Abstract: There is provided a technique capable of improving the throughput by suppressing stagnation of a substrate in a transfer chamber and by reducing unused time. According to one aspect thereof, a substrate processing apparatus includes: a plurality of process chambers in which a substrate among a plurality of substrates is capable of being processed; a transfer chamber provided with a transfer structure capable of transferring the substrate; and a controller configured to be capable of: (a) calculating a substrate transferable time during which the substrate is capable of being transferred to each of the plurality of process chambers; (b) selecting a substrate transfer path to a process chamber among the plurality of process chambers such that the substrate transferable time is the shortest among those calculated in (a); and (c) performing a control of the transfer structure based on the substrate transfer path selected in (b).

Abstract: A configuration that maintains productivity and can automatically execute and control recipes includes a process chamber that processes a substrate, a first transfer chamber in which the substrate is transferred in a vacuum state, a second transfer chamber in which the substrate is transferred in an atmospheric pressure state, a depressurizable preparatory chamber connecting the first transfer chamber and the second transfer chamber, and a controller that executes a maintenance recipe in the preparatory chamber and a production recipe in the process chamber, respectively, in which, when the controller receives an instruction for executing the production recipe during execution of the maintenance recipe, the controller temporarily stops the maintenance recipe and preferentially executes the production recipe, and continuously executes the temporarily stopped maintenance recipe, after completion of the production recipe.

Abstract: A processing container including a plasma generation space in which a processing gas is plasma-excited and a substrate processing space communicating with the plasma generation space; a plasma generator including a coil arranged to surround the plasma generation space and provided to be wound around an outer periphery of the processing container, and a high-frequency power source that supplies high-frequency power to the coil; a gas supply section that supplies the processing gas to the plasma generation space; a temperature sensor provided outside the processing container and configured to detect a temperature of the processing container; and a controller configured to perform control to cause the temperature of the processing container detected by the temperature sensor to fall within a range of a target temperature defined by a preset upper limit value and a preset lower limit value, prior to execution of a process recipe for processing a substrate.

Abstract: A configuration that maintains productivity and can automatically execute and control recipes includes a process chamber that processes a substrate, a first transfer chamber in which the substrate is transferred in a vacuum state, a second transfer chamber in which the substrate is transferred in an atmospheric pressure state, a depressurizable preparatory chamber connecting the first transfer chamber and the second transfer chamber, and a controller that executes a maintenance recipe in the preparatory chamber and a production recipe in the process chamber, respectively, in which, when the controller receives an instruction for executing the production recipe during execution of the maintenance recipe, the controller temporarily stops the maintenance recipe and preferentially executes the production recipe, and continuously executes the temporarily stopped maintenance recipe, after completion of the production recipe.

Abstract: A substrate processing apparatus includes a substrate heating part, a power supply part and a control device. The control device measures a temperature of the substrate while controlling the substrate heating part such that the temperature of the substrate reaches a first control temperature higher than the target temperature using power supplied by the power supply part. The device measures the temperature of the substrate for a second control temperature lower than the target temperature, and selects the power ratio value providing the best temperature uniformity in the plane of the substrate and a temperature average value for the selected power ratio value from a result of the measurement. The device calculates a control temperature and the power ratio value for the target temperature based on the selected temperature average value and the power ratio value for each of the first and second control temperature.

Abstract: Provides a method and a terminus processing tool whereby terminus processing for the purpose of connection to another optical fiber may be carried out simply. The terminus processing method entails cutting an optical fiber 20 composed of a glass fiber 21 and a coating 24; and with the optical fiber 20 positioned relative to a terminus processing tool that is disposed contacting the coating at the end surface of the optical fiber 20 and that has a protruded-into space for accommodating inward protrusion of the glass fiber 21, and with the cut end surface of the glass fiber 21 facing the protruded-into space, pushing the optical fiber 20 to thereby strip the coating 24 from the glass fiber 21.

Abstract: A substrate processing apparatus including a controller connected to a plurality of sub-controllers for controlling a substrate processing, and an operating section having a display unit for showing an operation screen displaying a daily check data for checking utility equipment relating to each part and having a daily check initial parameter file defined in a client type, a presence of an item and unit conversion. The controller is configured to receive the daily check data from a sub-controller, to convert a unit of the received daily check data, and then to transfer the unit-converted daily check data to the operating section, and the operating section is configured to refer to the daily check initial parameter file and to display the daily check data transferred from the controller on the operation screen.

Abstract: A metal heating apparatus according to an embodiment of the present invention comprises a light output portion for outputting light having a center wavelength in a wavelength range of 200 nm to 600 nm.

Abstract: An optical connector according to an embodiment of the present invention comprises (a) a ferrule incorporating a short fiber; (b) a mechanical splice having a holding part and a fixing part, and adapted so that the fixing part mechanically fixes the short fiber extending from the ferrule held by the holding part, and an optical fiber in an optical cable to butt the short fiber; (c) an outer housing having a housing part in which the mechanical splice is located, and a pair of flexible arms located on both sides of the housing part, the pair of arms each being provided with a locking claw at a tip; and (d) a jacket fixture for fixing a cable jacket, the jacket fixture being coupled to the mechanical splice so that the cable jacket is inserted therein.

Abstract: Provides a method and a terminus processing tool whereby terminus processing for the purpose of connection to another optical fiber may be carried out simply. The terminus processing method entails cutting an optical fiber 20 composed of a glass fiber 21 and a coating 24; and with the optical fiber 20 positioned relative to a terminus processing tool that is disposed contacting the coating at the end surface of the optical fiber 20 and that has a protruded-into space for accommodating inward protrusion of the glass fiber 21, and with the cut end surface of the glass fiber 21 facing the protruded-into space, pushing the optical fiber 20 to thereby strip the coating 24 from the glass fiber 21.

