Abstract: According to one embodiment, a semiconductor memory device includes: a semiconductor substrate; a first semiconductor pillar above the semiconductor substrate; a first insulating layer comprising a first section and a second section, the first section being in contact with the semiconductor substrate and a bottom of the first semiconductor pillar, and the second section covering a side of the first semiconductor pillar; conductive layers and second insulating layers stacked one by one above the semiconductor substrate and covering the second section of the first insulating layer; a first plug on the first semiconductor pillar; and an interconnect on the first plug.

Abstract: A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.

Abstract: A semiconductor memory device includes first and second memory cell transistors, first and second word lines electrically connected to the first and second memory cell transistors, respectively, first and second transfer transistors. The first and second transistors are electrically connected to the first and second word lines, respectively. The sizes of the first transistor and the second transistor are different.

Abstract: A semiconductor memory device includes a first memory cell, a second memory cell above the first memory cell, a first word line electrically connected to a gate of the first memory cell, a second word line electrically connected to a gate of the second memory cell, and a control unit that performs an erasing operation on the first and second memory cells. During the erasing operation, the control unit applies a first voltage to a first word line and a second voltage higher than the first voltage to a second word line.

Abstract: According to one embodiment, a semiconductor device includes a cell portion and a peripheral portion, including: a substrate, a first insulating layer disposed on the substrate, a first conductive layer disposed on the first insulating layer, a second insulating layer disposed on the first conductive layer, and a second conductive layer disposed on the second insulating layer.

Abstract: A semiconductor device including first and second transistors having first and second gates and first and second source/drain regions, respectively. First and second contacts are electrically connected to the first and the second source/drain regions, respectively. A width of a first bottom surface of the first contacts in a gate width direction of the first-gate is wider than a width of the first bottom surface in a gate length direction of the first-gate. Widths of a second bottom surface of the second-contact are narrower than a longitudinal direction width of the first bottom surface. A high-concentration region is formed between the first source/drain regions and the first-contact. Extending widths of an outline of the high-concentration region extending from an outline of the first bottom surface in the longitudinal direction are larger than extending widths of an outline of the high-concentration region extending from an outline thereof in the short direction.

Abstract: In the device, first and second transistors have first and second gates and first and second source/drain regions, respectively. First and second contacts are electrically connected to the first and the second source/drain regions, respectively. A width of a first bottom surface if the first contacts in a gate width direction of the first-gate is wider than a width of the first bottom in a gate length direction of the first-gate. Widths of a second bottom surface of the second-contact are narrower than the longitudinal direction width of the first bottom. The high-concentration region is formed between the first source/drain regions and the first-contact. Extending widths of an outline of the high-concentration region extending from an outline of the first bottom in the longitudinal direction is larger than extending widths of an outline of the high-concentration region extending from an outline thereof in the short direction.

Abstract: A semiconductor device includes an element isolation insulating film adjacent to an active area, a gate insulating film formed on a semiconductor substrate in the active area, paired gate electrodes located on the gate insulating film, a contact plug located on the active area between the gate electrodes, a pair of first upper lines located on the gate electrodes, a second upper line located on the gate electrodes, and a stopper film above upper surfaces of the gate electrodes and side surfaces of the gate electrodes. The element isolation insulating film has a first height of an upper surface thereof with reference to an upper surface of the semiconductor substrate and a second height of another upper surface thereof with reference to another upper surface of the semiconductor substrate. The first height is smaller than the second height.

Abstract: A semiconductor device includes an element isolation insulating film, memory cell transistors formed in an element isolation region and having respective gate electrodes, and a stopper film for forming a contact, formed both on a sidewall of the gate electrode of each transistor and on the element isolation insulating film between the gate electrodes. A level difference is set between the upper surface of the element isolation insulating film and the upper surface of the semiconductor substrate in the element isolation region. The level difference is set so that a level difference between the gate electrodes is smaller than a level difference in the gate electrode. Furthermore, the surface of the semiconductor substrate in the drain contact formation region is located lower than the surface of the semiconductor substrate corresponding to the gate electrode.

Abstract: A semiconductor memory device having a gate electrode and a diffusion layer, comprising a plurality of memory cells each of which including the gate electrode and the diffusion layers; a first contact layer connected to one of the diffusion layer of the memory cell; a second contact layer connected to the first contact layer; a bit line connected to the second contact layer; and a conductive layer connected to at least two of the diffusion layers that are other than the diffusion layer connected to the first contact layer, at least two of the diffusion layers being arranged in a direction vertical to the bit line, a height of the conductive layer substantially being same as a height of the first contact layer.

Abstract: A semiconductor memory device, including a first memory cell having a first gate electrode, a first diffusion layer, and a second diffusion layer; a first contact layer connected to the first diffusion layer of the first memory cell; a second contact layer connected to the first contact layer; a second memory cell having a second gate electrode, a third diffusion layer and a fourth diffusion layer, the second gate electrode of the second memory cell electrically connected to the first gate electrode of the first memory cell, the first and second memory cells arranged in a direction perpendicular to the first bit line; and a conductive layer commonly connected to the second diffusion layer of the first memory cell and the fourth diffusion layer of the second memory cell, a height of the conductive layer substantially being coplanar with a height of the first contact layer.

Abstract: A semiconductor memory device having a gate electrode and a diffusion layer, comprising a plurality of memory cells each of which including the gate electrode and the diffusion layers; a first contact layer connected to one of the diffusion layer of the memory cell; a second contact layer connected to the first contact layer; a bit line connected to the second contact layer; and a conductive layer connected to at least two of the diffusion layers that are other than the diffusion layer connected to the first contact layer, at least two of the diffusion layers being arranged in a direction vertical to the bit line, a height of the conductive layer substantially being same as a height of the first contact layer.