Abstract: In an optical pickup device for a simple optical system, a light beam emitted from a laser diode is split into first and second light beams by a polarized beam splitter, an optical disc is irradiated with the first light beam to obtain signal light, and the second beam is reflected by a reflection element to obtain reference light. Light beams of the signal light and the reference light are synthesized into one light beam, the synthesized light beam is separated into four light beams by a phase difference forming unit including a grating, a divided wave plate and a polarization grating, and different phase differences are afforded to the signal light and the reference light in each light beam. The four light beams are detected by one detector to generate the reproduction signal.

Abstract: An optical pickup device includes a polarization diffraction grating to diverge an optical beam reflected from an optical disc and an optical detector to receive the optical beam diverged by the polarization diffraction grating, a polarization of 0 order diffracted light diffracted through the polarization diffraction grating is substantially perpendicular to that of a +1 order diffracted light diffracted therethrough, and a polarization filter having a plurality of domains is mounted between the polarization diffraction grating and the optical detector.

Abstract: An optical pickup device including: a laser diode for emitting laser light; an objective lens which irradiates an optical beam emitted from the laser diode; an actuator which displaces the objective lens in a radius direction of the optical disc; a grating for branches an optical beam reflected by an information recording layer into plural regions; and one photodetector having plural light receiving parts for receiving the branched optical beams, wherein the photodetector has a first light receiving part which detects zero-th order grating diffracted light and plural second light receiving parts which detecting grating diffracted light having an order not less than that of ±first order grating diffracted light; a detected signal of the zero-th order grating diffracted light is defined as a reproduction signal; and a detected signal of the grating diffracted light is defined as a signal for servo controlling.

Abstract: In a plasma nitriding method, a processing gas containing nitrogen gas and rare gas is introduced into a processing chamber of a plasma processing apparatus by setting a flow rate thereof as a total flow rate [mL/min(sccm)] of the processing gas per 1 L volume of the processing chamber within a range from 1.5 (mL/min)/L to 13 (mL/min)/L. Further, a nitriding process is performed on oxygen-containing films of target objects to be processed by generating a nitrogen-containing plasma in the processing chamber and while exchanging the target objects.

Abstract: Optical pickup device including: semiconductor laser diode emitting optical flux; objective lens converging flux emitted from the diode and radiating flux to an optical disc; diffraction grating branching an optical flux reflected from the disc; and a photodetector receiving flux branched by the grating and has a plurality of light receiving parts, wherein: the grating has areas A, B and C; among diffracted beams diffracted by a track of the optical disc, only a 0-th order diffracted beam becomes incident upon area A, and 0-th and ±1-st order diffracted beams become incident upon area B; the photodetector detects a reproduction signal from optical fluxes diffracted in areas A, B and C; the plurality of light receiving parts which detect the +1-st order diffracted beam or the ?1-st diffracted beam diffracted in area A are aligned in a direction substantially perpendicular or parallel to a track direction of the disc.

Abstract: An optical pickup device and an optical disc apparatus including the optical pickup device are provided which can obtain a stable servo signal in the recording/reproduction of an information recording medium inexpensively fabricated with multiple information recording surfaces. The optical pickup device includes: a laser diode that emits a light beam; a grating that splits the light beam into at least a main beam, a first sub beam, and a second sub beam; and an objective lens that condenses the light beams and forms at least three spots on an optical disc, wherein the spot of the first sub beam and the spot of the second sub beam are located inside or outside the spot of the main beam on the optical disc, and a tracking error signal is generated from signals obtained by detecting the first sub beam and the second sub beam.

Abstract: An optical pickup device includes a light source for emitting a light beam, an objective lens for collecting the light beam which is emitted and for irradiating an optical disc with the collected light beam, a diffraction element with a plurality of areas for dividing the light beam which is reflected from the optical disc, a detector with a plurality of detection parts for receiving the light beam which is made to diverge by the diffraction element, and a branching mirror for making the light beam branch into an optical path from the light source to the objective lens and an optical path from the objective lens to the detector. The diffraction element gives an aberration to the light beam diffracted at a specified area.