Abstract: A substrate processing apparatus includes an operating section. The operating section includes a display unit having an operation screen, a screen file that stores daily check data monitor screen data in which a row number is settable as a data number, and a data name is settable as item data of a daily check. The operating section further includes a daily check initial parameter file that stores parameter data corresponding to the item data. The operating section displays the daily check data monitor screen data by extracting the screen file and placing the daily check data monitor screen data on the operation screen as a daily check data monitor screen, and by extracting the daily check initial parameter file, searching through the daily check initial parameter file based on the data number, and placing parameter data corresponding to the item data on the operation screen as the daily check data monitor screen.

Abstract: A substrate processing apparatus includes a display unit having an operation screen, a first control section that transmits a control instruction for processing a substrate and a second control section that performs control according to the control instruction from the first control section. The first control section has a screen file that stores screen data in which the first row is settable as item data for a data number, a data name or the like, a parameter file that stores parameter data corresponding to the item data at least, and a display control section that displays the monitor screen by executing the screen file and placing the screen data on the operation screen as a monitor screen and executing the parameter file, searching through the parameter file based on the data number and placing the parameter data corresponding to the item data.

Abstract: A method of producing an optical connecting component in which three-dimensional electric wiring can be easily and accurately performed, and the optical connecting component are provided. A positioning projection 58 disposed on a second slide core 56 for positioning a core pin 54 disposed on a first slide core 55 is fitted in a positioning hole 34 disposed in a lead frame 30. The lead frame 30 is disposed in the vicinity of a lead pattern 31, so that the lead pattern 31 can be insert-molded while being positioned in an accurate position with respect to the second slide core 56. Therefore, it is possible to easily perform three-dimensional electric wiring in an accurate position.

Abstract: An optical connector according to an embodiment of the present invention comprises (a) a ferrule incorporating a short fiber; (b) a mechanical splice having a holding part and a fixing part, and adapted so that the fixing part mechanically fixes the short fiber extending from the ferrule held by the holding part, and an optical fiber in an optical cable to butt the short fiber; (c) an outer housing having a housing part in which the mechanical splice is located, and a pair of flexible arms located on both sides of the housing part, the pair of arms each being provided with a locking claw at a tip; and (d) a jacket fixture for fixing a cable jacket, the jacket fixture being coupled to the mechanical splice so that the cable jacket is inserted therein.

Abstract: The present invention relates to an optical connector and an optical connector assembling method allowing simplification of assembly, improvement of reliability, and lower prices. The optical connector comprises a connector plug for holding a coated optical fiber and a connector socket for holding a coated optical fiber. The connector plug has a fiber holding portion disposed in a plug housing, and a fiber inserting hole is provided in the fiber holding portion. A fiber deflection space for allowing deflection of the coated optical fiber, when the coated optical fibers are butted, is provided in the plug housing. The connector socket has a fiber holding portion disposed in a socket housing, and a fiber inserting hole is provided in the fiber holding portion. A fiber deflection space for allowing deflection of the coated optical fiber, when the coated optical fibers are butted, is provided in the socket housing.

Abstract: A photoelectric coupling assembly and manufacturing method thereof enabling a three dimensional electrical wiring pattern is provided. The assembly includes a photoelectric conversion unit equipped with a photoelectric conversion element and a molded article. The molded article has a hole configured and arranged to have an optical fiber inserted there-through such that a distal end of the fiber faces an active layer of the conversion element, a front surface on which the conversion unit is mounted, and a side surface being contiguous to the front surface. The lead being insert molded into the molded article has a first surface being exposed at the front surface and electrically connected to the conversion element, a second surface being exposed at the side surface, and an engaging portion having a width increasing in a direction away from the front surface. At least a portion of the engaging portion is contained inside the resin forming the molded article.

Abstract: An optical fiber sheet comprises optical fibers sandwiched between sheet members and fixed thereto. Distal ends of the optical fibers extend from outer peripheral edges of the sheet members with resin coatings applied to the distal ends to produce extensions. The distal ends of the extensions are inserted into fiber holes of connectors with the resin coatings applied to the distal ends to be connected with the connectors.

Abstract: An optical backplane includes an optical connector which receives juxtaposed optical signals transmitted in nonparallel to the main surface of a circuit substrate from the circuit substrate or transmits juxtaposed optical signals in nonparallel to the main surface of the circuit substrate to the circuit substrate. The optical connector disposes and accommodates edge portions of a plurality of optical fibers and the disposing direction of the optical fibers in the optical connector is in nonparallel to the main surface of the circuit substrate.

Abstract: A photoelectric coupling assembly and manufacturing method thereof enabling a three dimensional electrical wiring pattern is provided. The assembly includes a photoelectric conversion unit equipped with a photoelectric conversion element and a molded article. The molded article has a hole configured and arranged to have an optical fiber inserted there-through such that a distal end of the fiber faces an active layer of the conversion element, a front surface on which the conversion unit is mounted, and a side surface being contiguous to the front surface. The lead being insert molded into the molded article has a first surface being exposed at the front surface and electrically connected to the conversion element, a second surface being exposed at the side surface, and an engaging portion having a width increasing in a direction away from the front surface. At least a portion of the engaging portion is contained inside the resin forming the molded article.

Abstract: An optical splicer 2 according to an embodiment of the present invention has a plurality of optical fibers 6, and an optical splice member 8 having a plurality of fiber holes 14 in each of which a portion including one end 6a of each fiber 6 is inserted, and a mode field diameter W1 in one end 6a of optical fiber 6 is enlarged relative to a mode field diameter W2 in the other portion of optical fiber 6.