Abstract: An object to be processed such as a semiconductor wafer is processed by supplying a process fluid such as an ozone gas and a water vapor into a process vessel from a supply source through a supply pipe. During the process, a temperature of the process fluid flowing through the supply pipe is detected. By previously measuring and recording a relationship between a temperature of the process fluid and a flow rate of the process fluid, for example, a flow rate of the process fluid can be determined based on the detected temperature of the process fluid.

Abstract: A common solvent vapor supply source 41 and a common processing gas supply source 42 supply ozone gas and steam to a plurality of processing vessels 30A, 30B. Pressures in the processing vessels are regulated by adjusting the openings of the valuable throttle valves 50A, 50B, which are placed in exhaust lines 80A, 80B, respectively.

Abstract: A common solvent vapor supply source 41 and a common processing gas supply source 42 supply ozone gas and steam to a plurality of processing vessels 30A, 30B. Pressures in the processing vessels are regulated by adjusting the openings of the valuable throttle valves 50A, 50B, which are placed in exhaust lines 80A, 80B, respectively.

Abstract: Disclosed herein are a derivative of dihydrotriazole represented by the general formula (I): ##STR1## wherein R.sup.1 represents an amino group, lower alkoxy group, or lower alkyl amino group, R.sup.2 represents a hydrogen atom, halogen atom, or lower alkyl group and R.sup.3 represents a hydrogen atom, lower alkyl group, benzyl group, furyl group, phenyl group or phenyl group substituted with a halogen atom, hydroxyl group, carboxyl group, methoxycarbonyl group, lower alkyl group or lower alkoxy group, and a herbicidal composition containing as an active ingredient at least one of the derivatives of dihydrotriazole.

Abstract: Disclosed herein is herbicidal composition comprising a derivative of 1,2,4-triazole as an active ingredient, represented by the general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom, a halogen atom or a C.sub.1 -C.sub.2) alkyl group; R.sup.2 represents a hydrogen atom, a halogen atom, a (C.sub.1 -C.sub.2) alkyl group fluoromethyl group (--CH.sub.2 F),3,3,3-trifluoropopyl group, methoxy group, cyano group, methoxymethyl group, methylthio group, methoxycarbonyl group or isopropoxycarbonyl group and R.sup.3 represents a thiocarbamoyl group or a group represented by the general formula (II): ##STR2## wherein R.sup.4 represents a hydrogen atom, a (C.sub.1 -C.sub.2) alkyl group or a hydroxy (C.sub.1 -C.sub.2) alkyl group and R.sup.5 represents a hydrogen atom, a C.sub.1 -C.sub.2) alkyl group, halogeno (C.sub.1 -C.sub.2) alkyl group, hydroxy (C.sub.1 -C.sub.

Abstract: Disclosed herein are a derivative of tetrahydrobenzothiazole represented by the formula (I): ##STR1## wherein R represents a methyl group or ethyl group; R.sup.1 represents a hydrogen atom, a hydroxyl group, methoxy group or O.dbd.=together with R.sup.2 ; R.sup.2 represents a hydrogen atom or O.dbd.=together with R.sup.1 ; and X represents a methylene group, hydroxymethylene group, carbonyl group or --O-- with the proviso that R is not a methyl group when (1) R.sup.1 represents a hydroxyl group or methoxy group and X represents a methylene group or hydroxymethylene group or (2) R.sup.2 represents .dbd.O together with R.sup.1 and X represents a carbonyl group, and a herbicidal composition containing the same as an active ingredient.

Abstract: Disclosed herein are the derivatives of tetrahydrobenzothiazole represented by the general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom, a straight-chain alkyl group having 1 to 6 carbon atoms or branched-chain alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or a phenyl group and R.sup.2 represents a chemical group selected from the group consisting of: ##STR2## wherein R.sup.3 represents a hydrogen atom, a methyl group or an acetyl group and R.sup.4 represents a hydrogen atom, a hydroxyl group, methoxy group or acetoxy group and herbicidal compositions containing at least one of the derivatives of tetrahydrobenzothiazole as an active ingredient.

Abstract: Disclosed herein is a derivative of tetrahydrobenzothiazolyl-1,3,5-triazinone represented by the formula (I): ##STR1## wherein R is a chemical group selected from the group consisting of 1-phenylethyl, 1-methylpropyl, 2-methylpropyl, allyl, 2-propynyl, cyclopropyl, cyclopentyl, phenyl, ethoxycarbonylmethyl, 2-tetrahydrofurylmethyl, 2-acetoxyethyl, 2-chloroethyl, 2-cyanoethyl, 2-hydroxyethyl, 2-methoxyethyl, 2,2-dimethoxyethyl, 2-(propionyloxy)ethyl, 2-(ethoxycarbonyl)ethyl, 2-(4-chlorobenzoyloxy)ethyl, 1-hydroxymethyl)propyl, 3-hydroxypropyl, 3-methoxypropyl, 3-acetoxypropyl, 3-morpholinopropyl and 3-(2-methylpiperidino)propyl, and a herbicidal composition containing the derivative as an active ingredient thereof.

