Abstract: Disclosed is a film forming apparatus that forms a TiN film on a wafer by an ALD method. The film forming apparatus includes a chamber configured to accommodate the wafer, a gas supply mechanism configured to supply a titanium raw material gas including a TiCl4 gas, a nitriding gas including a NH3 gas, and a purge gas into the chamber, an exhaust mechanism configured to evacuate the inside of the chamber, and a controller configured to control the gas supply mechanism such that the TiCl4 gas and the NH3 gas are alternately supplied into the wafer. The gas supply mechanism has an NH3 gas heating unit configured to heat the NH3 gas to change a state of the NH3 gas and supplies the NH3 gas, the state of which is changed by the NH3 gas heating unit, into the chamber.

Abstract: A metal-containing film can be formed with high continuity with respect to a base when forming the metal-containing film on the base by CVD or ALD. A film forming method of forming, by ALD or CVD, a Ti-containing film on a base film of a processing target object having a SiO2 film as the base film includes performing a surface processing of accelerating formation of a silanol group on a surface of the SiO2 film by bringing a fluid containing O and H into contact with the surface of the SiO2 film; and performing a film forming processing of forming the Ti-containing film on the SiO2 film, on which the surface processing is performed, by the ALD or the CVD with a Ti source gas which reacts with the silanol group.

Abstract: To reduce an influence of stray light and stably record/reproduce high-quality data in holographic recording/reproduction. A holographic memory device includes an optical system that guides a reference beam to an optical information recording medium at a desired angle of incidence, a control part that controls the angle of incidence of the reference beam generated in the optical system, and a lens part that images the reference beam in a desired position of the optical information recording medium. Further, at least a first light beam at a first angle and a second light beam at a second angle different from the first angle are output from the optical element, and the optical element is provided so that the first light beam may propagate within an effective diameter of the lens part and the second light beam may propagate to an outside of the effective diameter of the lens part.

Abstract: The purpose of the present invention is to provide a hologram reproducing apparatus and a hologram reproducing method, which are suitable for reproducing hologram. The purpose can be achieved by means of a hologram reproducing apparatus, which reproduces information signals by irradiating an optical information recording medium with reference light, and a hologram reproducing method for the hologram reproducing apparatus.

Abstract: An optical information recording and reproducing device that records information on a recording medium and/or reproduces information on the recording medium, using holography is configured to include a laser light source that performs irradiation with laser light, a first light-shielding portion which is capable of switching between transmission and shielding of laser light emitted from the laser light source, and a driving circuit that drives the switching between transmission and shielding of the first light-shielding portion, and a first movement portion that moves the first light-shielding portion.

Abstract: A light information recording/reproducing apparatus can improve the optical efficiency of an optical system at the time of reproduction to thereby improve the reproduction transfer rate. An optical element (for example, an optical isolator), which removes a return light beam of a light beam, is arranged such that the light beam passes through the optical element at the time of recording information in an optical information recording medium and such that the light beam does not pass through the optical element at the time of reproducing information from the optical information recording medium.

Abstract: An optical information recording/reproducing device which reproduces information from an optical information storage medium in which an interference pattern between a signal beam and a reference beam is recorded as page data includes a controller, a laser light source, a split part, an angle variable part, an optical part, a first light detector, and a second light detector, and the controller controls the angle variable part based on a control signal generated from a first signal detected by the first light detector and a second signal detected by the second light detector.

Abstract: A hologram apparatus and hologram optical system includes: a light source which emits a light beam; a splitter which splits the light beam emitted from the light source into a first light beam and a second light beam; a first lens for exposing an optical information recording medium to convergent light of the first light beam; an optical path angle varying device which causes the second light beam to become incident at substantially the same position as the first light beam in the optical information recording medium and changes an angle of incidence of the second light beam incident on the optical information recording medium; and an optical path shifting element which shifts a position of a light beam incident on the optical information recording medium, according to an angle to the optical information recording medium of the light beam incident on the optical information recording medium.

Abstract: A hologram recording and reproducing device and an angular multiplexing recording and reproducing method capable of detecting an angular error signal for which, in a two-beam angle multiplexing method, high-speed reproducing can be achieved with a superior recovered signal. A branch element branches a light beam, emitted from a light source, into a signal light and a reference light. Angle-variable elements modify the incident angle of the reference light that is incident to the optical information recording medium. A spatial light modulator adds information to the signal light; and an objective lens radiates the signal light to the optical information recording medium. An imaging element detects diffracted light generated from a recording region when the reference light is radiated upon the optical information recording medium; a detection system detects at least two angular error signals for controlling the angle-variable elements; and switching is performed between the two angular error signals.

Abstract: A light information recording/reproducing apparatus can improve the optical efficiency of an optical system at the time of reproduction to thereby improve the reproduction transfer rate. An optical element (for example, an optical isolator), which removes a return light beam of a light beam, is arranged such that the light beam passes through the optical element at the time of recording information in an optical information recording medium and such that the light beam does not pass through the optical element at the time of reproducing information from the optical information recording medium.

