hydroxy groups, and (Component C) a compound comprising a silicon atom having a total of four alkoxy and hydroxy groups. There are also provided a relief printing plate precursor that includes a relief-forming layer formed from the resin composition, a process for producing a relief printing plate precursor that includes a layer formation step of forming a relief-forming layer from the resin composition and a crosslinking step of thermally crosslinking the relief-forming layer so as to form a crosslinked relief-forming layer.

Abstract: A positive resist composition for electron beam, X-ray or EUV includes (A) a compound represented by the following formula (I), and (B) a resin capable of decomposing by the action of an acid to increase solubility in an alkali developing solution, which includes a repeating unit represented by the following formula (II) and a repeating unit represented by the following formula (III):

Abstract: A metal-polishing liquid includes colloidal silica and a compound represented by Formula (I) or a compound represented by Formula (II). The colloidal silica is substituted by aluminum atoms at least one portion of the silicon atoms on the surfaces thereof. In Formula (I), R1 represents an alkyl group, alkynyl group, alkenyl group, allyl group or aryl group; R2 represents hydrogen atom, an alkyl group, alkynyl group, alkenyl group, allyl group or aryl group; m represents an integer from 0 to 6. In Formula (II), R3 represents an alkyl group or aryl group; n represents an integer from 1 to 30.