Patents by Inventor Kazuyuki Tezuka
Kazuyuki Tezuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11532467Abstract: A maintenance device has a cover and a fixing member. The cover is in a vacuum atmosphere during substrate processing, is formed to have a size corresponding to a boundary line between a first part and a second part of a processing container, which can be separated into the first part and the second part, or an opening surface separating the first part and the second part, and has airtightness, and visual transparency at least in a part. The fixing member fixes in an airtight manner the cover along the boundary line between the first part and the second part of the processing container or to the opening surface separating the first part and the second part.Type: GrantFiled: September 2, 2020Date of Patent: December 20, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Takehiro Ueda, Jun Hirose, Kazuyuki Tezuka
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Publication number: 20200402764Abstract: A maintenance device has a cover and a fixing member. The cover is in a vacuum atmosphere during substrate processing, is formed to have a size corresponding to a boundary line between a first part and a second part of a processing container, which can be separated into the first part and the second part, or an opening surface separating the first part and the second part, and has airtightness, and visual transparency at least in a part. The fixing member fixes in an airtight manner the cover along the boundary line between the first part and the second part of the processing container or to the opening surface separating the first part and the second part.Type: ApplicationFiled: September 2, 2020Publication date: December 24, 2020Applicant: Tokyo Electron LimitedInventors: Takehiro UEDA, Jun HIROSE, Kazuyuki TEZUKA
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Patent number: 10665431Abstract: A method for performing a process on a target in a chamber. A gas discharge unit includes a first space having a discharge hole for discharging a first gas, a second space having a discharge hole for discharging a second gas and a third space having a discharge hole for discharging a gas generated between the first and second spaces. A distribution unit includes a first distribution pipe communicating with the first space, a second distribution pipe communicating with the second space and a third distribution pipe communicating with the third space. A valve group includes a first valve opened or closed to the first distribution pipe and a second valve opened or closed to the second distribution pipe. The method includes switching, without mixing the first gas and the second gas, the gas discharged from the discharge hole in the third space by opening or closing the valve group.Type: GrantFiled: June 8, 2018Date of Patent: May 26, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Kazuyuki Tezuka, Kenichi Kato, Atsushi Sawachi, Takamichi Kikuchi, Takanori Mimura
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Publication number: 20180294145Abstract: A method for performing a process on a target in a chamber. A gas discharge unit includes a first space having a discharge hole for discharging a first gas, a second space having a discharge hole for discharging a second gas and a third space having a discharge hole for discharging a gas generated between the first and second spaces. A distribution unit includes a first distribution pipe communicating with the first space, a second distribution pipe communicating with the second space and a third distribution pipe communicating with the third space. A valve group includes a first valve opened or closed to the first distribution pipe and a second valve opened or closed to the second distribution pipe. The method includes switching, without mixing the first gas and the second gas, the gas discharged from the discharge hole in the third space by opening or closing the valve group.Type: ApplicationFiled: June 8, 2018Publication date: October 11, 2018Inventors: Kazuyuki Tezuka, Kenichi Kato, Atsushi Sawachi, Takamichi Kikuchi, Takanori Mimura
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Patent number: 9169558Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.Type: GrantFiled: November 6, 2009Date of Patent: October 27, 2015Assignees: TOKYO ELECTRON LIMITED, FUJIKIN INCORPORATEDInventors: Jun Hirose, Kazuyuki Tezuka, Yohei Uchida, Mutsunori Koyomogi, Takahiro Matsuda, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Patent number: 8394230Abstract: A plasma processing apparatus is provided with a replacement time detecting unit, which detects the status of residual charges which attract a semiconductor wafer and detects a time when an electrostatic chuck is to be replaced, at a time when a direct voltage application from a direct current source is stopped and the semiconductor wafer is brought up from the electrostatic chuck.Type: GrantFiled: March 13, 2007Date of Patent: March 12, 2013Assignee: Tokyo Electron LimitedInventor: Kazuyuki Tezuka
