Abstract: A gyro sensor includes: a base body; a vibrating body; a driving portion driving the vibrating body in a direction of a first axis; a movable electrode portion displaceable, according to angular velocity about a second axis perpendicular to the first axis, in a direction of a third axis perpendicular to the first axis and the second axis; a first spring portion connected to the vibrating body and a first side surface of the movable electrode portion, the first side surface intersecting the first axis or the second axis; a second spring portion connected to the vibrating body and a second side surface of the movable electrode portion, the second side surface being parallel to the first side surface. The first spring portion and the second spring portion have portions extending in the direction of the first axis and portions extending in a direction of the second axis.

Abstract: A gyro sensor includes a substrate, an oscillation member, fixed driving electrodes and a movable driving electrode that oscillated the oscillation member, fixed detection electrodes and a movable detection electrode that id detected a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member, a bias voltage application unit that applies a bias voltage to the oscillation member, and a storage unit, and the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit.

Abstract: A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis.

Abstract: A physical quantity sensor includes: a substrate; first and second displacement members in a spatial plane on the substrate and having rotation shafts; fixed electrodes on the substrate opposed to the first and second displacement members; a support member supporting the rotation shafts; fixing members supporting the support member via a spring unit; and a driving unit oscillating the support member in an oscillation direction. Each of the first and second displacement members shifts perpendicularly to the spatial plane around an axis of the corresponding rotation shaft. Each rotation shaft is shifted in an opposite direction from the center of gravity of the corresponding displacement member.

Abstract: A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

Abstract: A physical quantity sensor includes a first rocking body and a second rocking body. Each of the rocking bodies is supported on a substrate by a first supporting portion and a second supporting portion. The first rocking body is partitioned into a first region and a second region by a first axis (supporting axis) when viewed in plane, and the second rocking body is partitioned into a third region and a fourth region by a second axis (supporting axis) when viewed in plane. The mass of the second region is larger than the mass of the first region, and the mass of the third region is larger than the mass of the fourth region. An arranged direction of the first region and the second region is the same as an arranged direction of the third region and the fourth region.

Abstract: A composite sensor includes an angular velocity sensor element, an acceleration sensor element, and a drive circuit adapted to generate a first signal used to excite a vibration of the angular velocity sensor element, and the drive circuit supplies the acceleration sensor element with a second signal based on the first signal.

Abstract: There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.

Abstract: A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view.

Abstract: A physical quantity sensor includes a first rocking body and a second rocking body. Each of the rocking bodies is supported on a substrate by a first supporting portion and a second supporting portion. The first rocking body is partitioned into a first region and a second region by a first axis (supporting axis) when viewed in plane, and the second rocking body is partitioned into a third region and a fourth region by a second axis (supporting axis) when viewed in plane. The mass of the second region is larger than the mass of the first region, and the mass of the third region is larger than the mass of the fourth region. An arranged direction of the first region and the second region is the same as an arranged direction of the third region and the fourth region.

Abstract: A physical quantity sensor includes a first rocking body and a second rocking body. Each of the rocking bodies is supported on a substrate by a first supporting portion and a second supporting portion. The first rocking body is partitioned into a first region and a second region by a first axis (supporting axis) when viewed in plane, and the second rocking body is partitioned into a third region and a fourth region by a second axis (supporting axis) when viewed in plane. The mass of the second region is larger than the mass of the first region, and the mass of the third region is larger than the mass of the fourth region. An arranged direction of the first region and the second region is the same as an arranged direction of the third region and the fourth region.

Abstract: A gyro sensor includes: a base body; a vibrating body; a driving portion driving the vibrating body in a direction of a first axis; a movable electrode portion displaceable, according to angular velocity about a second axis perpendicular to the first axis, in a direction of a third axis perpendicular to the first axis and the second axis; a first spring portion connected to the vibrating body and a first side surface of the movable electrode portion, the first side surface intersecting the first axis or the second axis; a second spring portion connected to the vibrating body and a second side surface of the movable electrode portion, the second side surface being parallel to the first side surface. The first spring portion and the second spring portion have portions extending in the direction of the first axis and portions extending in a direction of the second axis.

Abstract: A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis.

Abstract: A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

Abstract: A MEMS sensor formed by processing a multi-layer wiring structure, includes: a movable weight portion coupled to a fixed frame portion with an elastic deformable portion and having a hollow portion formed at the periphery; a capacitance electrode portion including a fixed electrode portion fixed to the fixed frame portion and a movable electrode portion connected to the movable weight portion and arranged to face the fixed electrode portion; and an adjusting layer for adjusting at least one of amass of the movable weight portion, a damping coefficient of the movable electrode portion, and spring characteristics in the elastic deformable portion, wherein the adjusting layer includes at least one insulating layer that is a constituent element of the multi-layer wiring structure.

Abstract: A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view.

Abstract: A physical quantity sensor includes: a substrate; first and second displacement members in a spatial plane on the substrate and having rotation shafts; fixed electrodes on the substrate opposed to the first and second displacement members; a support member supporting the rotation shafts; fixing members supporting the support member via a spring unit; and a driving unit oscillating the support member in an oscillation direction. Each of the first and second displacement members shifts perpendicularly to the spatial plane around an axis of the corresponding rotation shaft. Each rotation shaft is shifted in an opposite direction from the center of gravity of the corresponding displacement member.

Abstract: A physical quantity sensor includes a first rocking body and a second rocking body. Each of the rocking bodies is supported on a substrate by a first supporting portion and a second supporting portion. The first rocking body is partitioned into a first region and a second region by a first axis (supporting axis) when viewed in plane, and the second rocking body is partitioned into a third region and a fourth region by a second axis (supporting axis) when viewed in plane. The mass of the second region is larger than the mass of the first region, and the mass of the third region is larger than the mass of the fourth region. An arranged direction of the first region and the second region is the same as an arranged direction of the third region and the fourth region.

Abstract: A method is provided for manufacturing an ink jet recording head including a reservoir to which ink is supplied from outside, a pressure generating chamber leading to the reservoir, and a nozzle orifice leading to the pressure generating chamber. According to the method, the ink jet recoding head is fabricated by conducting semiconductor processes such as a film forming step, a photolithography step, an etching step and the like, on a single substrate. Thus, there is no need for multiple substrates or adhesives.

Abstract: A physical quantity sensor includes: the fixed arm section includes a first side surface insulating film disposed on a side surface of the laminate structure, a first side surface conductor film disposed on a surface of the first side surface insulating film, and a first connection electrode section provided to the upper insulating layer, and electrically connected to the first side surface conductor film, the movable arm section includes a second side surface insulating film disposed on a side surface of the laminate structure, a second side surface conductor film disposed on a surface of the second side surface insulating film, and a second connection electrode section provided to the upper insulating layer, and electrically connected to the second side surface conductor film, and the first side surface conductor film and the second side surface conductor film are disposed so as to be opposed to each other.