Abstract: A connecting pad producing method has a first process of projecting an insulating member in a surface of a base material such that a region where a connecting pad is formed is surrounded, a second process of forming a conductive layer in the surface of the base material such that the insulating member is coated with the conductive layer, and a third process of removing the conductive layer with which the insulating member is coated, exposing the insulating member over a whole periphery from the conductive layer, and forming the connecting pad including the conductive layer in a region surrounded by the insulating member.

Abstract: An exposure apparatus that includes a movable stage apparatus. The movable stage apparatus includes a master stage on which a reflecting master is to be mounted, in which, when a space is divided by a plane including a reflection surface of the master, a guide surface to guide movement of the master stage is arranged in a space opposite to a space where an exposure light beam to be reflected by the master passes.

Abstract: A semiconductor device has a semiconductor element having a base, a cavity having a polygonal horizontal cross-section penetrating vertically through the base, a diaphragm arranged on the base to cover the cavity, and a substrate formed with a die bonding pad. A lower surface of the semiconductor element is adhered on the die bonding pad with a die bonding resin. The die bonding pad is formed so as not to contact a lower end of a valley section formed by an intersection of wall surfaces of an inner peripheral surface of the cavity of the semiconductor element.

Abstract: An electronic component has a printed substrate having a die bonding portion, a semiconductor element rigidly bonded to the die bonding portion of the printed substrate by a die bonding resin, and a wire bonding terminal formed by a conductor pattern on the printed substrate that is connected to the semiconductor element by a bonding wire. A groove portion located at a level lower than the conductor pattern of the printed substrate is formed in a region located on at least a die bonding portion side in a region surrounding the wire bonding terminal.

Abstract: An electrostatic capacitive vibration sensor has a substrate, a through-hole, a vibrating electrode plate, and a fixed electrode plate opposite the vibrating electrode plate. The fixed electrode plate is subjected to vibration to perform membrane oscillation. Pluralities of acoustic holes are made in the fixed electrode plate. The vibrating and fixed electrode plate are disposed on a surface side of the substrate such that an opening on the surface side of the through-hole is covered. A lower surface of an outer peripheral portion of the vibrating electrode plate is partially fixed to the substrate. A vent hole that communicates a surface side and a rear surface side of the vibrating electrode plate is made between the surface of the substrate and the lower surface of the vibrating electrode plate. In addition, the acoustic hole has a smaller opening area except at the outer peripheral portion.

Abstract: An electronic component has a board, a semiconductor element mounted on an upper surface of the board, a ground electrode formed in a region surrounding the semiconductor element on the upper surface of the board, a conductive cap that overlaps the board such that the semiconductor element is covered therewith, and a conductive joining member that joins a whole periphery of a lower surface of the conductive cap to the ground electrode. The conductive cap includes a pressing portion on the lower surface thereof The lower surface of the conductive cap and the ground electrode are joined by the conductive joining member on an outer peripheral side of the pressing portion.

Abstract: A vacuum processing apparatus capable of attaining compatibility between the decrease for the number of foreign particles deposited on a sample in a lock chamber and improvement of the throughput, in which an open speed controllable valve is disposed and the depressurization speed can be controlled automatically by a controlling computer.

Abstract: A coil component (100) comprising coil-containing insulator enclosure and a magnetic core (80). The coil-containing insulator enclosure is obtained by enclosing a coil (30), except for end portions (12, 22) of the coil (30), with an insulator (50), wherein the insulator (50) comprises at least a first resin. The magnetic core (80) is made of a mixture of a second resin (82) and powder, which comprises magnetic powder (84). The coil-containing insulator enclosure is embedded in the magnetic core (80).

Abstract: This invention aims at preventing a space including the guide surface of a reticle stage from interfering with an exposure light beam. In order to achieve this object, in a movable stage apparatus having a reticle stage on which a reflecting reticle is to be mounted, when the space is divided by a plane including the reflection surface of the reticle, the guide surface for moving the reticle is arranged in a space opposite to a space where an exposure light beam reflected by the reticle passes.