Abstract: An optical pickup device includes a laser diode for emitting a laser beam, an objective lens for collecting the light beam emitted from the laser diode and irradiating an optical disc with the collected light beam, a diffraction element for making the light beam reflected from the optical disc diverge, and a detector having a plurality of detection parts for receiving the diverging light beams caused by the diffraction element. The diffraction element has first, second, and third divided areas, wherein a 0th-order diffracted light from the first divided area, the second divided area, and the third divided area is detected by at least four divided detection parts; and at least two detection parts for detecting the light beam diffracted at the first divided area into first or higher diffraction order are aligned in a direction generally perpendicular to the track of the optical disc.

Abstract: For use with a multi-layer optical disc, an optical pickup can eliminate a problem of causing a focus error signal and a tracking error signal to fluctuate due to interference of a signal light beam with a return light beam from another recording surface of a multi-layer optical disc during reproduction with an optical pickup that produces a tracking error signal and a focus error signal from a difference signal based on polarized reflected light.

Abstract: Stable performance of additional recording and erasing and rewriting operations is allowed regardless of a change in inclination of a guide layer separable optical disc. An optical pickup device includes an angle variable reflection mirror (an optical axis angle variable element) which changes directions of optical axes of first and second light beams when the first light beam for recording or reproduction and the second light beam for servo signal detection are emitted from laser diodes and incident upon the optical disc through an objective lens. When additional recording is performed on the optical disc, the optical axis angle of the angle variable reflection mirror is adjusted such that a tracking error signal detected from a record layer with the first light beam is reduced to almost zero while tracking control is being performed on a guide layer with the second light beam.

Abstract: An optical pickup device includes a semiconductor laser for emitting laser light, an objective lens for irradiating luminous flux emitted from the semiconductor laser to an optical disc, a branching element having a plurality of regions for branching luminous flux reflected from the optical disc to a plurality of fluxes, and a photodetector having a plurality of light receiving parts which receive luminous flux branched by said branching element. Luminous flux which enters at least two regions arrayed along a direction which is made substantially coincident with a tangential direction of the optical disc in regard to substantially a center of the branching element is arranged along a direction which is made substantially coincident with a radial direction of the optical disc on the photodetector.

Abstract: An optical pickup device divides signal light so as to detect the divided signal light. For example, a photodetector can include a region “A” and another region “B.” Among diffracted light diffracted from a track on an optical disc, only zeroth-order diffraction light enters region “A”, whereas the zeroth-order diffraction light, + first-order diffraction light, and ? first-order diffraction light enter region “B”. A focusing error signal from the photodetector is produced based upon a signal detected by the photodetector, whereas a tracking error signal is produced based upon signals detected from the regions “A” and “B.” A stable focusing error signal and a stable tracking error signal can be detected with respect to a dual layer optical disc, or a multi layer optical disc.

Abstract: A plasma processing method for use in device isolation by shallow trench isolation in which an insulating film is embedded in a trench formed in silicon and the insulating film is planarized to form a device isolation film, the method includes a plasma nitriding the silicon of an inner wall surface of the trench by using a plasma before embedding the insulating film in the trench. The plasma nitriding is performed by using a plasma of a processing gas containing a nitrogen-containing gas under conditions in which a processing pressure ranges from 1.3 Pa to 187 Pa and a ratio of a volumetric flow rate of the nitrogen-containing gas to a volumetric flow rate of the entire processing gas ranges from 1% to 80% such that a silicon nitride film is formed on the inner wall surface of the trench to have a thickness of 1 to 10 nm.