Abstract: Disclosed herein are a derivative of tetrahydrobenzothiazole represented by the formula (I): ##STR1## wherein R represents a methyl group, ethyl group or propyl group; R.sup.1 represents a hydrogen atom, a hydroxyl group methoxy group, acetoxy group, propionyloxy group, butylyloxy group, chloroacetoxy group, methoxyacetoxy group, C.sub.1 to C.sub.4 -alkylamino group or di(C.sub.1 to C.sub.4)-alkylamino group, or represents O.dbd.together with R.sup.2 ; R.sup.2 represents a hydrogen atom or represents O.dbd.together with R.sup.1 ; and X represents a methylene group, hydroxymethylene group, carbonyl group or --O--, and a herbicidal composition containing the same as an active ingredient.

Abstract: Disclosed herein are the derivatives of tetrahydrobenzothiazole represented by the general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom, a straight-chain alkyl group having 1 to 6 carbon atoms or branched-chain alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or a phenyl group and R.sup.2 represents a chemical group selected from the group consisting of: ##STR2## wherein R.sup.3 represents a hydrogen atom, a methyl group or an acetyl group and R.sup.4 represents a hydrogen atom, a hydroxyl group, methoxy group or acetoxy group and herbicidal compositions containing at least one of the derivatives of tetrahydrobenzothiazole as an active ingredient.

Abstract: Disclosed herein are a derivative of tetrahydrobenzothiazole represented by the formula (I): ##STR1## wherein R represents a hydrogen atom, a hydroxyl group or a lower acyloxy group such as acetoxy group and propionyloxy group and X represents a methylene group, C.sub.1 to C.sub.4 -alkylamino group, benzylamino group or --O--, and a herbicidal composition containing the same as an active ingredient.

Abstract: Disclosed herein are a derivative of tetrahydrobenzothiazole represented by the formula (I): ##STR1## wherein R.sup.1 and R.sup.2 represent respectively a straight chain alkyl group having 1 to 6 carbon atoms or a branched chain alkyl group having 1 to 6 carbon atoms, and a herbicidal composition containing the same as an active ingredient.

Abstract: Disclosed herein are a salt of a derivative of N-(tetrahydrobenzothiazolylcarbamoyl)oxamic acid, represented by the formula: ##STR1## wherein R.sup.1 represents a straight-chain alkyl group having one to six carbon atoms, branched-chain alkyl group having up to and including six carbon atoms, cyclic alkyl group having up to and including six carbon atoms or a phenyl group; R.sup.2 represents a hydrogen atom or a methyl group; M represents an alkali metal atom or an alkaline earth metal atom; n is 1 when M is an alkali metal atom and n is 1/2 when M is an alkaline earth metal atom and M' is a hydrogen atom or the same as M, and a herbicidal composition containing the same as an active ingredient.

Abstract: A compound of 1,5-disubstituted 1,2,4-triazole-3-carboxamide represented by the general formula; ##STR1## wherein R.sup.1 is alkyl of one to three carbon atoms, chloro, fluoro, iodo, trifluoromethyl or nitro, R.sup.2 is hydrogen, methyl or chloro, R.sup.3 is hydrogen or methyl is provided in the invention, which shows an excellent herbicidal activity.

Abstract: Disclosed is a derivative of tetrahydrobenzothiazole represented by the general formula (I): ##STR1## wherein R.sup.1 represents one of the following groups: ##STR2## wherein R.sup.2 represents a hydrogen atom, methyl group, acetyl group, benzoyl group, phenoxycarbonyl group or 3-pyridylcarbonyl group and R.sup.3 represents a hydrogen atom, hydroxy group, methoxy group or acetoxy group, ##STR3## and a herbicidal composition comprising as active ingredient at least one of the derivatives of tetrahydrobenzothiazole.

Abstract: A herbicidal composition comprising a herbicidally effective amount of a compound of the formula ##STR1## wherein R is methoxy, ethoxy, propoxy, isopropoxy or allyloxy and an agriculturally acceptable carrier and a method for inhibiting growth of weeds comprising applying the herbicidal composition to soil medium to inhibit the growth of weeds is disclosed.

Abstract: This invention provides novel fungicidal compositions comprising a carrier and a fungicidally effective amount of a compound having the general formula ##STR1## WHEREIN EACH OF R and R' stands for a member of the group consisting of H, halogen, CH.sub.3, OCH.sub.3, OH and NO.sub.2.These novel compositions have been found to have a superior fungicidal effect on various plant diseases in the field of agriculture and horticulture.

Abstract: A novel fungicidal composition for agricultural use is proposed. It has as the effective substance at least a member selected from the group defined by the following general formula: ##STR1## wherein R stands for methyl or chlorine atom.

Abstract: Novel N-trichloroacetyl-N'-chlorobenzoylhydrazine derivatives, having the following formula: ##STR1## WHERE N STANDS FOR 1 OR 2, AND ESPECIALLY ADAPTED FOR USE AS FUNGICIDAL AGENT FOR AGRICULTURAL USE, AND PROCESS FOR MANUFACTURING SAME.

Abstract: A compound of 1,5-disubstituted .Iadd.-1H-.Iaddend.1,2,4-triazole-3-carboxamide represented by the general formula; ##STR1## wherein R.sup.1 is alkyl of one to three carbon atoms, chloro, fluoro, iodo, trifluoromethyl or nitro, R.sup.2 is hydrogen, methyl or chloro, R.sup.3 is hydrogen or methyl is provided in the invention, which shows an excellent herbicidal activity.