Patent number: 9530610
Abstract: A method for fabricating a blanking aperture array device for multi-beams includes forming, using a substrate over which a first insulating film, a first metal film, a second insulating film, and a second metal film are laminated in order, electrodes and pads on the second metal film, removing a part of the second metal film, removing the second insulating film using, as a mask, the electrodes, the pads, and a remaining part of the second metal film, and forming openings each being between a pair of electrodes, wherein, a part of the second metal film is etched such that some part of it remains in regions each connecting one of the electrodes and one of the pads, and a region in which entire openings are formed except the openings themselves is configured by the electrodes, pads, and first and second metal films such that the insulating film is not exposed.
Type:
Grant
Filed:
November 30, 2015
Date of Patent:
December 27, 2016
Assignees:
NuFlare Technology, Inc., NTT Advanced Technology Corporation
Inventors:
Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Ryoichi Yoshikawa, Hirofumi Morita, Hirokazu Yamada, Teruaki Safu, Toshifumi Konishi, Takaaki Matsushima, Kazuhisa Kudo, Masaki Yano, Katsuyuki Machida