Abstract: A movable stage apparatus includes a reticle stage on which a reflecting reticle is to be mounted, in which when a space is divided by a plane including a reflection surface of the reticle, a guide surface to guide movement of the master reticle stage is arranged in a space opposite to a space where an exposure light beam to be reflected by the reticle passes. The reticle stage includes a coarse movement stage which reciprocally moves on the guide surface formed on a base of the movable stage apparatus in a scanning direction along the guide surface in non-contact with the coarse movement stage and has a six-axis alignment mechanism. The reflection surface of the reticle is arranged to face vertically downward, and the fine movement stage is supported in non-contact with the coarse movement stage and is positioned in six-axis directions by a six-axis alignment mechanism, and by a self weight support mechanism which supports a weight of the fine movement stage.

Abstract: A stage base includes a plate which supports a stage. The plate has a first structure and a second structure, and the first and second structures are coupled. The stage base further includes a component which is arranged on the plate and has a cooling unit, a coolant channel arranged to extend through the plate into the component, and a seal member arranged between the first structure and the second structure so as to surround the coolant channel, an interior and an exterior of the seal member being fastened with a fastener.

Abstract: A stage base includes a plate which supports a stage. The plate has a first structure and a second structure, and the first and second structures are coupled. The stage base further includes a component which is arranged on the plate and has a cooling unit, a coolant channel arranged to extend through the plate into the component, and a seal member arranged between the first structure and the second structure so as to surround the coolant channel, an interior and an exterior of the seal member being fastened with a fastener.

Abstract: A stage base includes a plate which supports a stage, a component which is arranged on the stage and has a cooling unit, and a coolant channel arranged to extend through the plate into the component.

Abstract: A coil component (100) comprises a coil-containing insulator enclosure and a magnetic core (80). The coil-containing insulator enclosure can be obtained by enclosing a coil (30), except for end portions (12, 22) of the coil (30), with an insulator (50), wherein the insulator (50) comprises at least first resin. The magnetic core (80) is made of a mixture of a second resin (82) and powder, which comprises at least magnetic powder (84). The coil-containing insulator enclosure is embedded in the magnetic core (80).

Abstract: A magnetic core is obtained by hardening or curing a mixture of magnetic powder and resin. The magnetic core shows a superior DC bias characteristic which does not become drastically saturated but is gently saturated even beyond 1000*103/4? [A/m]. Therefore, the magnetic core has sufficient relative permeability more than ten.

Abstract: This invention aims at preventing a space including the guide surface of a reticle stage from interfering with an exposure light beam. In order to achieve this object, in a movable stage apparatus having a reticle stage on which a reflecting reticle is to be mounted, when the space is divided by a plane including the reflection surface of the reticle, the guide surface for moving the reticle is arranged in a space opposite to a space where an exposure light beam reflected by the reticle passes.

Abstract: A synthetic fiber capable of absorbing and disabsorbing moisture comprising a component capable of absorbing and disabsorbing moisture and a fiber-forming polymer. The fiber of the present invention has a moisture absorption of 1.5% or more when it is allowed to reach a moisture equilibrium under the circumstance of 25° C.×60%RH and then is allowed to stand for 30 min. under the circumstance of 34° C.×90%RH, and has a moisture disabsorption of 2% or more when it is allowed to reach a moisture equilibrium under the circumstance of 34° C.×90%RH and then is allowed to stand for 30 min. under the circumstance of 25° C.×60%RH. The fiber also has a value of −1 to 5 in terms of b value in the CIE-LAB color system when it is allowed to stand for 30 days.

Abstract: A toner empty detecting system for use in an electrophotographic printer. A sensor detects the presence of toner and provides toner-empty or toner-present signals. A first counter is incremented when toner-empty signals are detected at pre-determined time intervals and the first counter is cleared when a toner-present signal is detected. When the first counter reaches a predetermined value (first occurrence), the first counter is cleared and a second counter counts the number of printed pages until the first counter again reaches the same predetermined value (second occurrence). An indicator signals the first and second occurrence. Upon the second occurrence, the values of the first counter, second counter and indicator are compared and a comparison signal is provided. The printing is stopped if the comparison signal indicates that an actual toner-empty condition exists and the toner empty condition is displayed.