Abstract: A film formation method includes: adsorbing a precursor of a film-forming raw material gas onto a surface of a substrate on which a film is to be formed by irradiating an interior of a processing container with ultraviolet light which has a first wavelength and separates a predetermined bond of the raw material gas while supplying the raw material gas into the processing container in which the substrate is disposed; and forming a layer, in which the precursor and a reaction gas react on the surface of the substrate, by supplying the reaction gas into the processing container.

Abstract: In a linear motion guide unit, a raceway groove formed in a casing of a slider includes a first raceway surface extending along the length direction of the slider and a second raceway surface facing the first raceway surface and extending along the length direction of the slider. The second raceway surface includes a first portion including a center portion in a length direction of the casing, and a second portion including end portions in the length direction of the casing and having a wall surface shape different from a wall surface shape of the first portion. In the first portion, the first raceway surface and the second raceway surface define a symmetric Gothic arch groove, and in the second portion, the second raceway surface has a surface recessed from a position symmetric to the first raceway surface.

Abstract: Separate structural units for an inner gear and a housing of a planetary gear device include an inner gear with a first raised portion formed on the outer peripheral surface of the inner gear, where the first raised portion extends towards in a direction that is inclined with respect to the axial direction of the inner gear. A housing includes a second raised portion formed on an inner peripheral surface, where the second raised portion extends in a direction that is inclined in respect to the axial direction. The housing contains the inner gear such that there is a gap formed between the inner peripheral surface of the housing and the outer peripheral surface of the inner gear. Movement of the inner gear within the interior of the housing is limited through linear contact of the first raised portion and the second raised portion.

Abstract: A manufacturing method of a multilayer ceramic electronic device includes: forming each of stack units by forming each of internal electrode patterns on each of dielectric green sheets, the each of internal electrode patterns including Ni, Sn and Au; forming a multilayer structure by stacking the each of stack units; and firing the multilayer structure, whereby each internal electrode layer is formed from the each of internal electrode patterns and each dielectric layer is formed from the each of the dielectric green sheets wherein, in the each internal electrode layer, an Au concentration near each interface between the each internal electrode layer and the each dielectric layer is larger than an Au concentration in each center portion in a thickness direction.

Abstract: A planetary gear device includes: a housing cover disposed at one end portion of a housing in an axis direction, the housing being configured to house a sun gear and a planetary gear inside the housing; and a carrier cover disposed next to the housing cover in the axial direction in the inside, and configured to support a shaft of the planetary gear from one end portion side in the axial direction. Of a pair of opposing parts opposite to each other in the housing cover and the carrier cover, one opposing part includes an opening that opens in the axis direction, and the other opposing part includes a slide cylindrical part protruding toward inside of the opening in a coaxial manner with an axis of the opening, the slide cylindrical part including an outer peripheral surface that slides on an inner peripheral surface of the opening.

Abstract: A manufacturing method of a multilayer ceramic electronic device includes: forming each of stack units by forming each of internal electrode patterns on each of dielectric green sheets, the each of internal electrode patterns including Ni, Sn and Au; forming a multilayer structure by stacking the each of stack units; and firing the multilayer structure, whereby each internal electrode layer is formed from the each of internal electrode patterns and each dielectric layer is formed from the each of the dielectric green sheets wherein, in the each internal electrode layer, an Au concentration near each interface between the each internal electrode layer and the each dielectric layer is larger than an Au concentration in each center portion in a thickness direction.

Abstract: A ceramic electronic device includes a multilayer chip in which a plurality of dielectric layers of which a main component is ceramic and a plurality of internal electrode layers are stacked. The plurality of internal electrode layers include Ni, Sn and Au.

Abstract: A planetary gear device includes: a housing cover disposed at one end portion of a housing in an axis direction, the housing being configured to house a sun gear and a planetary gear inside the housing; and a carrier cover disposed next to the housing cover in the axial direction in the inside, and configured to support a shaft of the planetary gear from one end portion side in the axial direction. One opposing part of a pair of opposing parts opposite to each other in the housing cover and the carrier cover includes a cone-shaped part whose diameter varies in the axial direction, and the other opposing part of the pair of opposing parts includes a sliding part configured to slide on a peripheral surface of the cone-shaped part with a same axis as an axis of the cone-shaped part.

Abstract: A pattern formation method includes: forming a photosensitive hard mask made of a transition metal oxide film on a surface of a substrate; exposing the photosensitive hard mask to EUV light in a desired pattern; causing a state change in an exposed region by heat generated during exposure; and selectively removing either a region where the state change has occurred or a region where the state change has not occurred.

Abstract: A linear motion guide unit includes a rail having first rolling surfaces extending longitudinally parallel to each other, a movable slider fitting over the rail, second rolling surfaces opposing the first rolling surfaces, respectively, rolling elements that roll while contacting the first and second rolling surfaces, a loop path through which the rolling elements circulate composed of a load-carrying race formed with the first and second rolling surfaces, a first circulation passage formed in the slider parallel to the load-carrying race, and two second circulation passages connecting the load-carrying race and the first circulation passage. The load-carrying race has a first portion at a boundary with the second circulation passage, and a contact angle of the rolling element with the second rolling surface in the first portion is greater than a contact angle of the rolling element with the second rolling surface in a remaining portion of the load-carrying race.