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Publication number: 20120132367Abstract: There is provided a processing apparatus including a processing gas discharge unit provided within a processing chamber so as to face a mounting table and configured to discharge a processing gas into the processing chamber; a first space corresponding to a central portion of a processing target object; a second space corresponding to an edge portion of the processing target object; at least one third space formed between the first space and the second space; and a processing gas distribution unit including processing gas distribution pipes and valves. The spaces are provided within the processing gas discharge unit and partitioned by partition walls. At the spaces, there are formed discharge holes for discharging the processing gas. The processing gas distribution pipes communicate with the spaces, and the valves are opened or closed to allow adjacent processing gas distribution pipes to communicate with each other or be isolated from each other.Type: ApplicationFiled: November 23, 2011Publication date: May 31, 2012Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuyuki Tezuka, Kenichi Kato, Atsushi Sawachi, Takamichi Kikuchi, Takanori Mimura
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Publication number: 20120031500Abstract: To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus 1 has a fluid controlling unit 2 and a fluid introducing unit 3. The fluid introducing unit 3 is divided into three parts: a first and a second inlet-side shutoff/open parts 5, 6 disposed on the inlet side, each made up of 2×N/2 on-off valves 23, and a fluid controlling unit-side shutoff/open part 7 made up of 4×M on-off valves 23, disposed between the first and second inlet-side shutoff/open parts 5, 6 and the fluid controlling unit 2.Type: ApplicationFiled: November 6, 2009Publication date: February 9, 2012Inventors: Jun Hirose, Kazuyuki Tezuka, Yohei Uchida, Mutsunori Koyonogi, Takahiro Matsuda, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20110232846Abstract: Disclosed is a magnetic field generator for magnetron plasma. The magnetic field generator is provided with a plurality of magnetic segments, and generates a predetermined multi-pole magnetic field around the periphery of a workpiece substrate within a process chamber. The strength of the multi-pole magnetic field is controlled so that the state of the multi-pole magnetic field is matched different plasma processes. Further, the pattern of the multi-pole magnetic field can be changed so as to match different sizes of the substrate.Type: ApplicationFiled: June 6, 2011Publication date: September 29, 2011Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Koji MIYATA, Kazuyuki TEZUKA, Koichi TATESHITA, Hiroo ONO, Kazuya NAGASEKI, Shinji HIMORI
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Publication number: 20100218895Abstract: A plasma processing apparatus is provided with a replacement time detecting unit, which detects the status of residual charges which attract a semiconductor wafer and detects a time when an electrostatic chuck is to be replaced, at a time when a direct voltage application from a direct current source is stopped and the semiconductor wafer is brought up from the electrostatic chuck.Type: ApplicationFiled: March 13, 2007Publication date: September 2, 2010Applicant: TOKYO ELECTRON LIMITEDInventor: Kazuyuki Tezuka
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Patent number: 7472581Abstract: A leak rate measuring method measures a leak rate of a vacuum apparatus including a vacuum chamber in which an object is accommodated to be processed, a first gas exhaust pump connected to the vacuum chamber via a first valve serving as a conductance variable valve, and a second valve connected to a downstream side of the first gas exhaust pump in a gas flowing direction. In the leak rate measuring method, there is provided a circulating path branched from a gas exhaust path between the first gas exhaust pump and the second valve and connected to the vacuum pump to communicate therewith. The pressure inside the vacuum chamber is monitored by circulating a gas into the vacuum chamber through the circulating path with first gas exhaust pump under the condition that the first valve is set at a predetermined conductance and the second valve is closed.Type: GrantFiled: March 7, 2006Date of Patent: January 6, 2009Assignee: Tokyo Electron LimitedInventors: Takashi Kitazawa, Atsushi Kobayashi, Kazuyuki Tezuka
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Patent number: 7299104Abstract: Shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber are necessary to be suppressed by the apparatus and method of the invention, whereby contamination of a substrate by particles is suppressed. If one vacuum chamber is a substrate processing chamber for performing a vacuum process on the substrate and the other chamber is a transfer chamber having a substrate transfer device therein, the gate valve is opened when inner pressures of both the vacuum chambers are less than 66.5 Pa and higher one thereof is less than twice a lower one thereof. Preferably, a purge gas for peeling of particles is supplied, before supplying the purge gas for pressure control, into the substrate processing chamber with a flow rate greater than that of the purge gas for pressure control.Type: GrantFiled: June 2, 2004Date of Patent: November 20, 2007Assignee: Tokyo Electron LimitedInventors: Kazuyuki Tezuka, Hiroshi Koizumi, Tsuyoshi Moriya, Hiroyuki Nakayama
