Abstract: A ternary copolymer of hydroxystyrene, tertiary alkyl (meth)acrylate and substitutable phenoxyalkyl (meth)acrylate having a Mw of 1,000-500,000 is blended as a base resin to formulate a chemically amplified, positive resist composition which has advantages including a significantly enhanced contrast of alkali dissolution rate before and after exposure, high sensitivity, high resolution, a satisfactory pattern profile after exposure, high etching resistance, and process adaptability.

Abstract: A crosslinked solid polymer electrolyte is prepared by adding a reactive polyalkylene oxide and an inorganic lithium salt to a block-graft copolymer comprising first and second block chains, and subjecting the reactive polyalkylene oxide to crosslinking reaction. The crosslinked solid polymer electrolyte has a high ionic conductivity and can be readily formed into a tough film and is thus suited for use in large-size secondary batteries.

Abstract: A chemical amplification positive resist composition comprising a polymeric mixture of a polyhydroxystyrene derivative having a Mw of 1000-500,000 and a copolymer of hydroxystyrene and (meth)acrylate having a Mw of 1000-500,000, as a base resin, has improved dry etching resistance, high sensitivity, high resolution, and process adaptability, and is suppressed in the slimming of pattern films after development with aqueous base.

Abstract: There is disclosed a cross-linked polymer solid electrolyte and a method of manufacturing the same. A crosslinking agent is added to a block-graft copolymer composed of a polymer block chain A represented by formula I and a polymer block chain B represented by formula II; a high energy ray is irradiated to the block-graft polymer in order to crosslink the entire system; and an nonaqueous electrolytic solution is added to the block-graft polymer. There is also disclosed a composite solid electrolyte for use in a solid electrochemical element. The composite solid electrolyte includes an electrically insulating material, an alkali metal salt, a block-graft copolymer composed of a polymer block chain A represented by formula I and a polymer block chain B represented by formula II, and an aprotic organic solvent.

Abstract: There are disclosed a self-crosslinked polymer solid electrolyte, a composite solid electrolyte, and a method of manufacturing the same. A high-energy ray is irradiated to a block-graft copolymer composed of a polymer block chain A represented by formula I and a polymer block chain B represented by formula III in order to crosslink the entire the system. A nonaqueous electrolytic solution is then added to the block-graft polymer to obtain a self-crosslinked polymer solid electrolyte. The self-crosslinked polymer solid electrolyte and an electrically insulating material are combined to obtain a composite solid electrolyte.

Abstract: An organometallic compound represented by the general formula (I) ##STR1## or the general formula (II)R-M.sup.2 -R (II)is evaporated, and then passed through the inner tube of a heat exchanger to be precipitated. The heat exchanger is then heated to re-evaporate the organometallic compound, and the re-evaporated organometallic compound is then precipitated in a filling container which is connected to said heat exchanger and cooled down to a prescribed temperature to fill the container.

Abstract: A method for vaporizing an organometal compound and supplying the resulting vapor thereof to a crystal growth chamber which comprises the steps of heating an organometal compound to a predetermined temperature to obtain vapor of the compound at a predetermined vapor pressure and supplying, in a constant flow rate, the vapor to the surface of a substrate heated under a reduced pressure: an apparatus for vaporizing an organometal compound and supplying the resulting vapor thereof to a crystal growth chamber 11 comprising a first gas flow path for the vapor of the organometal compound which connects a container 20, in which the organometal compound is charged, to a crystal growth chamber heated under a reduced pressure through a first valve 21, a first massflow controller 22 and a second valve 23 in this order; and a constant temperature oven 24 and 25 for controlling the temperature of the container 20 and the first gas flow path extending from the container 20 to the second valve 23, are herein disclosed.

Abstract: An apparatus for vaporizing and supplying an organometal compound comprising a gas flow path for starting gas which connects a container filled with the organometal compound to a crystal growth chamber heated under reduced pressure through a main valve, a massflow controller for the starting gas and a valve for supplying the starting gas; and a flow path for a carrier gas which connects a carrier gas source to the discharge outlet of the valve for supplying the starting gas through a massflow controller for carrier gas and a heat exchanger. The container, the flow path for the starting gas and the flow path for the carrier gas are arranged in a constant temperature oven.