Abstract: A shape memory foam material is obtained by impregnating a base foam material in a thermoplastic substance, heating and compressing the same at a temperature the same as or higher than the softening temperature of a thermoplastic substance as well as less than the softening temperature of the base foam material, cooling down while retaining the compressed state, and releasing the pressure after the cooling operation. The compressed state of the shape memory foam material is retained in a room temperature by a hardened product of a thermoplastic substance existing at least in the surface layer part thereof. The compressed state is released by softening the hardened product by heating. Moreover, a soundproof cover for an automobile engine is obtained using this shape memory foam.

Abstract: Provided are an aqueous dispersion for chemical mechanical polishing, which planarizes a surface to be polished and has high shelf stability, a chemical mechanical polishing process excellent in selectivity when surfaces of different materials are polished, and a production process of a semiconductor device.

Abstract: A sound absorbing structure comprising at least one porous member including a plurality of holes, and the holes are at least one kind of through holes and non-through holes. It is preferable that a plurality of porous members are stacked. It is also preferable that the holes of porous members are formed as diameter-varied holes, and an area of opening of each diameter-varied hole formed in the surface opposite to a sound source is largest and the area of opening of each the diameter-varied hole is reduced in a direction of the thickness of the porous member. Moreover, it is also preferable that the sound absorbing structure further comprises a coating film formed on at least a surface of the porous member which is opposite to a sound source wherein the holes penetrates the coating film and the porous member.

Abstract: The invention provides an aqueous dispersion for chemical mechanical polishing that is hard to putrefy, scarcely causes scratches, causes only small dishing and is suitable for used in a micro isolating step or a planarizing step of an inter layer dielectric in production of semiconductor devices.

Abstract: A sound absorbing structure including a film with through holes formed is laminated on a porous member having communicating voids on the side facing a sound source. At least one of the through holes has an opening area of 19 mm2 or more, and the total of the opening area accounts for 1 to 70% with respect to the area of a film formation surface on the porous member. A soundproof cover including the sound absorbing structure disposed on the inner surface of a cover main body are also provided.

Abstract: The present invention relates to a method for producing a composited particle in which an inorganic particle is not released, a composited particle produced by this method, and an aqueous dispersion for CMP containing this composited particle. The method for producing a composited particle of the present invention comprises forming a preliminary particle by adhering one or more types of inorganic particles on at least a part of the surface area of a polymer particle, then, polycondensing at least one selected from among organosilicon compounds and organometal compounds in the presence of the above-mentioned preliminary particle.

Abstract: An elastomer sealing material having low dielectric constant and low dielectric dissipation, which is satisfactory with both of resistance to oxygen plasma and non-adhesion to quartz and can be applied to apparatus utilizing microwaves, is disclosed. The plasma-resistant fluorine-based elastomer sealing material comprises a fluorine-based elastomer having a divalent perfluoropolyether or divalent perfluoroalkylene structure in the main chain thereof and having two or more hydrosilyl groups and addition-reactive alkenyl groups in the terminals or side chains thereof, and a polymer having two or more hydrosilyl groups in the molecule and being capable of addition reacting with the alkenyl groups, the fluorine-based elastomer being crosslinked with the polymer.

Abstract: There is provided an aqueous dispersion for CMP with an excellent balance between chemical etching and mechanical polishing performance. The aqueous dispersion for CMP of the invention is characterized by comprising an abrasive, water and a heteropolyacid. Another aqueous dispersion for CMP according to the invention is characterized by comprising an abrasive, water, a heteropolyacid and an organic acid. Yet another aqueous dispersion for CMP according to the invention is characterized by comprising colloidal silica with a primary particle size of 5-100 nm, water and a heteropolyacid. Preferred for the heteropolyacid is at least one type selected from among silicomolybdic acid, phosphorotungstic acid, silicotungstic acid, phosphoromolybdic acid and silicotungstomolybdic acid. Preferred for the organic acid is at least one selected from among oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, maleic acid, fumaric acid, phthalic acid, malic acid, tartaric acid and citric acid.

Abstract: The present invention provides a resin composition which can contain a large amount of a filler, has excellent moldability, can provide a molded product having both high electrical conductivity and mechanical strength, and is especially useful for a fuel cell separator and a sealing material. The resin composition comprises A) 100 parts by weight of a resin composed of 0 to 99 parts by weight of an epoxy resin and 1 to 100 parts by weight of a polyimide resin, with the proviso that the total amount of the epoxy resin and the polyimide resin is 100 parts by weight, and B) 40 to 900 parts by weight of at least one filler selected from the group consisting of graphite, ketjen black, acetylene black, furnace carbon black and thermal carbon black.

Abstract: A soundproof cover to be mounted on the engine of an automobile is provided. The soundproof cover includes a foam material having a mixed cell structure of open cells and closed cells and a water absorption coefficient of 0.01 g/cm3 or more and less than 0.5 g/cm3. The foam material is provided along the circumferential rim of a cover main body surface facing an engine, and projects to the engine side by a predetermined height such that the foam material closes the gap with respect to the engine at the time it is mounted on the engine.