Abstract: A hologram reproducing device which reproduces information from a recording medium having information recorded by interfering a signal beam and a reference beam, provided with a first light-angle change unit which changes an irradiation angle of the reference beam; a second light-angle change unit which changes the irradiation angle of the reference beam; a photodetector which detects a reproduction beam; a first light-angle drive-signal output unit which outputs a drive signal of the first light-angle change unit; a first light-angle control unit which controls the first light-angle change unit on the basis of the output of the photodetector; a second light-angle drive-signal output unit which outputs a drive signal of the second light-angle change unit; a second light-angle control unit which controls the second light-angle change unit; and a light-angle interpolation processing unit which controls a control target value of the second light-angle control unit.

Abstract: The purpose of the present invention is to provide a hologram reproducing apparatus and a hologram reproducing method, which are suitable for reproducing hologram. The purpose can be achieved by means of a hologram reproducing apparatus, which reproduces information signals by irradiating an optical information recording medium with reference light, and a hologram reproducing method for the hologram reproducing apparatus.

Abstract: A hologram reproducing device which reproduces information from a recording medium having information recorded by interfering a signal beam and a reference beam, provided with a first light-angle change unit which changes an irradiation angle of the reference beam; a second light-angle change unit which changes the irradiation angle of the reference beam; a photodetector which detects a reproduction beam; a first light-angle drive-signal output unit which outputs a drive signal of the first light-angle change unit; a first light-angle control unit which controls the first light-angle change unit on the basis of the output of the photodetector; a second light-angle drive-signal output unit which outputs a drive signal of the second light-angle change unit; a second light-angle control unit which controls the second light-angle change unit; and a light-angle interpolation processing unit which controls a control target value of the second light-angle control unit.

Abstract: A hologram apparatus and hologram optical system includes: a light source which emits a light beam; a splitter which splits the light beam emitted from the light source into a first light beam and a second light beam; a first lens for exposing an optical information recording medium to convergent light of the first light beam; an optical path angle varying device which causes the second light beam to become incident at substantially the same position as the first light beam in the optical information recording medium and changes an angle of incidence of the second light beam incident on the optical information recording medium; and an optical path shifting element which shifts a position of a light beam incident on the optical information recording medium, according to an angle to the optical information recording medium of the light beam incident on the optical information recording medium.

Abstract: The optical information recording/reproduction device for recording information by irradiating an optical information recording medium with signal light and reference light to form a hologram, and reproducing the information by irradiating the hologram with the reference light, wherein the optical information recording/reproduction device is provided with a branching element for branching laser light from a laser light source into signal light and reference light, a spatial light modulation unit for adding two-dimensional information to the signal light, an objective lens for irradiating an optical information recording medium with the signal light, a photodetector for detecting diffracted light from the optical information recording medium when irradiated with the reference light, and an optical axis adjustment unit disposed between the laser light source and the branching element, the optical axis adjustment unit adjusting the optical axis of the laser light.

Abstract: Diffracted light generated by a recording medium in reproduction is largely blocked by a spatial filter because of a position shift of the recording medium. Thus, the light amount of the diffracted light converged onto an optical detector is reduced and a satisfactory level of a reproducing signal cannot be obtained. In addition, in recording, it is necessary to fix the position of the spatial filter in rays for removing unnecessary frequency components or the like in a light beam emitted from a light source. In actuators having at least two spatial filters, one spatial filter is mounted on an actuator driven along two or more axes and moves independently of another spatial filter, and the other spatial filter is fixed to a common one-axis actuator. Switching of the positions of the spatial filters is performed by the common one-axis actuator.

Abstract: A hologram recording and reproducing device and an angular multiplexing recording and reproducing method capable of detecting an angular error signal for which, in a two-beam angle multiplexing method, high-speed reproducing can be achieved with a superior recovered signal. A branch element branches a light beam, emitted from a light source, into a signal light and a reference light. Angle-variable elements modify the incident angle of the reference light that is incident to the optical information recording medium. A spatial light modulator adds information to the signal light; and an objective lens radiates the signal light to the optical information recording medium. An imaging element detects diffracted light generated from a recording region when the reference light is radiated upon the optical information recording medium; a detection system detects at least two angular error signals for controlling the angle-variable elements; and switching is performed between the two angular error signals.

Abstract: To reduce an influence of stray light and stably record/reproduce high-quality data in holographic recording/reproduction. A holographic memory device includes an optical system that guides a reference beam to an optical information recording medium at a desired angle of incidence, a control part that controls the angle of incidence of the reference beam generated in the optical system, and a lens part that images the reference beam in a desired position of the optical information recording medium. Further, at least a first light beam at a first angle and a second light beam at a second angle different from the first angle are output from the optical element, and the optical element is provided so that the first light beam may propagate within an effective diameter of the lens part and the second light beam may propagate to an outside of the effective diameter of the lens part.

Abstract: An optical information recording and reproducing device that records information on a recording medium and/or reproduces information on the recording medium, using holography is configured to include a laser light source that performs irradiation with laser light, a first light-shielding portion which is capable of switching between transmission and shielding of laser light emitted from the laser light source, and a driving circuit that drives the switching between transmission and shielding of the first light-shielding portion, and a first movement portion that moves the first light-shielding portion.

Abstract: In order to correct signal-to-noise ratio degradation caused by a position error of an aperture filter relative to a signal beam and ensure a high recording signal quality in an optical information apparatus using holography, an optical detection system capable of conducting position adjustment of the aperture filter by using the signal beam is provided and the aperture filter is positioned with high precision.