Abstract: A gripping force measurement device includes a body portion and a plurality of pressure sensors. The plurality of pressure sensors includes at least one first sensor and two or more second sensors including pressure-sensitive surfaces oriented in the same direction. A pressure-sensitive surface of the first sensor and the pressure-sensitive surfaces of the two or more second sensors are disposed such that, when a subject pressurizes the pressure-sensitive surface of the first sensor and the pressure-sensitive surfaces of the two or more second sensors, the gripping force measurement device is grippable by the subject.

Abstract: An aspect of mold for producing an end plate of a planetary gear carrier includes a mold body and a cylindrical protrusion extending from a front surface of the mold body. The cylindrical protrusion defines a cylindrical interior space fluidly linked to an interior space of the mold body. The mold also includes an injection gate disposed on a rear surface of the mold body and aligned with a longitudinal axis of the cylindrical protrusion, wherein the injection gate is configured to allow an injection nozzle to inject a molding material into the interior space from an exterior of the mold body. In some aspects, the molding material includes additives that can improve the properties of the resulting molded part. Other aspects of the present disclosure include molded carriers for planetary gear devices, and related processes or methods for making similar molded parts.

Abstract: A planetary gear device includes: a housing cover disposed at one end portion of a housing in an axis direction, the housing being configured to house a sun gear and a planetary gear inside the housing; and a carrier cover disposed next to the housing cover in the axial direction in the inside, and configured to support a shaft of the planetary gear from one end portion side in the axial direction. One opposing part of a pair of opposing parts opposite to each other in the housing cover and the carrier cover includes a cone-shaped part whose diameter varies in the axial direction, and the other opposing part of the pair of opposing parts includes a sliding part configured to slide on a peripheral surface of the cone-shaped part with a same axis as an axis of the cone-shaped part.

Abstract: A method includes: determining, based on an elapsed time, a priority for each of groups obtained by clustering a plurality of pieces of response information based on similarity between the pieces of response information, each response information indicating a response to an event that has occurred, the elapsed time being measured from a time period in which the event recorded in each response information of each group occurred most often; calculating credibility for each response information, based on a number of times specifications of a system relating to the event have been changed after the response, and an elapsed time from date and time when the response recorded in the pieces of response information has been made; and controlling a presentation mode upon presenting the plurality of pieces of response information, based on the priority calculated for each group and the credibility calculated for each response information.

Abstract: A film formation method includes: adsorbing a precursor of a film-forming raw material gas onto a surface of a substrate on which a film is to be formed by irradiating an interior of a processing container with ultraviolet light which has a first wavelength and separates a predetermined bond of the raw material gas while supplying the raw material gas into the processing container in which the substrate is disposed; and forming a layer, in which the precursor and a reaction gas react on the surface of the substrate, by supplying the reaction gas into the processing container.

Abstract: A ceramic electronic device includes a multilayer chip in which a plurality of dielectric layers of which a main component is ceramic and a plurality of internal electrode layers are stacked. The plurality of internal electrode layers include Ni, Sn and Au.

Abstract: A linear motion guide unit 1 includes a rail 10 having a pair of first rolling surfaces extending parallel to each other in a longitudinal direction, a slider 100 that fits over the rail in a relatively movable manner and has a pair of second rolling surfaces opposing the pair of first rolling surfaces, respectively, and a plurality of spheres as rolling elements 200 that roll while contacting the first and second rolling surfaces. The unit 1 has a loop path composed of a load-carrying race 102 formed with the first and second rolling surfaces, a first circulation passage 103 parallel to the load-carrying race and formed in the slider, and two second circulation passages 104 connecting the load-carrying race 102 and the first circulation passage 103, and the rolling elements 200 circulate through the loop path.

Abstract: An aspect of a carrier for a planetary gear device includes two separate endplates that fit together using a snap-fit assembly. Retention protrusions extending from one of the endplates snap-fit into corresponding recesses on the other endplate to assemble the carrier. The shape of the recess is configured to reduce or eliminate any tendency for loads to force retention protrusion to disengage from the recess, which may result in loss of structural integrity of the carrier.

Abstract: A lubrication system for a planetary gear device includes a planetary gear mounted on a planetary gear shaft. The shaft is mounted in a shaft hole that allows the gear to rotate freely about the shaft. Lubricant reservoirs formed as voids or spaces on the inner surface of the shaft hole and outer surface of the shaft provide additional volume for lubricant to lubricate the shaft and shaft hole interface. These lubricant reservoirs extend the lifespan of the lubricant and reduce maintenance requirements of the planetary gear.

Abstract: Separate structural units for an inner gear and a housing of a planetary gear device include an inner gear with a first raised portion formed on the outer peripheral surface of the inner gear, where the first raised portion extends towards in a direction that is inclined with respect to the axial direction of the inner gear. A housing includes a second raised portion formed on an inner peripheral surface, where the second raised portion extends in a direction that is inclined in respect to the axial direction. The housing contains the inner gear such that there is a gap formed between the inner peripheral surface of the housing and the outer peripheral surface of the inner gear. Movement of the inner gear within the interior of the housing is limited through linear contact of the first raised portion and the second raised portion.