Abstract: An optical pickup device includes a semiconductor laser which emits a light beam, first and second objective lenses which focus the light beam onto a first and second optical disc, respectively, a grating which branches a light beam reflected from the second optical disc, an optical detector having a plurality of light receiving parts, which receives light beams branched by the grating, and an actuator which displaces the first and second objective lenses in a radial direction of the first optical disc and the second optical disc. The grating has a first area on which a 0-order diffraction light beam and a +1-order diffraction light beam upon reflection at the second optical disc enter, and a second area on which a 0-order diffraction light beam and a ?1-order diffraction light beam upon diffraction through the second optical disc enter.

Abstract: In an optical pickup device for a simple optical system, a light beam emitted from a laser diode is split into first and second light beams by a polarized beam splitter, an optical disc is irradiated with the first light beam to obtain signal light, and the second beam is reflected by a reflection element to obtain reference light. Light beams of the signal light and the reference light are synthesized into one light beam, the synthesized light beam is separated into four light beams by a phase difference forming unit including a grating, a divided wave plate and a polarization grating, and different phase differences are afforded to the signal light and the reference light in each light beam. The four light beams are detected by one detector to generate the reproduction signal.

Abstract: In an optical pickup device, an optical reflection beam from a multi-layer optical disc is divided into a plurality of areas, divided optical fluxes focus upon different positions on a photodetector, a focusing error signal is detected by using a plurality of divided optical fluxes by a knife edge method, and a tracking error signal is detected by using a plurality of divided optical fluxes. The optical flux divided areas and light receiving parts are disposed in such a manner that in an in-focus state of a target layer, stray light from another layer does not enter servo signal light receiving parts of the photodetector. It is therefore possible to obtain stable servo signals including both the focusing error signal and tracking error signal during recording/reproducing a multi-layer optical disc, without being influenced by stray light from another layer.

Abstract: For obtaining stable servo-signals without receiving ill influences of stray lights from other layers, on both a focus error signal and a tracking error signal, when recording/reproducing a multi-layer optical disc having small gap between layers thereof, a light beam is divided with using a first and a second diffraction gratings. The first diffraction grating is a polarization diffraction grating, and is mounted on an actuator. The second diffraction grating is disposed on a fixed portion. The first diffraction grating has a first region having a center of a light beam and other(s), and among signal lights reflecting from the disc, the light beam entering into the first region is diffracted, and the light beam entering into the second region transmits therethrough. The second diffraction grating transmits the light beam diffracting on the first region of the polarization diffraction grating therethrough, while diffracting the light beam diffracting on the second region.

Abstract: An optical pickup compatible with two wavelengths such as an optical pickup having a two-wavelength, multi-laser source unit to be compatible with both DVDs and CDs prevents, in a simply structured optical system, error signal quality deterioration caused by relative shifting between laser beams and realizes detection of focus and tracking error signals. The optical system is provided with an optical waveguide device and a photodetector. The optical waveguide device includes a holographic diffraction grating having three regions divided by two approximately parallel division lines which extend respectively passing the optical axes of a laser beam for DVD and a laser beam for CD. The photodetector has plural light receiving surfaces each divided into three regions. This allows reliable focus and tracking error signals to be detected during both DVD reproduction and CD reproduction.

Abstract: An optical pickup device and an optical recording/reproduction device are provided that can suppress a tracking error signal offset generated in the boundary between an unrecorded area and a recorded area. A three-beam diffraction grating is divided into two areas. A division line that divides the diffraction grating into two areas has a step in the direction almost vertical to a groove period structure, and the part of the division line in the step has a staircase shape. The phase difference in the groove period structures between one area and the other area, separated by the division line, is about 180 degrees.

Abstract: An optical pickup device includes a semiconductor laser for emitting laser light, an objective lens for irradiating luminous flux emitted from the semiconductor laser to an optical disc, a branching element having a plurality of regions for branching luminous flux reflected from the optical disc to a plurality of fluxes, and a photodetector having a plurality of light receiving parts which receive luminous flux branched by said branching element. Luminous flux which enters at least two regions arrayed along a direction which is made substantially coincident with a tangential direction of the optical disc in regard to substantially a center of the branching element is arranged along a direction which is made substantially coincident with a radial direction of the optical disc on the photodetector.