Abstract: When the hatch of a substrate washing chamber 5 is opened to receive a substrate, certain valves are closed, and a valve is opened, supply CO2 to purge the substrate washing chamber 5 to and exclude air. When the hatch is closed, another valve is opened to vent substrate washing chamber 5 so that the CO2 expels any gas and unwanted air from the substrate washing chamber 5 and the conduits. Thereafter, super critical CO2 is used to wash the substrate and clean the circulation line. The flow of supercritical CO2 is sent to the substrate washing chamber 5. After flowing through the circulation line, including a circulation channel 11, it passes through a bypass channel 12 to a decompressor 7. Any chemicals or organic substances left in the circulation line are continuously sent to a separation/recover bath 8 together with the flow.

Abstract: When the hatch of a substrate washing chamber 5 is opened to receive a substrate, certain valves are closed, and one valve is opened, to supply CO2 to purge the substrate washing chamber 5 to and exclude air. When the hatch is closed, another valve is opened to vent substrate washing chamber 5 so that the CO2 expels any gas and unwanted air from the substrate washing chamber 5 and the conduits. Thereafter, supercritical CO2 is used to wash the substrate and clean the circulation line. The flow of supercritical CO2 is sent to the substrate washing chamber 5. After flowing through the circulation line, including a circulation channel 11, it passes through a bypass channel 12 to a decompressor 7. Any chemicals or organic substances left in the circulation line are continuously sent to separation/recovery bath 8 together with the flow.

Abstract: A program development support apparatus is provided. A CPU executes a target program and outputs instruction address/instruction code data. The event detection section asserts and outputs a section trace start signal upon detecting that the instruction address/instruction code data matches a predetermined instruction address or instruction code set as an event condition in advance. When an instruction code of the instruction address/instruction code data is a branch instruction, or the section trace start signal is active, the trace data generation section outputs an uncompressed instruction address as trace data. When the instruction address is not the branch instruction, and the section trace start signal is not active, the trace data generation section generates a plurality of compressed instruction addresses by compressing the instruction address and then combines the compressed instruction addresses and outputs them as the trace data.

Abstract: A heater plate manufactured by receiving a sheath heater within a groove portion formed in a base member made of aluminum or aluminum alloy, placing a joint member made of aluminum or aluminum alloy into said groove portion so as to fix said sheath heater in the groove portion, and press-forging said base member and said joint member to be metal-bonded with said sheath heater fixed in place therebetween, wherein a cross section of said joint member comprises a rectangle, and a width of said rectangle is same as or a little larger than a width of a cross section of the groove portion.

Abstract: Disclosed is a wireless communication apparatus for receiving a code-spread transmission signal. The wireless communication apparatus includes: an RF section; and a baseband section, wherein, in the baseband section, despreaders of an integral submultiple, which is 1/n1, of the number of chips of a spread code are arranged in parallel, and there is provided a propagation measurement section that measures a propagation channel by using the plurality of despreaders a plurality of times in a time-division manner and performing despread of each period corresponding to a chip rate of the spread code.

Abstract: A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member.

Abstract: A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member.

Abstract: A communication apparatus including: a despreading section despreading a reception signal with a spreading code defined in one communication system; a decoding section decoding the reception signal despread by the despreading section; and a first occupation detection section correlatively detecting an occupation state of a communication band with a preamble code defined in the communication system; and a second occupation detection section correlatively detecting an occupation state of a communication band of a signal of another communication system, the signal being expected to arrive as an interference wave, with a preamble code defined in the another communication system.

Abstract: The present invention provides a metal gasket disposed between a cylinder head and a cylinder block, which includes: a thin metal plate having first opening; first elastic metal substrate; second elastic metal substrate; and at least one foamed rubber layer, wherein each of the first and second elastic metal substrates have second opening and a bead formed on a peripheral portion of the opening, wherein the thin metal plate was disposed between the beads of the first and second elastic metal substrates, wherein the at least one foamed rubber layer is provided by a process including foaming a pre-foamed layer including a pre-foamed composition, wherein the pre-foamed layer has a thickness of 15 to 50 ?m and a foaming factor of 2 to 4.

Abstract: The center of rotation of a disk medium 1 when servo information is written thereto coincides as accurately as possible with its center of rotation in the drive into which the disk medium 1 is assembled. The magnetic disk medium 1 is fixed to a spindle hub 4. A centering pin 8a of a push-aside mechanism 9 pushes aside the magnetic disk medium 1 with respect to the center of the spindle hub 4 until the disk-to-hub gap is moved to one side. Then, with a centering pin 8b of a come-back mechanism 10 placed in the same line intersecting with the center of the spindle, the magnetic disk medium 1 is pushed back to the opposite side.

Abstract: The present invention provides a perfluoroelastomer molded article having non-sticking property to metal, which comprises: a perfluoroelastomer crosslinked molded article; and an amorphous fluororesin that coats the perfluoroelastomer crosslinked molded article. Also disclosed are a method for producing the perfluoroelastomer molded article and a rubber material comprising the perfluoroelastomer molded article.

