Abstract: A piezoelectric drive element includes: a movable part; a pair of piezoelectric drive parts each connected at one end portion thereof to the movable part and configured to rotate the movable part about at least a rotation axis; and a fixing part to which end portions of the piezoelectric drive parts are connected. The pair of piezoelectric drive parts are aligned in a direction along the rotation axis with the movable part located therebetween, a width of the movable part is narrower than a width of each of the pair of piezoelectric drive parts in a plan view, and the fixing part is placed in a gap region that is outside the movable part and that is located between the pair of piezoelectric drive parts in a plan view.

Abstract: A piezoelectric driving element is a cantilever-type piezoelectric driving element in which one end which is a fixed end is fixed to a support base and another end which is a free end is driven. The piezoelectric driving element includes: a first piezoelectric body disposed on the fixed end side; and a second piezoelectric body disposed on the free end side with respect to the fixed end. Here, a thickness of the second piezoelectric body is set to be smaller than a thickness of the first piezoelectric body.

Abstract: Provided is an actuator including a piezoelectric element capable of satisfying three of a large amplitude, a high resonance frequency, and a large generated force. Actuator (100) is a drive source having a cantilever structure in which one end is a fixed end and the other end is displaced, and includes first piezoelectric body (110), second piezoelectric body (120), and shim member base (130) disposed between first piezoelectric body (110) and second piezoelectric body (120). In first piezoelectric body (110) and second piezoelectric body (120), piezoelectric body removal parts (110a) and (120a) are formed.

Abstract: An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

Abstract: An optical reflector element includes: a first oscillator and a second oscillator for oscillating a reflector and disposed with the reflector being interposed therebetween along a first axis; and a third oscillator for oscillating the first oscillator and the second oscillator. The third oscillator includes: a first assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to one base included in a pair of bases disposed with the first axis being interposed therebetween; and a second assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to an other base included in the pair of bases.

Abstract: An optical reflector element includes: a pair of vibrator groups each of which includes tuning fork vibrators that are coupled together such that vibration centers of the tuning fork vibrators align on an imaginary rotational axis; a reflective body interposed between the pair of vibrator groups; a pair of supports that couple the pair of vibrator groups and the reflective body together; and a base to which the pair of vibrator groups are coupled in a manner that allows the pair of vibrator groups to vibrate.

Abstract: A light control system includes an optical reflection element and a controller. The optical reflection element includes: a reflector; and a first swing portion and a second swing portion disposed at respective one of positions sandwiching the reflector. Each of the first swing portion and the second swing portion includes: a first connection portion coupled to the reflector; a first vibration portion; a second vibration portion; a first drive portion; a second drive portion; and a second connection portion that connects the first and second vibration portions to a base. The controller causes the first and second drive portions of the first swing portion to vibrate in the same phase, and causes the first and second drive portions of the second swing portion to vibrate in the same phase but in the opposite phase to the first swing portion.

Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.

Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts are disposed in each of the pair of vibration parts, and rotate the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: An optical reflecting device includes a movable plate having a reflecting surface, a first support portion, a first drive part, a first frame, and a monitor part for detecting the rotation of the movable plate. The first support portion is connected to the movable plate. The first drive part is formed in the first support portion and rotates the movable plate about a first axis. The first frame contains the movable plate and the first support portion, and is connected to the first support portion. The monitor part extends from that portion of the outer periphery of the movable plate which is most distant from the first axis.

Abstract: An optical reflection element includes a fixed portion having a pair of sides opposite to each other, a pair of first vibration portions having one ends each connected to respective one of the sides of the fixed portion, a pair of connection portions each connected to respective one of another ends of the first vibration portions, a movable frame rotatably supported by another ends of the first vibration portions via the connection portions, a pair of second vibration portions having one ends each connected to respective one of a pair of sides of the movable frame, and a mirror rotatably connected to another ends of the second vibration portions. The second vibration portions are configured to transmit a rotational vibration about a rotation axis to the mirror. The connection portions are connected to the movable frame in a direction of the rotation axis.

Abstract: A scanning mirror includes a mirror unit configured to reflect a laser beam, a supporter configured to cause the mirror unit to rotate and oscillate, and an oscillation sensor configured to output a monitor signal indicating oscillation of the mirror unit. A photodetector detects an intensity of the laser beam. When a value of the monitor signal falls out of a predetermined range of a normal operation and a value of the intensity detected by the photodetector fails to decrease, a breaking signal for causing the supporter to oscillate more than a breaking limit angle of the supporter is input. This scanning mirror and an image projection device using this scanning mirror can display an image at sufficient brightness safely.

Abstract: A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption.

Abstract: A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.

Abstract: An actuator includes a frame, a driver portion having one end connected to an inside of the frame, a movable portion connected to another end of the driver portion, and an electrode provided at the movable portion. The driver portion vibrates the movable portion by being driven by a driving signal. The electrode receives a high-frequency signal higher than that of the driving signal. This actuator is driven at a high speed by a large deflection angle, and can prevent dust from adhering to the movable portion.

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts are disposed in each of the pair of vibration parts, and rotate the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: An actuator includes a fixed frame, a pair of first vibrating portions, a movable frame, a pair of second vibrating portions, a movable portion, and a first monitor signal detector. Each of the first vibrating portions faces the inside of the fixed frame; and has a first end connected to the inside of the fixed frame, and a second end connected to the outside of the movable frame. Each of the second vibrating portions faces the inside of the movable frame; and has a first end connected to the inside of the movable frame, and a second end connected to the movable portion. The second vibrating portions extend in a direction orthogonal to a direction in which the first vibrating portions extend. The first monitor signal detector capable of detecting displacement of the movable frame is provided on a connection portion between the movable frame and the first vibrating portion.