Abstract: The present invention provides a resin composition which can contain a large amount of a filler, has excellent moldability, can provide a molded product having both high electrical conductivity and mechanical strength, and is especially useful for a fuel cell separator and a sealing material. The resin composition comprises A) 100 parts by weight of a resin composed of 0 to 99 parts by weight of an epoxy resin and 1 to 100 parts by weight of a polyimide resin, with the proviso that the total amount of the epoxy resin and the polyimide resin is 100 parts by weight, and B) 40 to 900 parts by weight of at least one filler selected from the group consisting of graphite, ketjen black, acetylene black, furnace carbon black and thermal carbon black.

Abstract: A sound absorbing structure including a film with through holes formed is laminated on a porous member having communicating voids on the side facing a sound source. At least one of the through holes has an opening area of 19 mm2 or more, and the total of the opening area accounts for 1 to 70% with respect to the area of a film formation surface on the porous member. A soundproof cover including the sound absorbing structure disposed on the inner surface of a cover main body are also provided.

Abstract: It is an object of the present invention to provide an aqueous dispersion for CMP that has low generation of coarse particles from abrasive particles or the like during storage or transport and maintains excellent polishing performance The aqueous dispersion for CMP according to the first aspect of the invention comprises abrasive particles, an amphipathic compound and water. The aqueous dispersion for CMP according to the second aspect of the invention comprising abrasive particles and water, wherein a boundary film is formed at the interface between the aqueous dispersion and the air. The boundary film may comprise an amphipathic compound. The HLB value of the amphipathic compound is preferably greater than 0 but no greater than 6.

Abstract: A shape memory foam material is obtained by impregnating a base foam material in a thermoplastic substance, heating and compressing the same at a temperature the same as or higher than the softening temperature of a thermoplastic substance as well as less than the softening temperature of the base foam material, cooling down while retaining the compressed state, and releasing the pressure after the cooling operation. The compressed state of the shape memory foam material is retained in a room temperature by a hardened product of a thermoplastic substance existing at least in the surface layer part thereof. The compressed state is released by softening the hardened product by heating. Moreover, a soundproof cover for an automobile engine is obtained using this shape memory foam.

Abstract: A slurry for chemical mechanical polishing, which contains polishing particles comprising colloidal particles whose primary particles have a diameter ranging from 5 to 30 nm, wherein the degree of association of the primary particles is 5 or less. This slurry for chemical mechanical polishing makes it possible to minimize the erosion and scratching on the occasion when a conductive material film is subjected to a CMP treatment.

Abstract: There is provided an aqueous dispersion for CMP with an excellent balance between chemical etching and mechanical polishing performance. The aqueous dispersion for CMP of the invention is characterized by comprising an abrasive, water and a heteropolyacid. Another aqueous dispersion for CMP according to the invention is characterized by comprising an abrasive, water, a heteropolyacid and an organic acid. Yet another aqueous dispersion for CMP according to the invention is characterized by comprising colloidal silica with a primary particle size of 5-100 nm, water and a heteropolyacid. Preferred for the heteropolyacid is at least one type selected from among silicomolybdic acid, phosphorotungstic acid, silicotungstic acid, phosphoromolybdic acid and silicotungstomolybdic acid. Preferred for the organic acid is at least one selected from among oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, maleic acid, fumaric acid, phthalic acid, malic acid, tartaric acid and citric acid.

Abstract: A shape memory foam member is disclosed. A coefficient of water absorption of the shape memory foam member is in the range between 0.01 g/cm3 and 0.2 g/cm3 in a non-compressed state. The shape memory foam member is compressed with heating; cooled with keeping the shape memory foam member in the compressed state; and released from the compressive pressure on the shape memory foam member after cooling. The original shape of the shape memory foam member is substantially recovered by heating.

Abstract: Disclosed is a rubber composition for fluorocarbons and/or refrigerating machine oil use, which comprises at least one of a nitrile group-containing rubber, a chloroprene rubber, and an ethylene propylene rubber as a base and at least one of an epoxy compound selected from the group consisting of a monofunctional epoxy compound, a glycidyl ether type epoxy compound and a glycidyl ether type epoxy compound and a compound represented by formula: ##STR1## wherein R.sup.1 represents a hydrogen atom or an alkyl group, R.sup.2 represents an alkyl group or a phenyl group, R.sup.3 represents an alkyl group, an alkoxy group or an alkenyloxy group, and n is 1 or 2.

Abstract: In order to provide a damping material exhibiting an excellent vibration damping property in a wide temperature range, according to the present invention, in a magnetic composite type damping material constructed by bonding an adhesive elastic sheet containing magnetic powder to a constraining plate such as a metal plate by using an adhesive, the adhesive elastic sheet is made of a composite material consisting of rubber elastomer, adhesive resin, plasticizer, magnetic powder, etc.Since not only is the damping material having a construction described above attracted by magnetic force against a vibration source, it also is provided with a superficial adhesiveness, and the excellent vibration damping property is exhibited in a wide temperature range by a synergistic effect of the magnetic force and the adhering force.

Abstract: A rubber-coated gasket material has a rubber layer formed on one or both sides of a metal sheet. The rubber layer has incorporated therein a nitrile rubber containing a carboxyl group in such an amount that the proportion of a carboxylic monomer as calculated in term as of a monomer content in the rubber component is in the range of 2-15 wt. %. The rubber layer is formed in a thickness of 10-300 .mu.m per side, and bonded to a metal sheet with a primer layer based on a phenolic resin being interposed between the rubber layer and the metal sheet.