Abstract: A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion.

Abstract: A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion.

Abstract: An observation apparatus includes a CCD sensor which has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge signals through the line at one end; an illuminating device for illuminating a moving observation target with a laser beam; an imaging device for focusing scattered light from the moving observation target to form an image on the light-receiving surface; and a driving circuit for driving the CCD such that the shift speed of the charge signals matches the moving speed of the image on the light-receiving means. In some cases, the CCD sensor and the driving circuit has a function of shifting the charge signals in a direction perpendicular to the shift direction.

Abstract: A pattern board (2) having a conductive pattern (2b) formed on an insulating substrate (2a) is irradiated with an electron beam (EB), and current flowing through a current flow path formed between the conductive pattern (2b) and the ground is detected by a current detector (10) while the irradiation position of the electron beam on the pattern board (2) is moved, thereby detecting the presence or absence of the conductive pattern (2b) or a conductor connected thereto at the electron beam irradiation position. The conductive pattern has a plurality of pattern portions which are linked to one another by a linking pattern portion, and current flowing through the linking pattern portion is detected while the irradiation position of the electron beam is moved along a path which successively traverses the tip portions of the plurality of pattern portions, thereby performing an inspection on the plurality of pattern portion.

Abstract: A defect evaluation apparatus of this invention includes a laser irradiation unit for obliquely irradiating a laser beam onto an object, and an observation unit for observing scattered light from inside the object or a surface of the object. The laser irradiation unit irradiates the laser beam onto the object from a plurality of incident directions around an observation optical axis, and the observation unit receives the scattered light from the object to obtain shape information of a defect in the object or on the surface of the object.

Abstract: A detect observing apparatus according to the present invention has a purpose for forming an observing specimen by using a TEM and the like in a positive and simple manner and is used in observation of defect or foreign matter in an object to be tested by means of a laser tomography and includes an illumination means for illuminating observing laser light onto the object to be tested, and a microscope for observing the illuminated object to be tested, the apparatus further comprises a marking means for forming marks at a plurality of points on a surface of the object to be tested in the vicinity of the defect or foreign matter to be observed under the microscope, and a position detecting means for detecting positions of the plurality of marks formed on the surface of the object to be tested and a position of the observed defect or foreign matter through the microscope.

Abstract: An atomic absorption spectrophotometer possessing an electrical heating unit which includes a graphite tube for atomizing a sample by heating the sample; a light emitting unit for emitting measuring light and irradiating the atomized sample with the measuring light; a spectroscope unit for diffracting the measuring light passing the electrical heating unit and selecting the required wavelength component; a detection unit for detecting the quantity of the required wavelength component selected by the spectroscope unit; an input unit to input at least one of the wavelengths of the required wavelength component and the required heating temperature of the electrical heating unit; and a control unit for controlling the above units, which comprises a shading device provided at the propagation axis of the measuring light between the electrical heating unit and the detection unit, and which possesses a light transmitting unit, for restricting the quantity of the measuring light passing the electrical heating unit, wi

Abstract: A pattern inspection apparatus for inspecting an abnormality in a pattern of a plurality of straight lines which are arranged in parallel in a direction perpendicular to the longitudinal direction includes a data acquisition means for acquiring, by photoelectric conversion, first and second image data of the straight lines on first and second lines which pass first and second points at different positions along the straight lines, respectively, and are perpendicular to the straight lines, and a data processing means for detecting the abnormality in the straight lines on the basis of a difference between the first and second image data. The pattern is a pattern of, e.g., inner leads of a TAB tape. When density changes of the first and second image data at a position x along the first and second lines can be approximated by sin.sup.2 x, the data processing means can detect the abnormality by using a relationship established between a phase difference and a density difference between the two changes.

Abstract: A pattern inspection apparatus includes a device for acquiring image data of a target inspection pattern, and an image processing unit for extracting a defect in the target inspection pattern on the basis of the image data and image data of a reference pattern.

Abstract: The object of this invention is to provide an atomic absorptiometer and a metal specimen atomic vapor generation apparatus used in the atomic absorptiometer, which enable a light absorption measurement based on the Zeeman effect highly capable of background correction and eliminate the need for the troublesome work of dismounting a magnet. For this purpose, the following configuration is employed. First, the specimen, hydrochloric acid, and sodium borohydride are delivered and mixed by the peristaltic pump 10 to produce a metallic hydride. The generated gas-liquid mixture solution is separated by the separator 12 into a specimen gas and liquids. The separated specimen gas is introduced into the heating section 30. Electricity is supplied from the power source 28 to the specimen heating section 30 where the specimen gas introduced is heated and separated into hydrogen and a specimen metal vapor to be measured.

Abstract: The invention aims to provide a lumber drying method which can dry lumbers in a short period without causing cracks and a lumber impregnation method to permeate processing agents deep into the lumbers at a low cost. The lumber drying method comprises a process to place lumbers in an airtight container and to heat them, a process to vacuum the inside of the airtight container, and a process to restore the air pressure after the vacuuming process. And, the lumber impregnation method comprises a process to heat lumbers, a process to place the heated lumbers under a vacuumed pressure, a process to immerse the heated lumbers in processing agents under the vacuumed pressure, and a process to restore the pressure of the lumbers immersed in the processing agents under the vacuumed pressure to the air pressure, and to immerse the lumbers in the processing agents under the air pressure.