Abstract: A radio-frequency identification system includes (a) responders each having a unique identification number, (b) an interrogator making an inquiry to and receiving a response from each of the responders, and (c) a host computer controlling communication made between the responders and the interrogator, and binary-searching a number space of the identification number of each of the responders for identifying a responder(s) existing in a communication area in which the responders and the interrogator can make communication with each other. The host computer has a function of acting as a discriminator for generating a control signal in accordance with first to N-th (N?2) communication areas in each of which the responders and the interrogator can make communication with each other, binary-searching the number space in each of the first to N-th communication areas one by one to identify a responder(s) existing therein, and inactivating the thus identified responder(s).

Abstract: A high-pressure processing apparatus for supplying a pressure medium into a high-pressure processing chamber 4, which is formed in a pressure vessel 1 to treat a workpiece at a high pressure, is provided. The pressure vessel 1 includes a first vessel section 2 and a second vessel section 3, which can be separated from each other in the axial direction, wherein the high-pressure processing chamber 4 is formed between the first and second vessel sections 2 and 3. Furthermore, a face seal section 5 for tightly sealing the high-pressure processing chamber 4 is formed in the abutment of the first and second vessel sections 2 and 3. A press apparatus 7 for providing an axial force to the face seal section 5 is disposed and the press apparatus 7 has a space 15 for storing a supplementary apparatus, such as a stirrer or the like at a position corresponding to the axial center of the pressure vessel 1.

Abstract: In a semiconductor device, re-wiring is provided on a circuit element formation region of a semiconductor substrate. A columnar electrode for connection with a circuit board is provided on the rewiring. A first insulating film is provided over the semiconductor substrate excluding a connection pad, and a ground potential layer connected to a ground potential is provided on an upper surface of the first insulating film. A re-wiring is provided over the ground potential layer with a second insulating film interposed. The ground potential layer serves as a barrier layer for preventing crosstalk between the re-wiring and circuit element formation region. A thin-film circuit element is provided on the second insulating film, and a second ground potential layer is provided as a second barrier layer over the thin-film circuit element with an insulating film interposed. Re-wiring is provided over the second ground potential layer.

Abstract: The present invention is directed to a gas supply nozzle plate constructed by laminating a plurality of metal members each having a fluid path and branch. A fluid nozzle plate member provided by the invention has high sealing at a joined part, and high reliability even when used in high vacuum or at a high temperature. The fluid nozzle plate member comprises a plurality of plate-like metal members each having a fluid path and/or a branch. In this case, the plurality of plate-like metal members are laminated, and the laminated surfaces thereof are joined together by press forging.

Abstract: For the purpose of efficient transmission based on the UWB system, first and second baseband waveforms are generated at a cycle equivalent to an integral multiple of a carrier to have a specified phase difference from each other. The first baseband waveform is multiplied by the carrier and a first transmission data sequence to acquire a first transmission waveform. The second baseband waveform is multiplied by a phase shifted carrier and a second transmission data sequence to acquire a second transmission waveform. The first transmission waveform is mixed with the second transmission waveform to acquire a transmission signal. The transmission signal is transmitted as a ?/2 shift BPSK signal to transmit a UWB signal. Selecting the baseband waveforms and the carrier makes it possible to configure the transmission band and easily provide division multiplexing transmission.

Abstract: A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.

Abstract: A high-pressure processing apparatus includes a processing vessel including a processing chamber formed therein to perform a certain process onto an object in the processing chamber; fluid feeding means which feeds a high-pressure fluid into the processing chamber; fluid discharging means which discharges the high-pressure fluid from the processing chamber; an agitating unit which is arranged in the processing chamber and is operative to flow the high-pressure fluid over the object by relative rotation to the processing vessel; a communicating channel which is formed in the processing vessel to communicate inside and outside of the processing chamber; a rotary driving member which is coupled to the agitating unit via a shaft portion provided in the communicating channel; and a sealing portion which is provided between the shaft portion and the processing vessel to disconnect the processing chamber from the rotary driving member.

Abstract: When the hatch of a substrate washing chamber 5 is opened to receive a substrate, certain valves are closed, and a valve is opened, supply CO2 to purge the substrate washing chamber 5 to and exclude air. When the hatch is closed, another valve is opened to vent substrate washing chamber so that the CO2 expels any gas and unwanted air from the substrate washing chamber 5 and the conduits. Thereafter, super critical CO2 is used to wash the substrate and clean the circulation line. The flow of supercritical CO2 is sent to the substrate washing chamber 5. After flowing through the circulation line, including a circulation channel 11, it passes through a bypass channel 12 to a decompressor 7. Any chemicals or organic substances left in the circulation line are continuously sent to a separation/recover bath 8 together with the flow.

Abstract: A system and method for performing ranging and positioning as follows by using the procedure for packet transmission and reception between a sender and a recipient. A first radio set transmits packets to a second radio set as a recipient. The second radio set returns the packets without fail after the lapse of time (from the detection of packets) which corresponds to an integral multiple of a prescribed unit time. The first radio set counts, by using its counter, the time which has elapsed from its transmission of packets to its detection of packets from the second radio set. The remainder of the thus counted time after subtraction of the time taken by the second radio set from packet detection to packet return and the processing time of the first radio set itself is converted into the distance of propagation between the first radio set and the second radio set as a recipient.