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Publication number: 20070160447Abstract: A semiconductor treating device (1) includes treating chamber (2) connected to a common transportation chamber (8) and treating a substrate (W) to be treated. A gas supply system (40) for supplying system (40) for supplying a predetermined gas to each of the treating chambers (2) is attached to each chamber. The gas supply system (40) has a primary side connection unit (23) connected to the source of the predetermined gas and has a flow rate control unit (13). The primary side connection unit (23) connected to the source of the predetermined gas and has a flow rate control unit (13). The primary side connection unit (23) is placed on the lower side of the corresponding treating chamber (2). The flow rate control unit (13) is placed on a gas line for supplying the gas from the primary side connection unit (23) to the corresponding treating chamber (2). The flow rate control unit (13) is provided such that at least a part of it is superposed on the upper side of the primary side connection unit (23).Type: ApplicationFiled: February 4, 2005Publication date: July 12, 2007Applicant: Tokyo Electron LimitedInventors: Norihiko Amikura, Kazuyuki Tezuka, Risako Miyoshi
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Publication number: 20060207314Abstract: A leak rate measuring method measures a leak rate of a vacuum apparatus including a vacuum chamber in which an object is accommodated to be processed, a first gas exhaust pump connected to the vacuum chamber via a first valve serving as a conductance variable valve, and a second valve connected to a downstream side of the first gas exhaust pump in a gas flowing direction. In the leak rate measuring method, there is provided a circulating path branched from a gas exhaust path between the first gas exhaust pump and the second valve and connected to the vacuum pump to communicate therewith. The pressure inside the vacuum chamber is monitored by circulating a gas into the vacuum chamber through the circulating path with first gas exhaust pump under the condition that the first valve is set at a predetermined conductance and the second valve is closed.Type: ApplicationFiled: March 7, 2006Publication date: September 21, 2006Applicant: TOKYO ELECTRON LIMITEDInventors: Takashi Kitazawa, Atsushi Kobayashi, Kazuyuki Tezuka
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Publication number: 20050211383Abstract: Disclosed is a magnetic field generator for magnetron plasma. The magnetic field generator is provided with a plurality of magnetic segments, and generates a predetermined multi-pole magnetic field around the periphery of a workpiece substrate within a process chamber. The strength of the multi-pole magnetic field is controlled so that the state of the multi-pole magnetic field is matched different plasma processes. Further, the pattern of the multi-pole magnetic field can be changed so as to match different sizes of the substrate.Type: ApplicationFiled: August 21, 2003Publication date: September 29, 2005Inventors: Koji Miyata, Kazuyuki Tezuka, Koichi Tateshita, Hiroo Ono, Kazuya Nagaseki, Shinji Himori
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Publication number: 20040240971Abstract: Suppressed are shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber, whereby contamination of a substrate by particles is suppressed. If one vacuum chamber is a substrate processing chamber for performing a vacuum process on the substrate and the other chamber is a transfer chamber having a substrate transfer device therein, the gate valve is opened when inner pressures of both the vacuum chambers are less than 66.5 Pa and a higher one thereof is less than twice a lower one thereof. Preferably, a purge gas for peeling of particles is supplied, before supplying the purge gas for pressure control, into the substrate processing chamber with a flow rate greater than that of the purge gas for pressure control.Type: ApplicationFiled: June 2, 2004Publication date: December 2, 2004Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuyuki Tezuka, Hiroshi Koizumi, Tsuyoshi Moriya, Hiroyuki Nakayama
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Publication number: 20040129218Abstract: The invention comprises a lower electrode which is disposed in a processing chamber and holds a wafer W, and an exhaust ring mechanism disposed between the lower electrode and an inner wall of the processing chamber, wherein the exhaust ring mechanism has an exhaust ring, and a magnetic field forming section which forms a magnetic field parallel to the principal plane of the exhaust ring, and thereby preventing plasma leak from a plasma region to a non-plasma region by the formed magnetic field, and a plasma processing apparatus using the exhaust ring mechanism.Type: ApplicationFiled: December 19, 2003Publication date: July 8, 2004Inventors: Toshiki Takahashi, Kazuyuki Tezuka, Takashi Kitazawa, Norihiko Amikura, Hiroshi Koizumi
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Patent number: D494552Type: GrantFiled: June 12, 2003Date of Patent: August 17, 2004Assignee: Tokyo Electron LimitedInventors: Kazuyuki Tezuka, Takashi Kitazawa, Norihiko Amikura, Hiroshi Koizumi