Abstract: A resist scattered on and attached to unwanted portions is stably detected. A target inspection region including the unwanted portions to which the scattered resist should not be attached is illuminated with white light to obtain a color image, and a region having the same hue and chroma as a resist is detected. The target inspection region may be illuminated with light containing a first wavelength light exhibiting high reflectance for the unwanted portions and high absorbance for the resist and a second wavelength light exhibiting high reflectance for the unwanted portions and high transmittance for the resist to detect a color image obtained with the second wavelength light from the images of the target inspection region which are obtained by illumination with the illumination light. The resist attached to the unwanted portions may be detected on the basis of the contrast of the image obtained upon illumination with only the first wavelength light.

Abstract: The invention intends to provide an atomic absorption spectrophotometer which can establish a uniform heat distribution during heating of a sample and can improve analysis accuracy and analyzing efficiency. For this purpose, a graphite tube type cuvette mounted in a graphite atomizer furnace for an atomic absorption spectrophotometer comprises a large-diameter portion for retaining a sample in place, a small-diameter portion connected to the large-diameter portion and having a smaller diameter than the large-diameter portion, and a step portion for demarcating between the large-diameter portion and the small-diameter portion. The graphite tube type cuvette is formed such that its cross-sectional area in a plane perpendicular to the direction of passage of an electric current supplied to the cuvette is the same in any of the large-diameter portion, the small-diameter portion and the step portion. The amount of resistance heat is thereby also the same in any portions.

Abstract: An apparatus for inspecting repetitive patterns includes a signal generation device for outputting a signal every time each of repetitive patterns reaches a predetermined observation area, and a flash generation device for generating a flash in synchronism with the signal to instantaneously illuminate each of the patterns sequentially reaching the observation area. The signal generation device may be a device for generating a signal upon detecting the predetermined shape of each pattern. The repetitive patterns may be those on a tape carrier which moves, e.g., in the longitudinal direction thereof. It is preferable to provide an image pickup device for picking up the image of each repetitive pattern on the observation area and a display device for displaying the picked-up image. The display device preferably keeps display of the picked-up image of each of the patterns illuminated by the flash for a predetermined period of time within between this illumination and the next illumination by the next flash.

Abstract: In an analysis device, an auxiliary gas supplied from a compressor 1 is introduced from an auxiliary gas inlet 3 via a pipe 2 to a burner through a pressure regulator 5, a pressur meter 6, a pressure switch 7 and a connecting joint 8. On the other hand, a combustible gas supplied from a gas bomb 9 is introduced from a combustible gas inlet 11 via a pipe 10 to the burner through a first electromagnetic valve 12, a pressure regulator 13, a pressure meter 14, a needle valve 15, a second electromagnetic valve 16 and a connecting joint 17 and further via a tube.

Abstract: A light beam emitted by a hollow cathode lamp is concentrated on a central portion of an electrothermal sample atomizing apparatus by a concave mirror. The light concentrated on the central portion of the electrothermal sample atomizing apparatus is further concentrated on a central portion of a flame produced in a burner type sample atomizing apparatus by a lens. The light traveled through the burner type sample atomizing apparatus is condensed by a concave mirror, reflected by a flat mirror, and concentrated on an entrance slit of a spectroscope. Light outgoing through an exit slit of the spectroscope is detected by a photodetector.

Abstract: An apparatus for measuring the line widths of a wiring pattern obtained by etching a metal foil includes a first illumination means for illuminating the wiring pattern from one side with a light beam having a first wavelength, a second illumination means for illuminating the wiring pattern from the other side with a light beam having a second wavelength which is different from the first wavelength, and a measuring means for obtaining information of a line width by the light beam having the first wavelength and a line width by the light beam having the second wavelength, on the basis of the light beams having the first and second wavelengths which advance at the same time point from the wiring pattern simultaneously illuminated by the first and second illumination means to said the other side. The wiring pattern may be repetitive patterns on a moving tape carrier.

Abstract: A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.

Abstract: The position, size, structure, and the like of each particle can be accurately detected. Gray image data of a tomographic image group having a clear positional correlation in a sample where particles are distributed is obtained to obtain three-dimensional gray image data of each particle. Binarization of a density of each pixel data of the three-dimensional gray image data is performed to obtain three-dimensional binary image data of each particle. Three-dimensional shrinkage of the three-dimensional binary image data is performed to convert binary image data of each particle to binary image data of only a central point thereof, thereby the position of each particle is three-dimensionally confirmed.

Abstract: A defect estimating apparatus includes a laser radiating unit For obliquely radiating laser light on a surface to be observed of an object to be inspected, an observing unit for observing, through the surface to be observed, scattered light produced From internal defects or particles of the object by refracted light of the laser light, and observing scattered light or reflected light produced from flaws or particles on the surface by tile laser light, and a component separating unit for allowing the observing unit to perform observation by using both light containing primarily a p-polarized light component of the laser light and light containing primarily an s-polarized light component of the laser light.